Piezoelectric device, probe, electronic apparatus, and ultrasonic imaging apparatus

Patent metadata

Field	Value
Publication number	US-2016346808-A1
Application number	US-201615167793-A
Country	US
Kind code	A1
Filing date	May 27, 2016
Priority date	May 29, 2015
Publication date	Dec 1, 2016
Grant date	—

Abstract

A piezoelectric device includes: an elastic layer that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body that is provided on the elastic layer, has a first surface in contact with the elastic layer and a second surface on an opposite side to the first surface, and is preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode provided on the second surface of the piezoelectric body; and a second electrode that is provided on the second surface of the piezoelectric body. A gap is formed between the first and second electrodes corresponding to the orientation region in the plan view.

First claim

What is claimed is:

1 . A piezoelectric device, comprising:
an elastic layer that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body that is provided on the elastic layer, has a first surface in contact with the elastic layer and a second surface on an opposite side to the first surface, and is (100) preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode electrically connected to the piezoelectric body; and a second electrode electrically connected to the piezoelectric body, wherein a gap is formed between the first and second electrodes corresponding to the orientation region in the plan view.

2 . The piezoelectric device according to claim 1 ,
wherein the piezoelectric body is formed of a transition metal oxide having a perovskite structure.

3 . The piezoelectric device according to claim 2 ,
wherein the first surface of the piezoelectric body is formed as an orientation control layer that is formed of a transition metal oxide having a perovskite structure.

4 . The piezoelectric device according to claim 3 ,
wherein the orientation control layer is formed of a transition metal oxide having a perovskite structure that contains bismuth in an A site and iron and titanium in a B site.

5 . The piezoelectric device according to claim 3 ,
wherein a resistance value of the orientation control layer is equal to or greater than 10 6 Ωcm.

6 . The piezoelectric device according to claim 3 ,
wherein the orientation control layer is (100) preferentially oriented.

7 . The piezoelectric device according to claim 3 ,
wherein the piezoelectric body includes a Pb(ZrTi)O 3 layer laminated on the orientation control layer.

8 . The piezoelectric device according to claim 7 ,
wherein the orientation control layer contains Pb.

9 . The piezoelectric device according to claim 8 ,
wherein the orientation control layer is a continuous layer.

10 . The piezoelectric device according to claim 8 ,
wherein the orientation control layer is a discontinuous layer.

11 . The piezoelectric device according to claim 1 ,
wherein a groove is formed on the second surface of the piezoelectric body in the gap.

12 . A probe, comprising:
the piezoelectric device according to claim 1 ; and a housing that supports the piezoelectric device.

13 . A probe, comprising:
the piezoelectric device according to claim 2 ; and a housing that supports the piezoelectric device.

14 . A probe, comprising:
the piezoelectric device according to claim 3 ; and a housing that supports the piezoelectric device.

15 . An electronic apparatus, comprising:
the piezoelectric device according to claim 1 ; and a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device.

16 . An electronic apparatus, comprising:
the piezoelectric device according to claim 2 ; and a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device.

17 . An electronic apparatus, comprising:
the piezoelectric device according to claim 3 ; and a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device.

18 . An ultrasonic imaging apparatus, comprising:
the piezoelectric device according to claim 1 ; a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device to generate an image; and a display device that displays the image.

19 . An ultrasonic imaging apparatus, comprising:
the piezoelectric device according to claim 2 ; a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device to generate an image; and a display device that displays the image.

20 . An ultrasonic imaging apparatus, comprising:
the piezoelectric device according to claim 3 ; a processing circuit that is connected to the piezoelectric device and processes an output of the piezoelectric device to generate an image; and a display device that displays the image.

Assignees

• Seiko Epson Corp

Inventors

• Miyazawa Hiromu
• Isshiki Tetsuya
• Ito Hiroshi
• Yamada Masayoshi
• Tsuruno Jiro
• Nakamura Tomoaki

Classifications

• G01S7/62

  Cathode-ray tube displays · CPC title

• A61B8/44

  Constructional features of the ultrasonic, sonic or infrasonic diagnostic device · CPC title

• A61B8/4483

  characterised by features of the ultrasound transducer · CPC title

• B06B1/0644 Primary

  using a single piezoelectric element (B06B1/0688 takes precedence) · CPC title

• G01S15/89

  for mapping or imaging · CPC title