Heat treatment apparatus emitting flash of light

Patent metadata

Field	Value
Publication number	US-2016343584-A1
Application number	US-201615228800-A
Country	US
Kind code	A1
Filing date	Aug 4, 2016
Priority date	Feb 9, 2007
Publication date	Nov 24, 2016
Grant date	—

Abstract

Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.

First claim

1 .- 12 . (canceled)

13 . A method for irradiating a substrate with flashes of light to heat the substrate, the method comprising:
(a) a first irradiation step of irradiating the substrate with a flash of light from a first flash lamp, to increase a surface temperature of the substrate to a predetermined temperature or more, the flash of light having a first peak intensity; and (b) a second irradiation step of irradiating the substrate with a flash of light from a second flash lamp, to maintain the surface temperature of the substrate at the predetermined temperature or more, the flash of light having a second peak intensity lower than the first peak intensity.

14 . The method according to claim 1 , wherein the flash of light having the first peak intensity has a pulse width shorter than a pulse width of the flash of light having the second peak intensity.

15 . The method according to claim 1 , wherein the substrate is heated to produce a metal silicide.

Assignees

• Screen Holdings Co Ltd

Inventors

• Yokouchi Kenichi

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P14/2923

  being conductive materials, e.g. metallic silicides · CPC title