Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Patent metadata

Field	Value
Publication number	US-2016293472-A1
Application number	US-201615179677-A
Country	US
Kind code	A1
Filing date	Jun 10, 2016
Priority date	Jul 4, 2011
Publication date	Oct 6, 2016
Grant date	—

Abstract

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

First claim

What is claimed is:

1 . An organic layer deposition apparatus comprising:
an electrostatic chuck for supporting a substrate; a deposition unit comprising a chamber for maintaining a vacuum and an organic layer deposition assembly for depositing at least one organic layer on the substrate supported by the electrostatic chuck; and a first conveyor unit passing through the chamber and for moving the electrostatic chuck supporting the substrate into the deposition unit, wherein the first conveyor unit comprises a guide unit comprising a receiving member for supporting the electrostatic chuck to be movable in a direction while the electrostatic chuck is spaced apart from the first conveyor unit, wherein the substrate is spaced apart from the organic layer deposition assembly, and the substrate or the organic layer deposition assembly is configured to be moved relative to the other during deposition, and wherein the receiving member comprises: a first receiving member extending under a portion of a lower surface of the electrostatic chuck; a second receiving member below the first receiving member and extending over a portion of an upper surface of the electrostatic chuck; and a connection member connecting the first receiving member and the second receiving member to each other such that the substrate is exposed to the organic layer deposition assembly.

2 . The organic layer deposition apparatus of claim 1 , further comprising:
a loading unit for fixing the substrate to the electrostatic chuck; and an unloading unit for separating the substrate on which deposition has been completed from the electrostatic chuck.

3 . The organic layer deposition apparatus of claim 2 , wherein the first conveyor unit is configured to sequentially move the electrostatic chuck to the loading unit, the deposition unit, and the unloading unit.

4 . The organic layer deposition apparatus of claim 2 , further comprising a second conveyor unit for returning the electrostatic chuck separated from the substrate, from the unloading unit to the loading unit.

5 . The organic layer deposition apparatus of claim 1 , wherein the guide unit comprises:
a driving unit for generating a driving force to move the electrostatic chuck; and a magnetic levitation bearing for levitating the electrostatic chuck above the receiving member to move without contacting the receiving member.

6 . The organic layer deposition apparatus of claim 5 , wherein the driving unit comprises a linear motor.

7 . The organic layer deposition apparatus of claim 6 , wherein the linear motor comprises a magnetic rail disposed at a side of the electrostatic chuck between the upper and lower surfaces of the electrostatic chuck, and a coil disposed in the receiving member.

8 . The organic layer deposition apparatus of claim 5 , wherein the magnetic levitation bearing comprises a side magnetic levitation bearing disposed to face a side of the electrostatic chuck between the upper and lower surfaces of the electrostatic chuck, and an upper magnetic levitation bearing disposed to face an upper surface of the electrostatic chuck, and the driving unit is disposed to face a side of the electrostatic chuck between the upper and lower surfaces of the electrostatic chuck.

9 . The organic layer deposition apparatus of claim 5 , wherein the magnetic levitation bearing comprises a magnet selected from the group consisting of electromagnets, permanent magnets, superconducting magnets, and combinations thereof.

10 . The organic layer deposition apparatus of claim 1 , further comprising a gap sensor for measuring a gap interval between the receiving member and the electrostatic chuck.

11 . The organic layer deposition apparatus of claim 10 , further comprising a magnetic levitation bearing controlled by the gap sensor to provide a magnetic force for levitating the electrostatic chuck above the receiving member.

12 . The organic layer deposition apparatus of claim 11 , wherein the magnetic levitation bearing comprises a side magnetic levitation bearing disposed to face a side of the electrostatic chuck between the upper and lower surfaces of the electrostatic chuck, and an upper magnetic levitation bearing disposed to face an upper surface of the electrostatic chuck.

13 . The organic layer deposition apparatus of claim 12 , wherein the gap sensor comprising a first gap sensor for measuring a gap interval between the electrostatic chuck and the first conveyor unit along a first direction, and a second gap sensor for measuring a gap interval between the electrostatic chuck and the first conveyor unit along a second direction crossing the first direction.

14 . The organic layer deposition apparatus of claim 1 , further comprising:
a first magnetic levitation bearing for levitating the electrostatic chuck to be spaced apart from the first conveyor unit along a first direction; and a second magnetic levitation bearing for levitating the electrostatic chuck to be spaced apart from the first conveyor unit along a second direction crossing the first direction.

15 . The organic layer deposition apparatus of claim 1 , wherein the receiving member comprises a receiving groove defined by the first receiving member, the second receiving member, and the connection member for accommodating a side of the electrostatic chuck.

16 . The organic layer deposition apparatus of claim 1 , wherein the organic layer deposition assembly comprises a plurality of organic layer deposition assemblies disposed in the chamber.

17 . The organic layer deposition apparatus of claim 1 , wherein the chamber comprises a first chamber and a second chamber interconnected with each other, and the organic layer deposition assembly comprises a plurality of organic layer deposition assemblies disposed in each of the first and second chambers.

18 . The organic layer deposition apparatus of claim 1 , wherein the organic layer deposition assembly comprises:
a deposition source configured to discharge a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and comprising a plurality of deposition source nozzles; and a patterning slit sheet disposed to face and spaced apart from the deposition source nozzle unit, having a plurality of patterning slits, and being smaller than the substrate.

Assignees

• Samsung Display Co Ltd

Inventors

• Chang Seok-Rak
• Nam Myeng-Woo
• Kang Hee-Cheol
• Kim Jong-Heon
• Hong Jong-Won
• Chang Uno

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3204

  using magnetic elements · CPC title

• H10P72/0456

  in-line arrangement · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/36

  using air tracks · CPC title