Sequential icp optical emission spectrometer and method for correcting measurement wavelength

Patent metadata

Field	Value
Publication number	US-2016290862-A1
Application number	US-201615084435-A
Country	US
Kind code	A1
Filing date	Mar 29, 2016
Priority date	Mar 31, 2015
Publication date	Oct 6, 2016
Grant date	—

Abstract

A sequential inductively coupled plasma (ICP) optical emission spectrometer includes a controller that operates to perform a series of process based on a shift amount (time dependency) of a wavelength peak position according to time elapse of a reference wavelength obtained as a result of continuously measuring a plurality of emission lines of argon having different wavelengths as the reference wavelength and a per-wavelength shift amount (wavelength dependency) of the reference wavelength, the process including: calculating a shift amount of a wavelength peak position of each measurement wavelength from a standard sample measurement time to an unknown sample measurement time; and performing measurement wavelength correction for correcting the movement position of the diffracting grating corresponding to the wavelength peak position of the measurement wavelength relative to the initial position.

First claim

What is claimed is:

1 . A sequential inductively coupled plasma (ICP) optical emission spectrometer comprising:
an inductively coupled plasma generator that is configured to atomize or excite an element by inductively coupled plasma and to obtain an emission line of the element; a spectroscope configured to receive the emission line and spectrally dispersing and detecting the emission line using a diffracting grating; a detector configured to detect the emission line that is spectrally dispersed by the spectroscope; and a controller configured to analyze an element to be measured based on a wavelength peak position of the emission line detected in the detector, wherein the controller operates to perform a series of process based on a shift amount (time dependency) of a wavelength peak position according to time elapse of a reference wavelength obtained as a result of continuously measuring a plurality of emission lines of argon having different wavelengths as the reference wavelength and a shift amount (wavelength dependency) of the reference wavelength for each wavelength of each element, the process comprising: calculating a shift amount of a wavelength peak position of each measurement wavelength from a standard sample measurement time to an unknown sample measurement time; and performing measurement wavelength correction for correcting the movement position of the diffracting grating corresponding to the wavelength peak position of the measurement wavelength relative to the standard sample measurement time.

2 . The sequential ICP optical emission spectrometer according to claim 1 ,
wherein, as the reference wavelength used as a correction amount relative to the initial position when calculating the shift amount of the wavelength peak position of the measurement wavelength of each element to be measured set upon the standard sample measurement time, a wavelength in the vicinity of the wavelength peak position of the measurement wavelength of the element to be measured is used.

3 . The sequential ICP optical emission spectrometer according to claim 1 ,
wherein a plurality of reference wavelengths belong to a short wavelength side area and a long wavelength side area of a measurement wavelength of an unknown sample.

4 . The sequential ICP optical emission spectrometer according to claim 1 ,
wherein a plurality of reference wavelengths belong to any one of a short wavelength side area or a long wavelength side area of a measurement wavelength of an unknown sample.

5 . A method for correcting measurement wavelength in a sequential inductively coupled plasma (ICP) optical emission spectrometer including:
an inductively coupled plasma generator that is configured to atomize or excite an element by inductively coupled plasma and to obtain an emission line of the element; a spectroscope configured to receive the emission line and spectrally dispersing and detecting the emission line using a diffracting grating; a detector configured to detect the emission line that is spectrally dispersed by the spectroscope; and a controller configured to analyze an element to be measured based on a wavelength peak position of the emission line detected in the detector, wherein the method comprises: continuously measuring a plurality of emission lines of argon having different wavelengths as a reference wavelength; calculating a shift amount of a wavelength peak position of each measurement wavelength from a standard sample measurement time to an unknown sample measurement time using a shift amount (time dependency) of a wavelength peak position according to time elapse of the reference wavelength and a shift amount (wavelength dependency)of the reference wavelength for each wavelength of each element; and correcting the movement position of the diffracting grating corresponding to the wavelength peak position of the measurement wavelength upon measurement of an unknown sample containing the element to be measured.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Ikku Yutaka

Classifications

• G01J3/027 Primary

  Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation · CPC title

• G01N21/73 Primary

  using plasma burners or torches · CPC title

• G01J3/443

  Emission spectrometry · CPC title

• G01N2201/068

  Optics, miscellaneous · CPC title

• G01J3/28

  Investigating the spectrum (using colour filters G01J3/51) · CPC title