Solid state image sensor, method of manufacturing the same, and electronic device
US-2016172399-A1 · Jun 16, 2016 · US
US2016299239A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016299239-A1 |
| Application number | US-201615090471-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 4, 2016 |
| Priority date | Apr 9, 2015 |
| Publication date | Oct 13, 2016 |
| Grant date | — |
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A radiation imaging apparatus includes a first control line electrically connected to a control electrode of an imaging switching element, a second control line electrically connected to a control electrode of a detection switching element, a signal line electrically connected to a main electrode of the detection switching element, a capacitance line arranged to be capacitively coupled with the signal line, wherein the capacitance line is different from the first control line and the second control line, a driving unit electrically connected to the second control line and the capacitance line and configured to apply a voltage to the detection switching element and the capacitance line, and a control unit configured to control the driving unit to apply, in a case where an on-state or off-state voltage is applied to the detection switching element, a voltage having an opposite polarity to that of the voltage to the capacitance line.
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What is claimed is: 1 . A radiation imaging apparatus comprising: an imaging pixel configured to acquire a radiation image, wherein the imaging pixel includes an imaging switching element for outputting a signal from an imaging conversion element; a detection pixel configured to detect radiation incidence, wherein the detection pixel includes a detection switching element for outputting a signal from a detection conversion element; a first control line electrically connected to a control electrode of the imaging switching element; a second control line electrically connected to a control electrode of the detection switching element; a signal line electrically connected to a main electrode of the detection switching element; a capacitance line arranged to be capacitively coupled with the signal line, wherein the capacitance line is different from the first control line and the second control line; a driving unit electrically connected to the second control line and the capacitance line and configured to apply a voltage to the detection switching element and the capacitance line; and a control unit configured to control the driving unit to apply, in a case where an on-state or off-state voltage is applied to the detection switching element, a voltage having an opposite polarity to that of the voltage to the capacitance line. 2 . The radiation imaging apparatus according to claim 1 , wherein the control unit controls the driving unit so that a timing at which the on-state or off-state voltage is applied and a timing at which the voltage having the opposite polarity is applied overlap each other. 3 . The radiation imaging apparatus according to claim 1 , wherein the control unit controls the driving unit so that a timing at which the on-state or off-state voltage is applied coincides with a timing at which the voltage having the opposite polarity is applied. 4 . The radiation imaging apparatus according to claim 1 , wherein ½×Cp×Vpp<Cc×ΔVc<2×Cp×Vpp, is satisfied; and wherein Cgs is a capacitance formed between the second control line and the signal line, ΔVpp is a voltage difference applied to the second control line, Cc is a capacitance of a capacitively coupled portion, and ΔVc is a voltage difference applied to the capacitance line. 5 . The radiation imaging apparatus according to claim 1 , wherein the capacitance line is arranged side by side in the same direction with respect to the control line. 6 . The radiation imaging apparatus according to claim 1 , wherein the capacitance line is arranged so as to overlap the signal line. 7 . The radiation imaging apparatus according to claim 1 , wherein the capacitively coupled portion is arranged outside an imaging region in which the imaging pixel is arranged. 8 . The radiation imaging apparatus according to claim 1 , wherein the capacitively coupled portion is formed in a region overlapping the imaging pixel and/or the detection pixel. 9 . The radiation imaging apparatus according to claim 1 , wherein the detection switching element includes a thin film transistor, and wherein the capacitively coupled portion includes a switching element having the same structure as that of the thin film transistor. 10 . The radiation imaging apparatus according to claim 1 , wherein the detection pixel further includes an imaging conversion element and an imaging switching element connected to the imaging conversion element. 11 . A radiation imaging system comprising: a radiation source configured to generate radiation; and a radiation imaging apparatus, wherein the radiation imaging apparatus comprises: an imaging pixel configured to acquire a radiation image, wherein the imaging pixel includes an imaging switching element for outputting a signal from an imaging conversion element; a detection pixel configured to detect radiation incidence, wherein the detection pixel includes a detection switching element for outputting a signal from a detection conversion element; a first control line electrically connected to a control electrode of the imaging switching element; a second control line electrically connected to a control electrode of the detection switching element; a signal line electrically connected to a main electrode of the detection switching element; a capacitance line, which is different from the first control line and the second control line, arranged to be capacitively coupled with the signal line; a driving unit electrically connected to the second control line and the capacitance line and configured to apply a voltage to the detection switching element and the capacitance line; and a control unit configured to control the driving unit to apply, in a case where an on-state or off-state voltage is applied to the detection switching element, a voltage having an opposite polarity to that of the voltage to the capacitance line. 12 . A radiation imaging apparatus comprising: an imaging pixel configured to acquire a radiation image, wherein the imaging pixel includes an imaging switching element for outputting a signal from an imaging conversion element; a detection pixel configured to detect radiation incidence, wherein the detection pixel includes a detection switching element for outputting a signal from a detection conversion element; a driving unit configured to apply a voltage for controlling an output through the imaging switching element to the imaging switching element via a first control line, and to apply a voltage for controlling an output through the detection switching element to the detection switching element via a second control line; a signal line for transmitting a signal output through the detection switching element; a capacitance line arranged to be capacitively coupled with the signal line, wherein the capacitance line is different from the first control line and the second control line; and a control unit configured to perform control to change, in a case where the driving unit changes a voltage applied to the detection switching element via the second control line, a voltage applied to the capacitance line to have an opposite polarity to that of the changed voltage to suppress a variation of a signal transmitted to the signal line caused by a charge generated on the signal line via a parasitic capacitance between the second control line and the signal line. 13 . A radiation imaging system comprising: a radiation source configured to generate radiation; and a radiation imaging apparatus, wherein the radiation imaging apparatus comprises: an imaging pixel configured to acquire a radiation image, wherein the imaging pixel includes an imaging switching element for outputting a signal from an imaging conversion element; a detection pixel configured to detect radiation incidence, wherein the detection pixel includes a detection switching element for outputting a signal from a detection conversion element; a driving unit configured to apply a voltage for controlling an output through the imaging switching element to the imaging switching element via a first control line, and to apply a voltage for controlling an output through the detection switching element to the detection switching element via a second control line; a signal line for transmitting a signal output through the detection switching element; a capacitance line arranged to be capacitively coupled with the signal line, wherein the capacitance line is different from the first control line and the second control line; and a control unit configured to perform control to change, in a case where the driving unit changes a voltage applied to the detection switching element via the
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