Systems and Methods for In-Situ Formation of Nanoparticles and Nanofins

Patent metadata

Field	Value
Publication number	US-2016318067-A1
Application number	US-201415104970-A
Country	US
Kind code	A1
Filing date	Dec 15, 2014
Priority date	Dec 16, 2013
Publication date	Nov 3, 2016
Grant date	—

Abstract

Systems and methods for forming nanoparticles in-situ are disclosed herein. The nanoparticles may be formed in-situ through thermocycling a solution comprising at least one of a molten salt, a surfactant, and a catalyst. The nanoparticles may form in the solution itself and/or on surfaces of a vessel in which the solution is formed. Nanofins may be formed from the agglomeration of particles in the solution and on surfaces. Microchannels may be formed by these nanofins, and in some cases microchannels on a surface may have nanofins form on the surface. In some embodiments, a previously formed solution that has nanoparticles formed in-situ may be used to generate nanofins in a vessel, on a wafer in a vessel, in the solution itself, or combinations thereof.

First claim

1 . A method for fabricating nanostructures comprising:
(a) forming a homogeneous solution in a vessel, wherein the homogenous solution comprises a first component and a second component, and wherein the first component and the second component do not comprise nanoparticles; (b) evaporating at least some of a liquid in the homogenous solution after (a); (c) precipitating a first plurality of nanoparticles from the homogeneous solution in response to (a) or (b), wherein the first plurality of nanoparticles is formed on an interior surface of the vessel or in the homogeneous solution spaced apart from the interior surface of the vessel; and (d) forming a first plurality of nanofins on the interior surface of the vessel with the first plurality of nanoparticles after (c).

2 . The method of claim 1 , wherein each precipitated nanoparticle of the first plurality of nanoparticles has a size less than about 100 nm.

3 . The method of claim 1 , wherein the first component comprises a salt.

4 . The method of claim 3 , wherein the salt is a nitrate, a chloride, a carbonate, or a fluoride.

5 . The method of claim 1 , wherein the second component comprises a surfactant.

6 . The method of claim 5 , wherein the surfactant comprises sodium dodecyl sulfate (SDS) or sodium docedylbenzenesulfonate (SDBS).

7 . The method of claim 1 , further comprising:
(e) disposing a substrate in the vessel before disposing the first component or the second component in the vessel; (f) precipitating a second plurality of nanoparticles from the homogeneous solution onto the substrate in response to (a) or (b); (g) forming a second plurality of nanofins on the substrate with the second plurality of nanoparticles; and (h) removing the substrate from the vessel after (g).

8 . The method of claim 1 , wherein (b) comprises heating the homogenous solution to a temperature between about 25° C. and about 600° C.

9 . The method of claim 8 , wherein (b) comprises maintaining the homogenous solution at a temperature between about 25° C. and about 600° C. for about four hours to about twenty-four hours.

10 . The method of claim 8 , wherein (b) comprises maintaining the homogenous solution at a pressure lower than the atmospheric pressure for rapid evaporation of the liquid while maintaining the homogenous solution at the temperature between about 25° C. and about 600° C. for about four hours to about twenty-four hours.

11 . The method of claim 1 , further comprising:
mixing the first plurality of nanoparticles precipitated from the homogenous solution with a plurality of particles having a size greater than about 100 nm.

12 . A method for fabricating nanostructures in-situ, the method comprising:
(a) forming a solution in a vessel, wherein the solution comprises a surfactant; (b) after (a), precipitating a first plurality of nanoparticles from the solution onto an inner surface of the vessel after or within the solution; (c) evaporating at least some of a liquid in the solution after (b); (d) forming, in response to (b) or (c), a plurality of nanofins on a portion of the inner surface of the vessel with the first plurality of nanoparticles precipitated from the solution; and (e) forming a first plurality of channels on the portion of the inner surface of the vessel, wherein each channel of the first plurality of channels comprises at least some nanofins of the plurality of nanofins.

13 . The method of claim 12 , wherein the surfactant is sodium dodecyl sulfate (SDS) or sodium docedylbenzenesulfonate (SDBS).

14 . The method of claim 12 , wherein (c) comprises heating the solution to a temperature between about 10° C. to about 600° C.

15 . The method of claim 14 , wherein (c) further comprises maintaining the solution at a temperature between about 10° C. to about 600° C. for about four hours to about twenty-four hours.

16 . The method of claim 12 , further comprising:
(e) prior to forming the solution in the vessel in (a), disposing a substrate in the vessel; (f) precipitating a second plurality of nanoparticles from the solution in response to (a) or (b); (g) forming a second plurality of nanofins on the substrate with the second plurality of nanoparticles precipitated from the solution; and (h) removing the substrate from the vessel after (g).

17 . A method for fabricating nanostructures comprising:
(a) disposing a substrate in a vessel and contacting an inner surface of the vessel with the substrate; (b) disposing a first component and a second component in the vessel to form a homogeneous solution in the vessel, wherein the first component and the second component do not comprise nanoparticles, and wherein the first component or the second component is a solution; (c) removing at least some of a liquid from the homogenous solution after (b); (d) precipitating a plurality of nanoparticles from the homogenous solution onto the inner surface of the vessel and the substrate in response to (b) or (c); (e) forming a plurality of nanofins on the inner surface of the vessel and on the substrate with the plurality of nanoparticles precipitated from the solution in (d); and (f) removing the substrate from the vessel after (e).

18 . The method of claim 17 , wherein each nanoparticle has a size less than about 100 nm.

19 . The method of claim 17 , wherein the first component comprises a salt.

20 . The method of claim 19 , wherein the salt is a nitrate, a chloride, a carbonate, or a fluoride.

21 . The method of claim 17 , wherein the second component comprises a surfactant.

22 . The method of claim 21 , wherein the surfactant comprises sodium dodecyl sulfate (SDS) or sodium docedylbenzenesulfonate (SDBS).

23 . A method for fabricating nanofins from nanoparticles formed in-situ comprising:
(a) forming a homogeneous solution comprising a first component and a second component in a vessel, wherein the first component comprises a plurality of nanoparticles formed in-situ in the first component; (b) precipitating a first plurality of nanoparticles from the homogeneous solution onto an inner surface of the vessel or in the homogeneous solution; (c) forming a first plurality of nanofins on an inner surface of the vessel with the first plurality of nanoparticles.

24 . A method for fabricating nanostructures, comprising:
(a) forming a homogeneous solution in a vessel, wherein the homogenous solution comprises a first component, a second component, and a third component, wherein the first component and the second component do not comprise nanoparticles, and wherein the third component comprises a catalyst; (b) evaporating at least some of a liquid in the homogenous solution after (a); (c) precipitating a first plurality of nanoparticles from the homogeneous solution in response to (a) or (b), wherein the first plurality of nanoparticles is formed on an inner surface of the vessel or in the homogeneous solution; (d) forming a first plurality of nanofins with the first plurality of nanoparticles, wherein the first plurality of nanofins is formed on the inner surface of the vessel with the first plurality of nanoparticles.

Assignees

• Texas A & M Univ Sys

Inventors

• Banerjee Debjyoti
• Jo Byeongnam
• Yu Jiwon
• Jung Seunghwan
• Shin Donghyun
• Jeon Saeil
• Kang Seokwon

Classifications

• A61K9/5115

  Inorganic compounds · CPC title

• A61K9/5192

  Processes · CPC title

• B05D7/227

  of containers, cans or the like · CPC title

• B05D5/02 Primary

  to obtain a matt or rough surface · CPC title

• B05D1/18

  performed by dipping · CPC title