Arrays of integrated analytical devices and methods for production

Patent metadata

Field	Value
Publication number	US-2016334334-A1
Application number	US-201615158756-A
Country	US
Kind code	A1
Filing date	May 19, 2016
Priority date	Jun 17, 2012
Publication date	Nov 17, 2016
Grant date	—

Abstract

Arrays of integrated analytical devices and their methods for production are provided. The arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The integrated devices allow the highly sensitive discrimination of optical signals using features such as spectra, amplitude, and time resolution, or combinations thereof. The arrays and methods of the invention make use of silicon chip fabrication and manufacturing techniques developed for the electronics industry and highly suited for miniaturization and high throughput.

First claim

1 . An array of integrated analytical devices comprising:
a substrate layer; a filter module layer disposed on the substrate layer; a collection module layer disposed on or with the filter module layer, wherein the collection module layer comprises a Fresnel lens structure configured to split a light beam into a plurality of light beams; a waveguide module layer disposed on the collection module layer; a zero-mode waveguide module layer disposed on the waveguide module layer; wherein the zero-mode waveguide module layer comprises a plurality of nanometer-scale apertures penetrating into the waveguide module layer.

2 . The array of claim 1 , wherein the substrate layer is a detector layer.

3 . The array of claim 1 , wherein the substrate layer is a CMOS wafer.

4 . The array of claim 1 , wherein the filter module layer comprises a dielectric filter.

5 . The array of claim 1 , wherein the filter module layer comprises an absorptive filter.

6 . The array of claim 2 , wherein the detector layer comprises a color-separation layer.

7 . The array of claim 1 , wherein the plurality of nanometer-scale apertures is formed by etching, and the etching is stopped using an endpoint signal.

8 . The array of claim 1 , wherein the waveguide module layer comprises an upper cladding of waveguide cladding material disposed on a waveguide core material, and at least one nanometer-scale aperture fully penetrates the upper cladding of waveguide cladding aterial into the waveguide core material.

9 . The array of claim 8 , wherein the at least one nanometer-scale aperture is partially backfilled.

10 . The array of claim 9 , wherein the at least one nanometer-scale aperture is partially backfilled using atomic layer deposition or low pressure chemical vapor deposition.

11 . The array of claim 8 , wherein the upper cladding of waveguide cladding material is SiO2.

12 . The array of claim 8 , wherein the waveguide core material is Si 3 N 4 .

13 . The array of claim 8 , further comprising an etch hardmask disposed between the waveguide core material and the upper cladding of waveguide cladding material.

14 - 15 . (canceled)

16 . The array of claim 1 , wherein at least one nanometer-scale aperture comprises a fluid sample comprising a fluorescent species.

17 . The array of claim 16 , wherein the fluorescent species is a fluorescently labeled nucleotide analog.

18 . The array of claim 1 , wherein the plurality of nanometer-scale apertures comprise at least 100 nanometer-scale apertures.

19 . The array of claim 1 , wherein the plurality of nanometer-scale apertures have a density of at least 1000 apertures per cm 2 .

20 - 51 . (canceled)

52 . The array of claim 1 , wherein the Fresnel lens structure is a diffractive Fresnel lens structure.

53 . The array of claim 1 , wherein the Fresnel lens structure is a refractive Fresnel lens structure.

54 . The array of claim 1 , wherein the Fresnel lens structure combines refractive and diffractive features.

55 . The array of claim 1 , wherein the Fresnel lens structure is a phase Fresnel zone plate.

56 . The array of claim 55 , wherein the Fresnel lens structure is at least a two-phase Fresnel zone plate.

57 . The array of claim 55 , wherein the Fresnel lens structure is at least a four-phase Fresnel zone plate.

Assignees

• Pacific Biosciences California Inc

Inventors

• Saxena Ravi
• Ru Michael Tzu
• Orimoto Takashi Whitney
• Grot Annette
• Foquet Mathieu
• Chou Hou-Pu

Classifications

• G01N21/648

  using evanescent coupling or surface plasmon coupling for the excitation of fluorescence · CPC title

• G02B6/02123

  characterised by the method of manufacture of the grating (photolithography G03F7/0005) · CPC title

• G01N2201/0873

  Using optically integrated constructions · CPC title

• B29L2011/005

  Fresnel lenses · CPC title

• G02B6/12002

  Three-dimensional structures · CPC title