System and Method for a Capacitive Sensor

Patent metadata

Field	Value
Publication number	US-2016305997-A1
Application number	US-201615074510-A
Country	US
Kind code	A1
Filing date	Mar 18, 2016
Priority date	Apr 20, 2015
Publication date	Oct 20, 2016
Grant date	—

Abstract

In accordance with an embodiment, a method of performing a measurement with a capacitive sensor includes generating a periodic excitation signal that includes a series of pulses and smoothing edge transitions of the series of pulses to form a shaped periodic excitation signal that includes a flat region between the smoothed edge transitions. The method further includes providing the shaped periodic excitation signal to a first port of the capacitive sensor and measuring a signal provided by a second port of the capacitive sensor.

First claim

What is claimed is:

1 . A method of performing a measurement with a capacitive sensor, the method comprising:
generating a periodic excitation signal, the periodic excitation signal comprising a series of pulses; smoothing edge transitions of the series of pulses to form a shaped periodic excitation signal, wherein the shaped periodic excitation signal comprises a flat region between the smoothed edge transitions; providing the shaped periodic excitation signal to a first port of the capacitive sensor; and measuring a signal provided by a second port of the capacitive sensor.

2 . The method of claim 1 , wherein measuring the signal provided by a second port of the capacitive sensor comprises performing an analog-to-digital conversion.

3 . The method of claim 1 , further comprising determining an output measurement based on the measured signal.

4 . The method of claim 3 , wherein the determined output measurement comprises a pressure measurement.

5 . The method of claim 1 , wherein smoothing edge transitions comprises generating a first sloped signal based on the generated periodic excitation signal to form a sloped excitation signal.

6 . The method of claim 5 , wherein smoothing edge transitions further comprises integrating the first sloped signal to form the shaped periodic excitation signal.

7 . The method of claim 5 , further comprising adjusting a slope of the first sloped signal based on a timing difference between the shaped periodic excitation signal and the periodic excitation signal.

8 . The method of claim 5 , wherein generating the first sloped signal comprises charging a capacitor with a first current source and discharging the capacitor with a second current source.

9 . The method of claim 8 , further comprising adjusting a slope of the first sloped signal based on a timing difference between the shaped periodic excitation signal and the periodic excitation signal, wherein adjusting the slope comprises adjusting a current of the first current source and the second current source.

10 . The method of claim 9 , further comprising determining the timing difference between the shaped periodic excitation signal and the periodic excitation signal.

11 . The method of claim 10 , wherein determining the timing difference comprises using a phase detector.

12 . The method of claim 1 , wherein the capacitive sensor comprises a MEMS sensor.

13 . The method of claim 12 , wherein the MEMS sensor comprises a sensor bridge having a first branch having a first MEMS pressure sensor and a first capacitor, and a second branch having a second MEMS pressure sensor and a second capacitor.

14 . A system comprising:
an excitation generator configured to be coupled to a first port of a capacitive sensor, the excitation generator comprising
a pulse generator, and
a pulse smoothing circuit coupled to an output of the pulse generator,
wherein an output of the pulse smoothing circuit is configured to be coupled to the first port of the capacitive sensor, wherein the pulse smoothing circuit is configured to generate a shaped periodic excitation signal having a flat region between edge transition regions.

15 . The system of claim 14 , further comprising a readout circuit configured to be coupled to a second port of the capacitive sensor.

16 . The system of claim 15 , wherein the readout circuit comprises an A/D converter configured to be coupled to the second port of the capacitive sensor.

17 . The system of claim 15 , wherein the readout circuit is configured to determine a response of the capacitive sensor based on a signal emanating from the second port of the capacitive sensor.

18 . The system of claim 17 , further comprising the capacitive sensor.

19 . The system of claim 18 , wherein the capacitive sensor comprises a MEMS sensor.

20 . The system of claim 19 , wherein the MEMS sensor comprises a sensor bridge having a first branch having a first MEMS pressure sensor and a first capacitor, and a second branch having a second MEMS pressure sensor and a second capacitor.

21 . The system of claim 20 , wherein the pulse smoothing circuit comprises a ramp generator having an input coupled to the output of the pulse generator.

22 . The system of claim 21 , wherein the ramp generator comprises a first current source and a second current source coupled to a first capacitor.

23 . The system of claim 21 , wherein the pulse smoothing circuit further comprises an integrator coupled to an output of the ramp generator, wherein an output of the integrator is coupled to the output of the pulse smoothing circuit.

24 . The system of claim 23 , further comprising a phase detector having a first input coupled to the output of the pulse generator and a second input coupled to the output of the integrator, wherein an output of the phase detector is configured to control a slope of a signal at the output of the ramp generator.

25 . The system of claim 24 , further comprising a charge pump coupled to an output of the phase detector, and a second capacitor coupled to an output of the charge pump.

26 . The system of claim 25 , wherein the slope of the signal at the output of the ramp generator is based on a voltage across the second capacitor.

27 . The system of claim 14 , wherein the excitation generator is disposed on an integrated circuit.

28 . The system of claim 27 , wherein the capacitive sensor is further disposed on the integrated circuit.

29 . The system of claim 28 , wherein the pulse smoothing circuit comprises:
a first integrator coupled to the output of the pulse generator; and a second integrator coupled to an output of the first integrator, wherein an output of the second integrator is coupled to an output of the pulse smoothing circuit.

30 . The system of claim 29 , further comprising a phase detector having a first input coupled to the output of the pulse generator and a second input coupled to the output of the first integrator, wherein an output of the phase detector is configured to control a slope of the first integrator.

31 . The system of claim 30 , wherein the first integrator comprises a plurality of current sources coupled to an integrating capacitor, and controlling the slope of the first integrator comprises adjusting a current of the plurality of current sources based on the output of the phase detector.

32 . A system comprising:
a micro-electro-mechanical system (MEMS) device; an excitation pulse generator coupled to a first port of the MEMS device, wherein the excitation pulse generator is configured to:
generate a periodic excitation signal comprising a series of pulses, and
smooth edge transitions of the series of pulses to form a shaped periodic excitation signal, wherein the shaped periodic excitation signal comprises a flat region between the smoothed edge transitions; and
a readout circuit coupled to a second port of the MEMS device.

33 . The system of claim 32 , wherein the readout circuit comprises an A/D converter.

34 . The system of claim 32 , wherein the excitation pulse generator comprises:
a pulse generator; a ramp generator coupled to an output of the pulse generator; an integrator coupled to an output of the ramp generator; a comparator coupled

Assignees

• Infineon Technologies Ag

Inventors

• Wiesbauer Andreas
• Ebner Christian
• Romani Ernesto
• Mechnig Stephan
• Panov Georgi
• Jenkner Christian
• Muehlbacher Benno

Classifications

• G01R27/2605 Primary

  Measuring capacitance (capacitive sensors G01D5/24) · CPC title

• G01D5/24 Primary

  by varying capacitance · CPC title

• G01R15/16 Primary

  using capacitive devices · CPC title

• G01L1/144 Primary

  with associated circuitry (G01L1/146 and G01L1/148 take precedence) · CPC title

• G01L9/0072

  using variations in capacitance · CPC title