Pattern inspection device and pattern inspection method
US-2015212019-A1 · Jul 30, 2015 · US
US2016301811A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016301811-A1 |
| Application number | US-201615091743-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 6, 2016 |
| Priority date | Apr 7, 2015 |
| Publication date | Oct 13, 2016 |
| Grant date | — |
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An image inspection apparatus includes: a light source configured to emit white light onto a test image formed on a paper sheet; an optical lens system configured to receive light reflected by the paper sheet, the reflected light being of the white light emitted from the light source; a separating unit configured to separate light having passed through the optical lens system; a reading unit configured to receive the separated light at the different wavelengths, and optically read the test image of the light; and a control unit configured to calculate edge blurs at a rising edge and a falling edge of each set of image data of the light obtained by the reading unit reading the test image, calculate widths of the test image, and determine the width calculated from the set of image data having the smallest edge blur to be the width of the test image.
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What is claimed is: 1 . An image inspection apparatus comprising: alight source configured to emit white light onto a test image formed on a paper sheet; an optical lens system configured to receive light reflected by the paper sheet, the reflected light being of the white light emitted from the light source; a separating unit configured to separate light having passed through the optical lens system in accordance with wavelength bands; a reading unit configured to receive the separated light at the different wavelengths, and optically read the test image of the light at each of the different wavelengths; and a control unit configured to calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the test image, calculate widths of the test image, and determine the width calculated from the set of image data having the smallest edge blur to be the width of the test image. 2 . The image inspection apparatus according to claim 1 , wherein the test image is a black image. 3 . The image inspection apparatus according to claim 1 , wherein the separating unit is a color filter capable of separating a plurality of colors from one another, the color filter being provided in front of the reading unit. 4 . An image inspection apparatus comprising: a light source configured to emit white light onto a black test image and a color test image formed on a paper sheet; an optical lens system configured to receive light reflected by the paper sheet, the reflected light being of the white light emitted from the light source; a separating unit configured to separate light having passed through the optical lens system in accordance with wavelength bands; a reading unit configured to receive the separated light at the different wavelengths, and optically read the test images of the light at each of the different wavelengths; and a control unit configured to calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the black test image, calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the color test image, and calculate widths of the test images, wherein the control unit determines a focal length difference between a focal length of the optical lens system with respect to light at a wavelength corresponding to the image data having the smallest edge blur in the black test image and a focal length of the optical lens system with respect to light at a wavelength corresponding to a color complementary to the color test image, and correct the calculated widths of the test images by using the edge blurs and the focal length difference. 5 . The image inspection apparatus according to claim 4 , wherein the control unit obtains target widths by applying the calculated widths of the test images, the edge blurs, and the focal length difference to the following equation: target width=calculated width+α×|focal length difference| α: a coefficient determined by the focal length difference. 6 . The image inspection apparatus according to claim 4 , wherein the separating unit is a color filter capable of separating a plurality of colors from one another, the color filter being provided in front of the reading unit. 7 . An image forming apparatus comprising: an image forming unit configured to form an image on a paper sheet; alight source configured to emit white light onto a test image formed on the paper sheet; an optical lens system configured to receive light reflected by the paper sheet, the reflected light being of the white light emitted from the light source; a separating unit configured to separate light having passed through the optical lens system in accordance with wavelength bands; a reading unit configured to receive the separated light at the different wavelengths, and optically read the test image of the light at each of the different wavelengths; and a control unit configured to calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the test image, calculate widths of the test image, and determine the width calculated from the set of image data having the smallest edge blur to be the width of the test image. 8 . An image forming apparatus comprising: an image forming unit configured to form an image on a paper sheet; a light source configured to emit white light onto a black test image and a color test image formed on the paper sheet; an optical lens system configured to receive light reflected by the paper sheet, the reflected light being of the white light emitted from the light source; a separating unit configured to separate light having passed through the optical lens system in accordance with wavelength bands; a reading unit configured to receive the separated light at the different wavelengths, and optically read the test images of the light at each of the different wavelengths; and a control unit configured to calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the black test image, calculate edge blurs at a rising edge and a falling edge of each set of image data of the light at the different wavelengths obtained by the reading unit reading the color test image, and calculate widths of the test images, wherein the control unit determines a focal length difference between a focal length of the optical lens system with respect to light at a wavelength corresponding to the image data having the smallest edge blur in the black test image and a focal length of the optical lens system with respect to light at a wavelength corresponding to a color complementary to the color test image, and correct the calculated widths of the test images by using the edge blurs and the focal length difference.
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