Motft and array circuit for chemical/biochemical applications

Patent metadata

Field	Value
Publication number	US-2016313282-A1
Application number	US-201615139134-A
Country	US
Kind code	A1
Filing date	Apr 26, 2016
Priority date	Apr 27, 2015
Publication date	Oct 27, 2016
Grant date	—

Abstract

Electro-chemical manipulation and charge sensing apparatus includes a chemical/biochemical testing pad positioned on a dielectric substrate, a sensing circuit coupled to the testing pad, the sensing circuit including at least one MOTFT device, and a manipulation and control circuit coupled to the testing pad, the manipulation and control circuit including at least one MOTFT device. The electro-chemical manipulation and charge sensing apparatus can include a plurality of chemical/biochemical testing pads distributed in a matrix formation of rows and columns and positioned on a dielectric substrate.

First claim

Having fully described the invention in such clear and concise terms as to enable those skilled in the art to understand and practice the same, the invention claimed is:

1 . Electro-chemical manipulation and charge sensing apparatus comprising:
a chemical/biochemical testing pad positioned on a dielectric substrate; a sensing circuit coupled to the testing pad, the sensing circuit including at least one MOTFT device; and a manipulation and control circuit coupled to the testing pad, the manipulation and control circuit including at least one MOTFT device.

2 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 1 wherein the sensing circuit is connected directly to the chemical/biochemical testing pad by a MOTFT device and the manipulation and control circuit is connected directly to the chemical/biochemical testing pad by a MOTFT device.

3 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 1 wherein the sensing circuit further comprises the gate of one MOTFT device connected to the testing pad, and the manipulation and control circuit further comprises the drain of one MOTFT device connected to the testing pad.

4 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 1 wherein the chemical/biochemical testing pad includes first and second interdigitated sensing electrodes, with the first electrode being connected to the sensing circuit and the second electrode connected to the manipulation and control circuit.

5 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 4 wherein the sensing circuit includes a MOTFT connected directly to the first electrode and the manipulation and control circuit includes a MOTFT connected directly to the second electrode.

6 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 4 wherein one of the first electrode and second electrode is fabricated from transparent conducting material and the other of the first electrode and the second electrode is fabricated from opaque conductive material, whereby self-alignment fabrication is enhanced.

7 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 1 wherein the dielectric substrate is transparent and includes one of glass or plastic.

8 . Electro-chemical manipulation and charge sensing apparatus comprising:
a chemical/biochemical testing pad positioned on a dielectric substrate, the testing pad being designed for dielectrophoresis (DEP) testing and including a dielectrophoresis electrode and an ion selective/sensitive electrode positioned in charge sensing proximity to the dielectrophoresis electrode; and a sensing MOTFT circuit positioned at least partially over a portion of the ion selective/sensitive electrode, the sensing circuit including a bottom gate MOTFT device with the gate positioned in contact with the ion selective/sensitive electrode.

9 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 8 wherein the ion selective/sensitive electrode is separated from the dielectrophoresis electrode by a layer of SiN x .

10 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 8 wherein the dielectrophoresis electrode includes one of TiPt or TiAu.

11 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 8 further including a select MOTFT device, the select MOTFT device including source/drain electrodes with one of the source/drain electrodes connected to the gate of the bottom gate MOTFT device, whereby the sensing MOTFT circuit is activated when the select MOTFT device is turned ON.

12 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 8 wherein the dielectric substrate is transparent and includes one of glass or plastic.

13 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 8 wherein one of the dielectrophoresis electrode and the ion selective/sensitive electrode are formed in a disk shape and the other of the dielectrophoresis electrode and the ion selective/sensitive electrode are formed around the disk shape in a concentric ring.

14 . Electro-chemical manipulation and charge sensing apparatus comprising:
a plurality of chemical/biochemical testing pads distributed in a matrix formation of rows and columns and positioned on a dielectric substrate, each chemical/biochemical testing pad being designed for dielectrophoresis (DEP) testing and including a dielectrophoresis electrode and an ion selective/sensitive electrode positioned in charge sensing proximity to the dielectrophoresis electrode; and each chemical/biochemical testing pad including a sensing MOTFT circuit positioned on the ion selective/sensitive electrode.

15 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 14 wherein each sensing MOTFT circuit includes a bottom gate MOTFT device with the gate positioned in contact with the ion selective/sensitive electrode

16 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 15 wherein each chemical/biochemical testing pad further includes a select MOTFT device, the select MOTFT device including source/drain electrodes with one of the source/drain electrodes connected to the gate of the bottom gate MOTFT device, whereby the sensing MOTFT circuit is activated when the select MOTFT device is turned ON.

17 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 16 wherein each select MOTFT device is coupled to row select circuitry, whereby a row of chemical/biochemical testing pads is selected by activation of a select MOTFT device in the selected row.

18 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 14 wherein for each chemical/biochemical testing pad one of the dielectrophoresis electrode and the ion selective/sensitive electrode are formed in a disk shape and the other of the dielectrophoresis electrode and the ion selective/sensitive electrode are formed around the disk shape in a concentric ring.

19 . Electro-chemical manipulation and charge sensing apparatus as claimed in claim 14 wherein each chemical/biochemical testing pad further includes a row select MOTFT device and a pad select MOTFT device.

20 . Electro-chemical manipulation and charge sensing apparatus comprising:
a plurality of chemical/biochemical testing pads distributed in a matrix formation of rows and columns and positioned on a dielectric substrate, each chemical/biochemical testing pad being designed for dielectrophoresis (DEP) and ion testing and including a dielectrophoresis/ion selective electrode; and each chemical/biochemical testing pad including a sensing MOTFT device, a row select MOTFT device, and a pad select MOTFT device, and each of the sensing MOTFT devices, the row select MOTFT devices, and the pad select MOTFT devices including source/drain electrodes and a gate electrode; each chemical/biochemical testing pad including one of the source/drain electrodes of the row select MOTFT device connected to one of the source drain electrodes of the sensing MOTFT device and the other of the source/drain electrodes of the row select MOTFT device connected to ground or a reference voltage, one of the source/drain electrodes of the pad select MOTFT device connected to the gate of the sensing MOTFT device, whereby an individual chemical/biochemical testing pad is selected by applying a row select signal o

Assignees

• Shieh Chan-Long
• Yu Gang
• Ackley Donald E

Inventors

• Shieh Chan-Long
• Yu Gang
• Ackley Donald E

Classifications

• H10D86/423

  comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title

• H10D64/60

  Electrodes characterised by their materials · CPC title

• H10D30/6755 Primary

  Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate · CPC title

• G01N27/44782 Primary

  of a plurality of samples · CPC title