Method for processing a measurement signal from a pressure measurement cell, and a measurement cell arrangement

Patent metadata

Field	Value
Publication number	US-2016341618-A1
Application number	US-201315036382-A
Country	US
Kind code	A1
Filing date	Nov 14, 2013
Priority date	Nov 14, 2013
Publication date	Nov 24, 2016
Grant date	—

Abstract

Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit ( 10 ), wherein the method involves generating the output signal (y) with the aid of the filter unit ( 10 ) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit ( 10 ) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit ( 10 ) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).

First claim

1 . A method for processing a measurement signal (x; x′) of a pressure measurement cell ( 2 ) for producing an output signal (y) by means of a filter unit ( 10 ), wherein the method is provided in that
the output signal (y) is generated by means of a filter unit ( 10 ) in that a noise signal contained in the measurement signal (x; x′) is at least reduced, preferably eliminated,
a difference between the measurement signal (x; x′) and the output signal (y) is determined continuously, and
a characteristic of the filter unit ( 10 ) is changed once the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit ( 10 ) remains for such a time until the difference becomes smaller than the threshold value,

wherein the change in the filter characteristic consists of a decrease in the reduction of the noise signal contained in the measurement signal (x; x′).

2 . A method according to claim 1 , characterized in that the change in the filter characteristic consists of the measurement signal (x; x′) becoming the output signal (y) without any change.

3 . A method according to claim 1 , characterized in that the measurement signal (x; x′) is converted by an analog-to-digital converter into a time-discrete measurement signal x n , and the filter unit ( 10 ) has a low-pass characteristic for reducing the noise signal, which is defined in a first approximation by a low-pass filter of the first order with a time constant

τ
=

Δ




T
·

1
-
α

α

,

wherein ΔT corresponds to the scanning interval in a time-discrete system and α is a variable whose value lies between 0.0 and 0.1, preferably between 0.0 and 0.01, for a reduction of the noise signal in the measurement signal (x; x′), and the value of the variable α lies between 0.3 and 1.0 for the changed characteristic of the filter unit ( 10 ).

4 . A method according to claim 3 , characterized in that the output signal y n is determined according to the formula
y n =α·x n +(1−α)· y n-1

for the reduction of the noise signal in the measurement signal x n , wherein y is the time-discrete output signal, x is the time-discrete measurement signal and n a time-dependent index.

5 . A method according to claim 3 , characterized in that the variable α receives the value 1.0 if the difference between the measurement signal (x; x′) and the output signal (y) is greater than the threshold value.

6 . A method according to claim 1 , characterized in that the threshold value is determined in advance depending on the used pressure measurement cell ( 2 ), and the threshold value remains fixed during the operation of the pressure measurement cell ( 2 ).

7 . A method according to claim 1 , characterized in that a level of the noise signal is determined and the threshold value is determined depending on the level of the noise signal.

8 . A method according to claim 3 , characterized in that a median filter ( 15 ) is applied to the measurement signal (x′) before it is processed in the filter unit ( 10 ), wherein the median filter ( 15 ) preferably has a window width of three values.

9 . A measurement cell arrangement, comprising a membrane pressure measurement cell ( 2 ) which generates a pressure-dependent measurement signal (x; x′), which is supplied to a filter unit ( 10 ) for generating an output signal (y), characterized in that means ( 11 ) are present for the continuous formation of a difference between the measurement signal (x; x′) and the output signal (y), and means ( 12 ) are present for changing an original characteristic of the filter unit ( 10 ), wherein the changed characteristic of the filter unit ( 10 ) is maintained for as long as the difference is greater than a threshold value, wherein the changed filter characteristic reduces a noise signal present in the measurement signal (x; x′) to a lesser extent than the original filter characteristic.

10 . A measurement cell arrangement according to claim 9 , characterized in that the output signal (y) corresponds to the measurement signal (x) with changed filter characteristic.

11 . A measurement cell arrangement according to claim 9 , characterized in that the measurement signal (x; x′) is supplied to an analog-to-digital converter for generating a time-discrete measurement signal x n , and the filter unit ( 10 ) has a low-pass characteristic for reducing the noise signal, which is defined in a first approximation by a low-pass filter of the first order with a time constant

τ
=

Δ




T
·

1
-
α

α

,

wherein ΔT corresponds to the scanning interval in a time-discrete system and α is a variable whose value lies between 0.0 and 0.1, preferably between 0.0 and 0.01, for a reduction of the noise signal in the measurement signal, and the value of the variable α lies between 0.3 and 1.0 for the changed characteristic of the filter unit ( 10 ).

12 . A measurement cell arrangement according to claim 11 , characterized in that the output signal y n is determined according to the formula
y n =α·x n +(1−α)· y n-1

for the reduction of the noise signal in the measurement signal x n , wherein y is the time-discrete output signal, x is the time-discrete measurement signal and n a time-dependent index.

13 . A measurement cell arrangement according to claim 11 , characterized in that the variable α receives the value 1.0 if the difference between the measurement signal (x) and the output signal (y) is greater than the threshold value.

14 . A measurement cell arrangement according to claim 9 , characterized in that the threshold value is determined in advance depending on the used pressure measurement cell ( 2 ) and remains fixed during the operation of the pressure measurement cell ( 2 ).

15 . A measurement cell arrangement according to claim 9 , characterized in that means ( 14 ) are present for determining a level of the noise signal, and the threshold value can be determined depending on the level of the noise signal.

16 . A measurement cell arrangement according to claim 11 , characterized in that a median filter ( 15 ) is provided, to which the measurement signal (x′) is supplied, wherein the median filter ( 15 ) is operatively connected to the filter unit ( 10 ) and wherein the median filter ( 15 ) preferably has a window width of three values.

Assignees

• Inficon Gmbh

Inventors

• Mullis Felix

Classifications

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• G01L23/08

  operated electrically {(G01L23/22 takes precedence)} · CPC title

• G01L21/00

  Vacuum gauges · CPC title

• G01L9/12 Primary

  by making use of variations in capacitance {, i.e. electric circuits therefor} · CPC title