Process that enables the creation of nanometric structures by self-assembly of block copolymers

US2016333221A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2016333221-A1
Application numberUS-201415103740-A
CountryUS
Kind codeA1
Filing dateDec 11, 2014
Priority dateDec 13, 2013
Publication dateNov 17, 2016
Grant date

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

The invention relates to a process that enables the creation of nanometric structures by self-assembly of block copolymers, at least one of the blocks of which is crystallizable or has at least one liquid crystal phase.

First claim

Opening claim text (preview).

1 . A nanostructured assembly process using a composition comprising a block copolymer, at least one of the blocks of which is crystallizable or has at least one liquid crystal phase, wherein the process comprises the following steps: dissolving the block copolymer in a solvent to form a solution, depositing the solution on a surface, annealing. 2 . The process as claimed in claim 1 , wherein the block copolymer is a diblock copolymer. 3 . The process as claimed in claim 1 , wherein the block copolymer has a crystallizable block. 4 . The process as claimed in claim 1 , wherein at least one of the blocks has a liquid crystal phase and the block which has a liquid crystal phase is lyotropic. 5 . The process as claimed in claim 1 , wherein at least one of the blocks has a liquid crystal phase and the block which has a liquid crystal phase is thermotropic. 6 . The process as claimed in claim 1 , wherein orientation of the block copolymer is carried out during a time of between 1 and 20 minutes, limits included. 7 . The process as claimed in claim 1 , wherein orientation of the block copolymer is carried out at a temperature of between 333 K and 603 K. 8 . The process as claimed in claim 1 , wherein orientation of the block copolymer is carried out under a controlled atmosphere comprising solvent vapors, or a solvent atmosphere/temperature combination. 9 . The use of the process as claimed in claim 1 in the field of surface nanostructuring for electronics. 10 . A mask of block copolymers obtained using the process as claimed in claim 1 .

Assignees

Inventors

Classifications

  • C09D183/00Primary

    Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers · CPC title

  • Etch mask forming processes not provided for in groups B81C1/00396 - B81C1/0042 · CPC title

  • Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule · CPC title

  • Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

  • Forming nanoscale microstructures using auto-arranging or self-assembling material · CPC title

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What does patent US2016333221A1 cover?
The invention relates to a process that enables the creation of nanometric structures by self-assembly of block copolymers, at least one of the blocks of which is crystallizable or has at least one liquid crystal phase.
Who is the assignee on this patent?
Centre Nat De La Rech Scient (Cnrs), Univ Bordeaux, Inst Polytechnique Bordeaux, and 1 more
What technology area does this patent fall under?
Primary CPC classification C09D183/00. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Thu Nov 17 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).