Mask frame assembly for thin layer deposition, method of manufacturing the same, and method of manufacturing display apparatus by using the mask frame assembly

Patent metadata

Field	Value
Publication number	US-2016322571-A1
Application number	US-201514978471-A
Country	US
Kind code	A1
Filing date	Dec 22, 2015
Priority date	Apr 28, 2015
Publication date	Nov 3, 2016
Grant date	—

Abstract

A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly includes a frame including an opening, and a mask having first and second ends in a length direction thereof coupled to the frame, in which the mask includes a main body part having a first thickness and including a pattern part, the pattern part including pattern holes through which the deposition material passes and a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.

First claim

1 . A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly comprising:
a frame comprising an opening; and a mask having first and second ends in a length direction thereof coupled to the frame, wherein the mask comprises: a main body part having a first thickness and comprising a pattern part, the pattern part comprising pattern holes through which the deposition material passes; and a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.

2 . The mask frame assembly of claim 1 , wherein:
at least one first alignment key is formed at corners of the main body part; at least one second alignment key is formed at corners of the support part; and the at least one first alignment key and the at least one second alignment key are aligned to correspond to each other in the length direction of the mask.

3 . The mask frame assembly of claim 1 , further comprising a step part disposed between the main body part and the support part.

4 . The mask frame assembly of claim 3 , wherein the step part has a third thickness that is greater than the first thickness and less than the second thickness.

5 . The mask frame assembly of claim 1 , wherein the first thickness is in a range of about 5 μm to about 20 μm.

6 . The mask frame assembly of claim 1 , wherein the second thickness is in a range of about 25 μm to about 100 μm.

7 . The mask frame assembly of claim 1 , wherein a surface of the mask facing the substrate is planar.

8 . A method of manufacturing a mask frame assembly, the method comprising:
preparing a main body part having a first thickness and comprising a pattern part, the pattern part comprising pattern holes through which a deposition material passes; preparing a support part having a second thickness that is greater than the first thickness; arranging the support part at both ends of the main body part; and coupling the main body part and the support part to each other.

9 . The method of claim 8 , wherein a width of the main body part substantially corresponds to a width of the support part.

10 . The method of claim 9 , wherein:
at least one first alignment key is formed at corners of the main body part; at least one second alignment key is formed at corners of the support part; and the at least one first alignment key and the at least one second alignment key are aligned to correspond to each other in a length direction of a mask, in arranging the support part at both ends of the main body part.

11 . The method of claim 10 , further comprising forming a step part between the main body part and the support part,
wherein: the step part has a third thickness greater than the first thickness and less than the second thickness; at least one third alignment key is formed at corners of the step part; and the at least one third alignment key is aligned to the at least one first alignment key and the at least one second alignment key to correspond to each other in the length direction of the mask.

12 . The method of claim 8 , further comprising cutting portions of the support part such that the width of the support part substantially corresponds to the width of the main body part, after arranging the support part at both ends of the main body part,
when a width of the support part is greater than a width of the main body part.

13 . The method of claim 12 , wherein cutting the portions of the support part comprises spraying a high-pressure water jet to the support part.

14 . The method of claim 12 , wherein cutting the portions of the support part comprises irradiating a laser to the support part.

15 . The method of claim 8 , further comprising forming a step part having a third thickness by half-etching an end portion of the support part adjacent to the main body part, after coupling the main body part and the support part to each other,
wherein the third thickness is greater than the first thickness and less than the second thickness.

16 . The method of claim 8 , further comprising forming a step part having a third thickness that is greater than the first thickness and less than the second thickness,
wherein the step part is arranged between the main body part and the support part, in arranging the support part at both ends of the main body part.

17 . The method of claim 16 , wherein the main body part and the support part are coupled to each other through the step part, in coupling the main body part and the support part to each other.

18 . The method of claim 8 , wherein the main body part and the support part are welded together by irradiating a laser to a contacting surface between the main body part and the support part, in coupling the main body part and the support part to each other.

19 . The method of claim 17 , wherein the main body part and the support part are respectively welded to both ends of the step part by irradiating a laser to a first contacting surface between the main body part and the step part and a second contacting surface between the support part and the step part, in coupling the main body part and the support part to each other.

20 . A method of manufacturing a display apparatus that comprises a substrate, a first electrode, a second electrode facing the first electrode, and an organic layer disposed between the first electrode and the second electrode, the method comprising:
depositing the organic layer or the second electrode by using a mask frame assembly, wherein: the mask frame assembly comprises a frame and a mask coupled to the frame by coupling first and second ends of the mask in a length direction of the mask to first and second ends of the frame; the frame comprises an opening; and the mask comprises:
a main body part having a first thickness and comprises a pattern part, the pattern part comprising pattern holes through which a deposition material passes; and
a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Sangshin
• Park Kookchol

Classifications

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C16/042 Primary

  using masks · CPC title

• C23C16/04

  Coating on selected surface areas, e.g. using masks · CPC title

• H01L51/56

  Electricity · mapped topic

• H01L51/0011 Primary

  Electricity · mapped topic