Systems and methods for providing characteristics of an impedance matching model for use with matching networks

Patent metadata

Field	Value
Publication number	US-2016343548-A1
Application number	US-201514716797-A
Country	US
Kind code	A1
Filing date	May 19, 2015
Priority date	May 19, 2015
Publication date	Nov 24, 2016
Grant date	—

Abstract

Systems and methods for generating and using characteristics of an impedance matching model with different impedance matching networks are described impedances and/or power efficiencies are measured using a network analyzer or a sensor. The impedances and/or power efficiencies are used to determine the characteristics. With use of different impedance matching networks, the values of the characteristics are changed to achieve same or similar results across different plasma tools for a variety of conditions.

First claim

1 . A method comprising:
receiving a reference impedance, wherein the reference impedance is measured for a frequency operating range of a sensor and for a position range associated with one or more reference variable capacitors within a reference impedance matching network that is coupled to a load, wherein the load has an impedance; accessing an impedance matching model; when the load impedance is applied at an output of the impedance matching model, generating a set of reference characteristics of pre-determined elements of the impedance matching model to achieve the reference impedance at an input of the impedance matching model; receiving a test impedance, wherein the test impedance is measured for the frequency operating range of the sensor and for the position range associated with one or more test variable capacitors within a test impedance matching network coupled to the load, wherein the reference impedance matching network has a same arrangement of components as that of the test impedance matching network; when the load impedance is applied at the output of the impedance matching model, generating a set of test characteristics of the pre-determined elements of the impedance matching model to achieve the test impedance at the input of the impedance matching model; and applying in a plasma tool having the test impedance matching network the set of test characteristics to the impedance matching model to calculate one or more values of one or more parameters at the output of the impedance matching model.

2 . The method of claim 1 , further comprising:
receiving another test impedance, wherein the other test impedance is measured for the frequency operating range and for the position range associated with one or more other test variable capacitors within another test impedance matching network coupled to the load, wherein the other test impedance matching network has the arrangement of the reference impedance matching network; when the load impedance is applied at the output of the impedance matching model, generating another set of test characteristics of the pre-determined elements of the impedance matching model to achieve the other test impedance at the input of the impedance matching model; and applying in another plasma tool the other set of test characteristics to the impedance matching model to calculate one or more values of the one or more parameters at the output of the impedance matching model, wherein the other plasma tool includes the other test impedance matching network.

3 . The method of claim 1 , further comprising:
determining whether information indicating that the test impedance matching network is included within the plasma tool or information indicating that the reference impedance matching network is included within the plasma tool is received, wherein said applying in the plasma tool the set of test characteristics to the impedance matching model to calculate one or more values of one or more parameters at the output of the impedance matching model is performed upon determining that the information indicating that the test impedance matching network is included within the plasma tool is received; and applying in the plasma tool the set of reference characteristics to the impedance matching model to calculate one or more values of the one or more parameters at the output of the impedance matching model upon determining that the information indicating that the reference impedance matching network is included within the plasma tool is received.

4 . The method of claim 1 , wherein one of the reference characteristics of one of the pre-determined elements represents one or more characteristics of one or more circuit components within the reference impedance matching network, wherein one of the one or more characteristics of one of the one or more circuit components is associated with a parameter that changes in a direction in which the parameter associated with another one of the one or more characteristics of another one of the one or more circuit components changes.

5 . The method of claim 1 , further comprising applying in another plasma tool the impedance matching model having the set of reference characteristics to calculate one or more values of the one or more parameters at the output of the impedance matching model, wherein the other plasma tool includes the reference impedance matching network.

6 . The method of claim 1 , wherein the sensor is implemented within a network analyzer, wherein the impedance matching model is derived from a portion of the reference impedance matching network.

7 . The method of claim 1 , wherein the frequency operating range is associated with a frequency of operation of a radio frequency (RF) generator to be coupled to the reference impedance matching network.

8 . The method of claim 1 ,
wherein the test characteristics include capacitances of the pre-determined elements, or inductances of the pre-determined elements, or an inductance of one of the pre-determined elements and a capacitance of another one of the pre-determined elements, wherein the reference characteristics include capacitances of the pre-determined elements, or inductances of the pre-determined elements, or an inductance of one of the pre-determined elements and a capacitance of another one of the pre-determined elements.

9 . The method of claim 1 , wherein the reference impedance matching network has a different identification number than the test impedance matching network.

10 . The method of claim 1 , wherein one of the test characteristics of one of the pre-determined elements represents one or more characteristics of one or more capacitors within the reference impedance matching network, or represents one or more characteristics of one or more inductors within the reference impedance matching network.

11 . The method of claim 1 , wherein the reference impedance is measured when the sensor is implemented within a network analyzer that operates at a frequency within the frequency operating range and the test impedance is measured when the network analyzer operates at another frequency within the frequency operating range, wherein the reference impedance is associated with a minimum of multiple complex voltage coefficient magnitudes for different frequencies of the network analyzer and the test impedance is associated with a minimum of complex voltage coefficient magnitudes for different frequencies of the network analyzer.

12 . The method of claim 1 , wherein the reference impedance is measured when the sensor is implemented within a network analyzer that operates at a frequency within the frequency operating range and the test impedance is measured when the network analyzer operates at the frequency within the frequency operating range.

13 . The method of claim 1 , wherein the pre-determined elements are identified from a group of the pre-determined elements and additional pre-determined elements when a change in one of the reference characteristics of one of the pre-determined elements results in a change in a real part or an imaginary part of the reference impedance in a first direction and when a change in another one of the reference characteristics of another one of the pre-determined elements results in a change in a real part or an imaginary part of the reference impedance in a second direction, wherein the second direction is opposite to the first direction.

14 . The method of claim 1 , wherein the load is insensitive to changes in temperature, or pressure, or does not change during a pre-determined amount of time, wherein the plasma tool is sensitive to changes in temperature, or p

Assignees

• Lam Res Corp

Inventors

• Howald Arthur M
• Lyndaker Bradford J
• Valcore Jr John C
• Jafarian-Tehrani Seyed Jafar

Classifications

• G01R27/02 Primary

  Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant (by measuring phase angle only G01R25/00) · CPC title

• H01J37/32917 Primary

  Plasma diagnostics · CPC title

• G01R27/28 Primary

  Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response (in line transmission systems H04B3/46) · CPC title

• H01J37/32935

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title