Transparent type flat panel x-ray generation apparatus and x-ray imaging system

Patent metadata

Field	Value
Publication number	US-2016290936-A1
Application number	US-201415034337-A
Country	US
Kind code	A1
Filing date	Nov 3, 2014
Priority date	Nov 5, 2013
Publication date	Oct 6, 2016
Grant date	—

Abstract

An X-ray generation apparatus includes: an electron emission device comprising a plurality of electron emission units that emit electrons; a transmission type X-ray emission unit for emitting an X-ray by electrons emitted by the plurality of electron emission units; and a vacuum chamber for shielding the electron emission device and the transmission type X-ray emission unit by using vacuum. An X-ray imaging system includes an X-ray detection apparatus for detecting an X-ray that is irradiated from the X-ray generation apparatus and passes through an object.

First claim

1 . An X-ray generation apparatus comprising:
an electron emission device comprising a plurality of electron emission units that are independently driven and emit electrons; a transmission type X-ray emission unit for emitting an X-ray by electrons emitted by the plurality of electron emission units; and a vacuum chamber for shielding the electron emission device and the transmission type X-ray emission unit by using vacuum.

2 . The X-ray generation apparatus of claim 1 , wherein an X-ray transmission window that radiates the X-ray emitted by the X-ray emission unit to the outside of the vacuum chamber is provided in the vacuum chamber.

3 . The X-ray generation apparatus of claim 2 , wherein the X-ray transmission window comprises Be, C, Al, or a metal alloy including at least one of Be, C, and Al.

4 . The X-ray generation apparatus of claim 1 , wherein one or more of the plurality of electron emission units are simultaneously or sequentially driven to emit the electrons, and
wherein the X-ray emission unit comprises a plurality of X-ray emitters that emit the X-ray by the electrons emitted by the plurality of electron emission units.

5 . The X-ray generation apparatus of claim 1 , wherein the X-ray emission unit comprises an anode electrode that generates the X-ray by the electrons emitted by the plurality of electron emission units.

6 . The X-ray generation apparatus of claim 5 , wherein the anode electrode comprises an anode substrate and a coating layer provided on one surface of the anode substrate, and
wherein the coating layer comprises W, Mo. Ag, Cr, Fe, Co, Cu or a metal alloy including at least one of W, Mo. Ag, Cr, Fe, Co, and Cu.

7 . The X-ray generation apparatus of claim 6 , wherein the anode substrate is a carbon substrate, and
wherein the coating layer is a tungsten coating layer.

8 . The X-ray generation apparatus of claim 5 , further comprising: an insulating layer for separating the X-ray emission unit from the vacuum chamber.

9 . The X-ray generation apparatus of claim 5 , further comprising: a cooling apparatus spaced apart from the vacuum chamber by an insulating layer and cooling heat generated by the anode electrode.

10 . The X-ray generation apparatus of claim 7 , wherein the insulating layer comprises ceramics or plastics.

11 . The X-ray generation apparatus of claim 1 , wherein the vacuum chamber comprises a getter pump that removes a gas from the inside thereof.

12 . The X-ray generation apparatus of claim 1 , wherein each of the plurality of electron emission units comprises:
a gate insulating layer provided on a substrate and forming a cavity connected to the outside by an opening through which the electrons are emitted; a cathode electrode disposed in the cavity; an electron emission source disposed on the cathode electrode; and a gate electrode on the gate insulating layer.

13 . The X-ray generation apparatus of claim 12 , wherein each of the plurality of electron emission units comprises a carbon nanotube (CNT), a carbon nanofiber, metal, silicon, an oxide, diamond, diamond like carbon (DLC), a carbide compound or a nitrogen compound.

14 . The X-ray generation apparatus of claim 12 , wherein one or more of the plurality of electron emission units are simultaneously or sequentially driven to emit the electrons.

15 . An X-ray imaging system comprising:
an X-ray generation apparatus of claim 1 ; and an X-ray detection apparatus for detecting an X-ray that is irradiated from the X-ray generation apparatus and passes through an object.

16 . The X-ray imaging system of claim 15 , wherein the X-ray detection apparatus comprises a plurality of X-ray detection units that are 2-dimensionally arranged and independently driven.

17 . The X-ray imaging system of claim 15 , wherein an X-ray transmission window that radiates the X-ray emitted by the X-ray emission unit to the outside of the vacuum chamber is provided in the vacuum chamber, and the X-ray transmission window comprises Be, C, Al, or a metal alloy including at least one of Be, C, and Al.

18 . The X-ray imaging system of claim 17 , wherein the X-ray emission unit comprises an anode electrode that generates the X-ray by the electrons emitted by the plurality of electron emission units,
wherein the anode electrode comprises an anode substrate and a coating layer provided on one surface of the anode substrate, and wherein the coating layer comprises W, Mo. Ag, Cr, Fe, Co, Cu or a metal alloy including at least one of W, Mo. Ag, Cr, Fe, Co, and Cu.

19 . The X-ray imaging system of claim 18 , further comprising: an insulating layer for separating the X-ray emission unit from the vacuum chamber.

20 . The X-ray imaging system of claim 19 , further comprising: a cooling apparatus spaced apart from the vacuum chamber by an insulating layer and cooling heat generated by the anode electrode.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Jeong Taewon
• Kim Doyoon
• Kim Ilhwan
• Park Shanghyeun
• Lee Changsoo
• Kim Yongchul

Classifications

• G01N23/04 Primary

  and forming images of the material · CPC title

• H01J35/065 Primary

  Field emission, photo emission or secondary emission cathodes · CPC title

• H01J2235/1204

  of the anode · CPC title

• A61B6/40

  Arrangements for generating radiation specially adapted for radiation diagnosis · CPC title

• H01J2235/068

  Multi-cathode assembly · CPC title