Evaporation crucible and evaporation device

Patent metadata

Field	Value
Publication number	US-2016305010-A1
Application number	US-201615131496-A
Country	US
Kind code	A1
Filing date	Apr 18, 2016
Priority date	Apr 20, 2015
Publication date	Oct 20, 2016
Grant date	—

Abstract

An evaporation crucible and an evaporation device are provided. The evaporation crucible includes a crucible body and a plurality of nozzles connected to the crucible body, wherein at least one of the nozzles is provided with a nozzle heating structure at a periphery thereof. The evaporation device includes the above-mentioned evaporation crucible.

First claim

What is claimed is:

1 . An evaporation crucible, comprising a crucible body and a plurality of nozzles connected to the crucible body, wherein at least one of the nozzles is provided with a nozzle heating structure at a periphery thereof.

2 . The evaporation crucible of claim 1 , wherein the nozzle heating structure is formed to be recessed towards the crucible body, and the evaporation crucible further comprises a storing chamber surrounded by the nozzle heating structure;
the storing chamber is configured to store an evaporation material which is cooled during an evaporation process.

3 . The evaporation crucible of claim 2 , wherein a guide plate is further disposed above the storing chamber to cover the storing chamber.

4 . The evaporation crucible of claim 3 , wherein one side of the guide plate facing away the storing chamber is provided with a plurality of external guide grooves.

5 . The evaporation crucible of claim 4 , wherein, in a plan view, the plurality of guide grooves are arranged radially about the nozzle.

6 . The evaporation crucible of claim 4 , wherein a width of the guide groove is a half of an outer diameter of the nozzle.

7 . The evaporation crucible of claim 4 , further comprising a ring-shaped channel connected to one end of each of the external guide grooves far away from the nozzle.

8 . The evaporation crucible of claim 7 , wherein the channel is provided with a plurality of baffles which are arranged in a stagger manner.

9 . The evaporation crucible of claim 7 , wherein an outer diameter of the channel is 3-5 times of an outer diameter of the nozzle.

10 . The evaporation crucible of claim 3 , wherein,
a blocking plate is disposed within the nozzle at one end of the nozzle far away from the crucible body, wherein the blocking plate forms an obtuse angle with respective to an axial direction of the nozzle; and an internal guide groove is disposed where the blocking plate is connected to the nozzle and is formed to penetrate through the nozzle.

11 . The evaporation crucible of claim 10 , wherein in a cross section of the nozzle, a straight line connecting one end of the blocking plate far away from the crucible body and one end of the nozzle far away from the crucible body forms a first included angle with respective to a top surface of a nozzle exit; and a diagonal line in the cross section of the nozzle forms a second included angle with respective to the top surface of the nozzle exit,
wherein, the first included angle is larger than the second included angle.

12 . The evaporation crucible of claim 2 , further comprising a temperature sensor disposed outside of the storing chamber.

13 . The evaporation crucible of claim 1 , wherein the crucible body comprises a grid-structured division plate to divide an interior of the crucible body into a plurality of compartments and an air balance plate disposed above the division plate, wherein the division plate and the air balance plate are both formed of copper-nickel alloy material.

14 . An evaporation device, comprising an evaporation crucible, wherein
the evaporation crucible comprises a crucible body and a plurality of nozzles connected to the crucible body, wherein at least one of the nozzles is provided with a nozzle heating structure at a periphery thereof.

15 . The evaporation device of claim 14 , wherein the nozzle heating structure is formed to be recessed towards the crucible body, and the evaporation crucible further comprises a storing chamber surrounded by the nozzle heating structure;
the storing chamber is configured to store an evaporation material which is cooled during an evaporation process.

16 . The evaporation device of claim 15 , wherein a guide plate is further disposed above the storing chamber to cover the storing chamber.

17 . The evaporation device of claim 16 , wherein one side of the guide plate facing away the storing chamber is provided with a plurality of external guide grooves.

18 . The evaporation device of claim 16 , wherein,
a blocking plate is disposed within the nozzle at one end of the nozzle far away from the crucible body, wherein the blocking plate forms an obtuse angle with respective to an axial direction of the nozzle; and an internal guide groove is disposed where the blocking plate is connected to the nozzle and is formed to be penetrating through the nozzle.

19 . The evaporation device of claim 18 , wherein in a cross section of the nozzle, a straight line connecting one end of the blocking plate far away from the crucible body and one end of the nozzle far away from the crucible body forms a first included angle with respective to a top surface of a nozzle exit; and a diagonal line in the cross section of the nozzle forms a second included angle with respective to the top surface of the nozzle exit,
wherein, the first included angle is larger than the second included angle.

20 . The evaporation device of claim 14 , wherein the crucible body comprises a grid-structured division plate to divide an interior of the crucible body into a plurality of compartments and an air balance plate disposed above the division plate, wherein the division plate and the air balance plate are both formed of copper-nickel alloy material.

Assignees

• Boe Technology Group Co Ltd
• Ordos Yuansheng Optoelectronics Co Ltd

Inventors

• Pei Fengwei
• Zhao Ziyi

Classifications

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title