Thermally-assisted magnetic recording head including a main pole, a plasmon generator and two side shields

Patent metadata

Field	Value
Publication number	US-2016343391-A1
Application number	US-201514720319-A
Country	US
Kind code	A1
Filing date	May 22, 2015
Priority date	May 22, 2015
Publication date	Nov 24, 2016
Grant date	—

Abstract

A thermally-assisted magnetic recording head includes a main pole, a plasmon generator, and first and second side shields. The main pole has a front end face located in the medium facing surface. The plasmon generator has a near-field light generating surface located in the medium facing surface. The front end face of the main pole includes a first end face portion, and a second end face portion greater in width than the first end face portion. The first and second side shields have first and second side shield end faces located on opposite sides of at least part of the near-field light generating surface and at least part of the first end face portion in the track width direction.

First claim

1 . A thermally-assisted magnetic recording head comprising:
a medium facing surface configured to face a recording medium; a coil for producing a magnetic field corresponding to data to be written on the recording medium; a main pole having a front end face located in the medium facing surface; a waveguide including a core and a cladding, the core allowing light to propagate therethrough, the cladding being provided around the core; a plasmon generator having a near-field light generating surface located in the medium facing surface; and a first side shield and a second side shield each formed of a magnetic material, wherein the main pole is configured to pass a magnetic flux corresponding to the magnetic field produced by the coil, and to produce from the front end face a write magnetic field for use to write the data on the recording medium, the plasmon generator is configured to excite a surface plasmon on the plasmon generator based on the light propagating through the core, and to generate near-field light from the near-field light generating surface based on the surface plasmon, the front end face of the main pole includes a first end face portion, and a second end face portion contiguous with the first end face portion, the first end face portion and the second end face portion being located in the medium facing surface, the second end face portion is greater than the first end face portion in width in a track width direction, the near-field light generating surface, the first end face portion and the second end face portion are arranged in this order along a direction of travel of the recording medium, the main pole includes a first portion and a second portion, the first portion including the first end face portion, the second portion including the second end face portion, the first side shield has a first side shield end face located in the medium facing surface, the second side shield has a second side shield end face located in the medium facing surface, and the first side shield end face and the second side shield end face are located on opposite sides of at least part of the near-field light generating surface and at least part of the first end face portion in the track width direction such that the at least part of the near-field light generating surface and the at least part of the first end face portion are interposed between the first and second side shield end faces.

2 . The thermally-assisted magnetic recording head according to claim 1 , further comprising a gap film formed of a nonmagnetic material, wherein
the gap film is a single continuous film, and at least part of the gap film is interposed between the main pole and the plasmon generator, between the main pole and the first side shield, and between the main pole and the second side shield.

3 . The thermally-assisted magnetic recording head according to claim 2 , wherein the gap film is formed of one of nonmagnetic metal, SiC, and AlN.

4 . The thermally-assisted magnetic recording head according to claim 1 , wherein the first end face portion has a first edge closest to the near-field light generating surface, and a second edge located at a boundary between the first end face portion and the second end face portion, the second edge being longer than the first edge.

5 . The thermally-assisted magnetic recording head according to claim 1 , wherein
the core has an evanescent light generating surface for generating evanescent light based on the light propagating through the core, the plasmon generator has a plasmon exciting section located at a predetermined distance from the evanescent light generating surface and facing the evanescent light generating surface, and in the plasmon generator, the surface plasmon is excited on the plasmon exciting section through coupling with the evanescent light generated by the evanescent light generating surface, the surface plasmon propagates to the near-field light generating surface, and the near-field light generating surface generates near-field light based on the surface plasmon.

6 . The thermally-assisted magnetic recording head according to claim 1 , wherein the front end face of the main pole is located on a front side in the direction of travel of the recording medium relative to the near-field light generating surface.

7 . The thermally-assisted magnetic recording head according to claim 1 , further comprising a return path section formed of a magnetic material, the return path section connecting the main pole to the first and second side shields and passing a magnetic flux corresponding to the magnetic field produced by the coil.

8 . A manufacturing method for the thermally-assisted magnetic recording head of claim 1 , comprising the steps of:
forming the waveguide; forming the plasmon generator; forming the first and second side shields after the plasmon generator is formed; forming the main pole after the first and second side shields are formed; and forming the coil.

9 . The manufacturing method according to claim 8 , wherein
the thermally-assisted magnetic recording head further comprises a gap film formed of a nonmagnetic material, the gap film being a single continuous film, at least part of the gap film being interposed between the main pole and the plasmon generator, between the main pole and the first side shield, and between the main pole and the second side shield, the step of forming the plasmon generator includes the steps of:
forming an initial plasmon generator;
forming an etching mask for use to pattern the initial plasmon generator; and
etching the initial plasmon generator by using the etching mask so that the initial plasmon generator becomes the plasmon generator,
the step of forming the first and second side shields includes:
the step of forming a magnetic layer; and
the processing step of processing the magnetic layer into the first and second side shields and removing at least part of the etching mask,
the processing step results in the formation of a structure having a recess, the structure including the plasmon generator and the first and second side shields, the manufacturing method further comprises the step of forming the gap film on the structure after the processing step such that the gap film forms a receiving section corresponding to the recess, and the main pole is formed on the gap film such that the first portion is received in the receiving section after the step of forming the gap film.

10 . The manufacturing method according to claim 9 , wherein
the receiving section has a bottom closest to the plasmon generator, and an opening farthest from the plasmon generator, and in a cross section corresponding to the medium facing surface, the bottom is smaller than the opening in width in the track width direction.

11 . The manufacturing method according to claim 9 , wherein, in the step of etching the initial plasmon generator, the initial plasmon generator is etched to make the plasmon generator smaller in width in the track width direction than the etching mask in a cross section corresponding to the medium facing surface.

12 . The manufacturing method according to claim 9 , wherein the processing step includes the step of polishing the magnetic layer until the etching mask is exposed, and the step of removing the etching mask after the step of polishing the magnetic layer.

13 . The manufacturing method according to claim 9 , wherein the processing step includes the step of polishing the magnetic layer until the etching mask is exposed, and the step of etching part of the magnetic layer and at least part of the etching mask after the step of poli

Assignees

• Sasaki Yoshitaka
• Ito Hiroyuki
• Tanemura Shigeki
• Sato Kazuki
• Mamiya Hideo
• Takano Kenichi
• Headway Tech Inc

Inventors

• Sasaki Yoshitaka
• Ito Hiroyuki
• Tanemura Shigeki
• Sato Kazuki
• Mamiya Hideo
• Takano Kenichi

Classifications

• G11B5/4866

  the arm comprising an optical waveguide, e.g. for thermally-assisted recording · CPC title

• G11B5/315 Primary

  Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• G11B5/3169

  Working or finishing the interfacing surface of heads, e.g. lapping of heads · CPC title

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title