Polyhexahydrotriazine dielectrics

Patent metadata

Field	Value
Publication number	US-2016297931-A1
Application number	US-201514680181-A
Country	US
Kind code	A1
Filing date	Apr 7, 2015
Priority date	Apr 7, 2015
Publication date	Oct 13, 2016
Grant date	—

Abstract

Low dielectric constant (low-k) polyhemiaminal (PHA) and polyhexahydrotriazine (PHT) materials with cyclic aliphatic ring structures are described. The materials are formed by a method that includes heating a mixture comprising amines and paraformaldehyde. The reaction mixtures may be used to form low-k PHT prepregs, composites and dielectrics used in integrated circuits.

First claim

1 . A polyhexahydrotriazine (PHT), comprising:
a plurality of trivalent hexahydrotriazine groups having the structure

a plurality of carbon groups having the structure

and
wherein each wavy bond site of a given hexahydrotriazine group is covalently linked at a respective wavy bond site of a carbon group, and each wavy bond site of a given carbon group is covalently linked at a respective wavy bond site of a hexahydrotriazine group, and wherein at least one of 1, 2, and 3 comprises a chemical group that is a cyclic carbon chemical group, or 1 and 2 can be part of an cyclic carbon chemical group, or 2 and 3 can be part of an cyclic carbon chemical group, or 1 and 3 can be part of an cyclic carbon chemical group.

2 . The PHT of claim 1 , wherein at least one of 1, 2, and 3 is a covalently bonded carbon substituent.

3 . The PHT of claim 2 , wherein at least one of 1, 2, and 3 comprises a covalently bonded cyclic aliphatic chemical group.

4 . The PHT of claim 3 , wherein at least one cyclic aliphatic chemical group comprises at least one cyclic carbon ring.

5 . The PHT of claim 4 , wherein at least one cyclic carbon ring is fused to at least one other cyclic carbon ring.

6 . The PHT of claim 1 , wherein at least one of 1, 2, and 3 covalently bonds at least one hexahydrotriazine group to another hexahydrotriazine group.

7 . The PHT of claim 1 , comprising at least 50% by mole aliphatic carbon-carbon chemical bonds based on polymer.

8 . The PHT of claim 7 , comprising at least 50% by mole cyclic aliphatic carbon-carbon chemical bonds based on polymer.

9 . The PHT of claim 8 , comprising less than 50% by mole aromatic carbon-carbon chemical bonds based on polymer.

10 . The PHT of claim 1 , comprising covalently bonded fluorine atoms.

11 . The PHT of claim 10 , comprising cyclic chemical groups that contain covalently bonded fluorine atoms.

12 . The PHT of claim 1 , wherein the dielectric constant is less than 5.

13 . The PHT of claim 12 , wherein the dielectric constant is at least 1.8.

14 - 20 . (canceled)

Assignees

• IBM

Inventors

• Boday Dylan J
• Garcia Jeannette M
• Hedrick James L
• Wojtecki Rudy J

Classifications

• H10W20/42

  Vias, e.g. via plugs · CPC title

• C08J2379/04

  Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors · CPC title

• C08G73/0644 Primary

  Poly(1,3,5)triazines · CPC title

• C08J5/24

  Impregnating materials with prepolymers which can be polymerised in situ, e.g. manufacture of prepregs · CPC title

• D06M15/37

  Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds · CPC title