Liquid discharge head, liquid discharge device, and liquid discharge apparatus
US-2015375505-A1 · Dec 31, 2015 · US
US2016339696A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016339696-A1 |
| Application number | US-201415114967-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 31, 2014 |
| Priority date | Jan 31, 2014 |
| Publication date | Nov 24, 2016 |
| Grant date | — |
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Ink property sensing on a printhead is described. In an example, a substrate for a printhead includes a cap layer having bores. Chambers are formed beneath the cap layer in fluidic communication with the bores. Fluid ejectors are disposed in at least a portion of the chambers. At least one ion-sensitive field effect transistor (ISFET) is disposed in a respective at least one of the chambers. An electrode is disposed in each of the chambers having an ISFET and capacitively coupled to said ISFET through a dielectric.
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What is claimed is: 1 . A substrate for a printhead, comprising: a cap layer having bores: chambers formed beneath the cap layer in fluidic communication with the bores; fluid ejectors disposed in at least a portion of the chambers; at least one ion-sensitive field effect transistor (ISFET) disposed in a respective at least one of the chambers; and an electrode disposed in each of the chambers having an ISFET and capacitively coupled to said ISFET through a dielectric. 2 . The substrate of claim 1 , wherein each ISFET comprises: source and drain diffusion regions in the substrate; a gate region patterned using at least one conductive layer formed on the substrate; and wherein the dielectric includes at least one dielectric layer electrically isolating the gate region from the respective chamber. 3 . The substrate of claim 2 , wherein the at least one conductive layer includes a polysilicon layer and at least one metal layer. 4 . The substrate of claim 2 , wherein the gate region includes a metal region formed in a top-most conductive layer of the at least one conductive layer, the metal region being capacitively coupled with the respective electrode. 5 . The substrate of claim 1 , wherein each electrode is formed on the cap layer above the respective ISFET. 6 . The substrate of claim 2 , wherein each electrode is formed on the dielectric surrounding the ISFET. 7 . A printhead, comprising: a plurality of nozzles formed in an orifice plate; a plurality of chambers formed in a barrier layer beneath the orifice plate, the plurality of chambers being in fluidic communication with the plurality of nozzles; ink ejectors disposed in at least a portion of the plurality of chambers; and at least one ink property sensor disposed in a respective at least one of the plurality of chambers, each ink property sensor comprising an ion-sensitive field effect transistor (ISFET) capacitively coupled to an electrode through a dielectric. 8 . The printhead of claim 7 , wherein the ISFET of each ink property sensor comprises a floating-gate capactively coupled to the respective electrode through at least one layer of the respective dielectric. 9 . The printhead of claim 7 , wherein the electrode of each ink property sensor is formed on the orifice plate above the respective ISFET. 10 . The printhead of claim 7 , wherein the electrode of each ink property sensor is formed on the respective dielectric surrounding the respective ISFET. 11 . A method of sensing ink properties on a printhead, comprising: coupling a source of an ion-sensitive field effect transistor (ISFET) formed in a chamber of the printhead containing ink to a reference voltage; coupling a voltage to an electrode in contact with the ink in the chamber, where the electrode is capactively coupled to a gate of the ISFET and the voltage is selected to establish a selected voltage between a drain and the source of the ISFET; and measuring drain-to-source current of the ISFET. 12 . The method of claim 11 , further comprising: obtaining measurements of the drain-to-source current over a plurality of iterations; and measuring changes in the drain-to-source current over the plurality of iterations. 13 . The method of claim 12 , further comprising: deriving on concentration measurements from the changes in the drain-to-source current over the plurality of iterations.
Ink level or ink residue control · CPC title
Structure of nozzle plates · CPC title
for monitoring ink quality · CPC title
Structures including a sensor · CPC title
Drives, motors, controls or automatic cut-off devices for the entire printing mechanism · CPC title
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