Calibration and transformation of a camera system's coordinate system
US-9188973-B2 · Nov 17, 2015 · US
Substrate transport apparatus
US2016325440A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016325440-A1 |
| Application number | US-201515110130-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 16, 2015 |
| Priority date | Jan 17, 2014 |
| Publication date | Nov 10, 2016 |
| Grant date | — |
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Abstract
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A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
First claim
Opening claim text (preview).
What is claimed is: 1 . A transport apparatus comprising: a frame; a drive section connected to the frame, the drive section having at least one drive axis; at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm; and a bearing connected…
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Classifications
Electricity · mapped topic
- H10P72/3302Primary
Electricity · mapped topic
- B25J18/04Primary
Operations & Transport · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US2016325440A1 cover?
- A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with re…
- Who is the assignee on this patent?
- Brooks Automation Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3302. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Nov 10 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).