Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US2016339470A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016339470-A1 |
| Application number | US-201615153996-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 13, 2016 |
| Priority date | May 22, 2015 |
| Publication date | Nov 24, 2016 |
| Grant date | — |
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Official abstract text for this publication.
A jetting dispenser including an actuator housing, an actuator, a fluid body housing, and a fluid body. The actuator is located in the actuator housing and the fluid body housing is coupled to the actuator housing. The fluid body is coupled to the fluid body housing and includes a fluid inlet in communication with a fluid bore. The fluid body further includes a jetting valve having a movable shaft operatively coupled with the actuator when the fluid body housing is coupled to the actuator housing. The shaft is moved by the actuator to jet an amount of fluid from the fluid bore. The fluid body is capable of being removed from the fluid body housing when the fluid body housing is decoupled from the actuator housing.
Opening claim text (preview).
What is claimed is: 1 . A jetting dispenser, comprising: an actuator housing, an actuator in the actuator housing, a fluid body housing coupled to the actuator housing and capable of being decoupled from the actuator housing, and a fluid body coupled to the fluid body housing and including a fluid inlet in communication with a fluid bore, and a jetting valve, the jetting valve including a movable shaft operatively coupled with the actuator when the fluid body housing is coupled to the actuator housing, the movable shaft being moved by the actuator to jet an amount of fluid from the fluid bore, wherein the fluid body is capable of being removed from the fluid body housing when the fluid body housing is decoupled from the actuator housing. 2 . The jetting dispenser of claim 1 , wherein the actuator further comprises a piezoelectric unit that lengthens by a first distance in response to an applied voltage, and an amplifier operatively coupled to the piezoelectric unit. 3 . The jetting dispenser of claim 1 , wherein the fluid body housing is coupled to the actuator housing with a hinge, and the fluid body housing may be pivoted between a position in which the fluid body housing is coupled to the actuator housing and a position in which the fluid body housing is decoupled from the actuator housing. 4 . The jetting dispenser of claim 3 , wherein the fluid body housing is coupled to the actuator housing with a rotating connector. 5 . The jetting dispenser of claim 4 , wherein the fluid body housing further comprises a hook-shaped flange with which the rotating connector engages to couple the actuator housing with the fluid body housing. 6 . The jetting dispenser of claim 5 , wherein a connector housing is rigidly affixed to the actuator housing and wherein a rotating shaft includes the rotating connector and is situated within the connector housing. 7 . The jetting dispenser of claim 3 , wherein the fluid body housing is coupled to the actuator housing with a movable pin. 8 . The jetting dispenser of claim 7 , wherein the movable pin couples the fluid body housing and the actuator housing by moving within a slot in the fluid body housing. 9 . The jetting dispenser of claim 8 , wherein a connector housing is rigidly affixed to the actuator housing and includes a spring-biasing element, the movable pin being moved against the spring-biasing element toward the actuator housing to couple or decouple the fluid body housing and the actuator housing. 10 . The jetting dispenser of claim 1 , wherein the actuator housing comprises a bore, and the fluid body comprises a tappet assembly including the jetting valve, the tappet assembly being retained in the bore of the actuator housing when the actuator housing and the fluid body housing are coupled. 11 . The jetting dispenser of claim 10 , wherein the tappet assembly is removable from the fluid body. 12 . The jetting dispenser of claim 1 , wherein the fluid body housing is configured with a T-shaped groove to provide a path for fluid leakage.
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
incorporating means for heating or cooling the liquid or other fluent material (B05C11/1042 takes precedence) · CPC title
specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material (B05C5/0225, B05C11/1026 take precedence) · CPC title
Mounting arrangements for fluid connection of the spraying apparatus or its outlets to flow conduits · CPC title
generated by electrical means, e.g. piezoelectric transducers · CPC title
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