Semiconductor device
US-9184755-B2 · Nov 10, 2015 · US
US2016336263A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016336263-A1 |
| Application number | US-201514709593-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 12, 2015 |
| Priority date | May 12, 2015 |
| Publication date | Nov 17, 2016 |
| Grant date | — |
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Digital data system disposed on a substrate includes a digital data device and at least one digital data interconnect disposed on the substrate. The digital data interconnect is comprised of a plurality of material layers stacked to form a three-dimensional structure. The material layers form a conductive shield, a plurality of straps which are periodically spaced along an interior length of the shield, and a core which includes one or more conductors. The conductors extends along the length of the tubular form parallel to the opposing walls and are suspended on the straps, separated from the conductive shield by an air gap. First and second conductors of the core can facilitate a differential signaling mode.
Opening claim text (preview).
1 . A method for reducing a number of physical data channels required to support a communication bandwidth of a digital data device disposed on a substrate, comprising: forming at least one digital data interconnect by disposing a plurality of material layers on a substrate to define a microstructure which includes a conductive shield disposed on the substrate so as to have a tubular form and extend across a surface of the substrate whereby a signaling channel is defined that is entirely surrounded by a conductive material, a plurality of straps periodically spaced along a length of the tubular form inside the conductive shield, each strap extending between opposing walls of the conductive shield and comprised of a dielectric material, and a core comprising at least one conductor which extends along the length of the tubular form parallel to the opposing walls and suspended on the straps within the conductive shield, with the at least one conductor separated from the conductive shield by an air gap; electrically connecting each of the conductive shield and the at least one conductor of the digital data interconnect to an electrical contact of a first digital data device disposed on the substrate; and communicating digital data from the first digital data device to a second digital data device disposed on the substrate. 2 . The method according to claim 1 , wherein the core is formed so as to include only a single conductor which is coaxially disposed within the conductive shield. 3 . The method according to claim 1 , wherein the core is formed to include a plurality of the conductors, including a first conductor and a second conductor, which are spaced apart by a predetermined distance. 4 . The method according to claim 3 , wherein the first and second conductors are electrically connected to the first digital data device, and further comprising using a differential signaling process to communicate the digital data over the first and second conductors. 5 . The method according to claim 4 , further comprising using said conductive shield to reduce a coupling of differential-mode noise to the first and second conductors. 6 . The method according to claim 1 , further comprising forming the digital data interconnect using a semiconductor lithography based process. 7 . A digital data processing system comprising: a substrate; a digital data device disposed on the substrate; and at least one digital data interconnect disposed on the substrate comprised of a plurality of material layers stacked on the substrate; wherein the plurality of material layers define a three-dimensional microstructure which includes a conductive shield which has a tubular form and extends across a surface of the substrate so as to define a signaling channel that is entirely surrounded by a conductive material, a plurality of straps periodically spaced along a length of the tubular form inside the conductive shield, each strap extending between opposing walls of the conductive shield and comprised of a dielectric material, and a core comprising at least one conductor which extends along the length of the tubular form parallel to the opposing walls and suspended on the straps within the conductive shield, with the at least one conductor separated from the conductive shield by an air gap; and wherein each of the conductive shield and the at least one conductor is electrically connected to an electrical contact of the digital data device, and the at least one conductor is arranged to communicate digital data from the digital data device to a second digital data device. 8 . The digital data processing system according to claim 7 , wherein the at least one conductor is connected to an electrical contact of the second digital data device which is also disposed on the substrate. 9 . The digital data processing system according to claim 7 , wherein the core is formed so as to include only a single conductor which is coaxially disposed within the conductive shield. 10 . The digital data processing system according to claim 7 , wherein the core is formed to include a plurality of the conductors, including a first conductor and a second conductor, which are spaced apart by a predetermined distance. 11 . The digital data processing system according to claim 10 , wherein the first and second conductors are electrically connected to the first digital data device, and wherein the first digital data device includes a differential transceiver circuit which is arranged to communicate the digital data over the first and second conductors using differential signaling, to a second digital data device. 12 . A method for providing high speed data communications between a plurality of digital data devices disposed on a common substrate, comprising: forming at least one digital data interconnect by disposing a plurality of material layers on a substrate to define a microstructure which includes a conductive shield disposed on the substrate so as to have a tubular form and extend across a surface of the substrate whereby a differential signaling channel is defined that is entirely surrounded by a conductive material and enables each of two complimentary signals to be respectively communicated in a separate conductor, a plurality of straps periodically spaced along a length of the tubular form inside the conductive shield, each strap extending between opposing walls of the conductive shield and comprised of a dielectric material, and a core comprising two conductors which extends along the length of the tubular form parallel to the opposing walls and suspended on the straps within the conductive shield, with the two conductors separated from the conductive shield by an air gap; electrically connecting each of the conductive shield and the two conductors of the digital data interconnect to electrical contacts of a first and second digital data device disposed on the substrate; and communicating digital data from the first digital data device to the second digital data device disposed on the substrate by using the first and second conductors to facilitate a differential signaling mode. 13 . The method according to claim 12 , wherein the two conductors include a first conductor and a second conductor and the first conductor is spaced apart a predetermined distance from the second conductor. 14 . The method according to claim 12 , further comprising using said conductive shield to reduce the presence of differential-mode noise on the first and second conductors. 15 . The method according to claim 12 , further comprising forming the at least one digital data interconnect using a semiconductor lithography based process. 16 . A microstructure for communicating digital data in accordance with a differential signaling mode, comprising: a substrate; a plurality of material layers stacked on the substrate, the stacked material layers defining a three-dimensional structure which includes a conductive shield which has a tubular form and extends across a surface of the substrate to at least partially define a differential signaling channel that is entirely surrounded by a conductive material even when the microstructure is electrically connected to one or more digital data devices, a plurality of straps periodically spaced along a length of the tubular form inside the conductive shield, each strap extending between opposing walls of the conductive shield and comprised of a dielectric material, and a core comprising two conductors which extend along the length of the tubular form parallel to the opposing walls and suspended on the st
Local interconnections · CPC title
Shielding layers · CPC title
Layouts of interconnections · CPC title
Electricity · mapped topic
Electricity · mapped topic
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