193nm Laser And An Inspection System Using A 193nm Laser
US-2016056606-A1 · Feb 25, 2016 · US
US2016291443A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016291443-A1 |
| Application number | US-201615177140-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 8, 2016 |
| Priority date | May 22, 2014 |
| Publication date | Oct 6, 2016 |
| Grant date | — |
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A cascaded harmonic generator, for cascaded optical harmonic generation from an optical beam provided by a laser source, may include a second harmonic generator to generate a second harmonic optical beam based on a residual beam associated with the optical beam. The cascaded harmonic generator may include a third harmonic generator to generate a third harmonic optical beam based on the second harmonic optical beam and the optical beam. The third harmonic generator may be positioned in an optical path upstream from the second harmonic generator. A harmonic generator delay time, associated with the optical path, may be approximately equal to, or may be an approximate integer multiple of, a laser source round-trip time.
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What is claimed is: 1 . A cascaded harmonic generator for cascaded optical harmonic generation from an optical beam provided by a laser source, comprising: a second harmonic generator to generate a second harmonic optical beam based on a residual beam associated with the optical beam; and a third harmonic generator to generate a third harmonic optical beam based on the second harmonic optical beam and the optical beam, the third harmonic generator being positioned in an optical path upstream from the second harmonic generator, where a harmonic generator delay time, associated with the optical path, is approximately equal to, or is an approximate integer multiple of, a laser source round-trip time. 2 . The cascaded harmonic generator of claim 1 , where an optical path length of the optical path matches an optical path length of a round-trip optical path associated with the laser source. 3 . The cascaded harmonic generator of claim 1 , further comprising an adjustable mechanical component to adjust an optical path length of the optical path. 4 . The cascaded harmonic generator of claim 1 , where a length of the optical path is fixed. 5 . The cascaded harmonic generator of claim 1 , further comprising: a fourth harmonic generator to generate a fourth harmonic optical beam based on the third harmonic optical beam, the second harmonic optical beam, and the optical beam, the fourth harmonic generator being positioned in the optical path upstream from the third harmonic generator. 6 . The cascaded harmonic generator of claim 1 , where, at the third harmonic generator, a first fluctuation in the optical beam is approximately synchronized with a second fluctuation in the second harmonic optical beam. 7 . The cascaded harmonic generator of claim 1 , where the laser source is a solid-state laser. 8 . A harmonic generator, comprising: a higher harmonic generator to generate a higher harmonic optical beam based on a lower harmonic optical beam and an optical beam provided by a laser source; and a lower harmonic generator to generate the lower harmonic optical beam based on a residual beam associated with the optical beam, the lower harmonic generator lying on an optical path downstream from the higher harmonic generator, and the harmonic generator having a harmonic generator delay time, associated with the optical path, that is approximately equal to, or an approximate integer multiple of, a laser source round-trip time. 9 . The harmonic generator of claim 8 , where an optical path length of the optical path is approximately equal to a length of a round-trip optical path associated with the laser source. 10 . The harmonic generator of claim 8 , further comprising a component to adjust an optical path length of the optical path. 11 . The harmonic generator of claim 8 , where a length of the optical path is non-adjustable. 12 . The harmonic generator of claim 8 , where the lower harmonic generator is a second harmonic crystal and the higher harmonic generator is a third harmonic crystal. 13 . The harmonic generator of claim 8 , where the lower harmonic generator includes a second harmonic crystal and a third harmonic crystal, and the higher harmonic generator is a fourth harmonic crystal. 14 . The harmonic generator of claim 8 , where, at the higher harmonic generator, a first fluctuation in the optical beam is approximately aligned with a second fluctuation in the lower harmonic optical beam. 15 . The harmonic generator of claim 14 , where a third fluctuation in the higher harmonic optical beam is approximately aligned with the first fluctuation and the second fluctuation. 16 . A method, comprising: propagating, by a cascaded harmonic generator and along an optical path, an optical beam through a third harmonic generator, the optical beam being provided by a laser source; propagating, by the cascaded harmonic generator and along the optical path, the optical beam through a second harmonic generator to generate a second harmonic optical beam based on the optical beam, the optical beam being propagated through the second harmonic generator after the optical beam is propagated through the third harmonic generator; and propagating, by the cascaded harmonic generator and along the optical path, the second harmonic optical beam through the third harmonic generator, the second harmonic optical beam overlapping the optical beam in the third harmonic generator to permit the third harmonic generator to generate a third harmonic optical beam, where a delay time, associated with the optical path, is approximately equal to, or is an approximate integer multiple of, a round-trip time associated with the laser source. 17 . The method of claim 16 , where an optical path length of the optical path is approximately equal to a length of a round-trip optical path associated with the laser source. 18 . The method of claim 16 , further comprising: adjusting a length of the optical path such that the optical path length of the optical path matches an optical path length of a round-trip optical path associated with the laser source. 19 . The method of claim 16 , where the laser source is a fiber laser designed to operate with stable, non-varying polarization axes. 20 . The method of claim 16 , where, in the third harmonic generator, a first fluctuation in the optical beam is approximately synchronized with a second fluctuation in the second harmonic optical beam and a third fluctuation in the third harmonic optical beam.
Physics · mapped topic
Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams · CPC title
Physics · mapped topic
for second-harmonic generation {(G02F1/3532 takes precedence)} · CPC title
Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals · CPC title
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