Methods of depositing nanomaterial and methods of making a device
US-9034669-B2 · May 19, 2015 · US
US2016290780A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016290780-A1 |
| Application number | US-201615072845-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 17, 2016 |
| Priority date | Apr 1, 2015 |
| Publication date | Oct 6, 2016 |
| Grant date | — |
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A strain sensor and a method of manufacturing the same are provided. The strain sensor includes a substrate, a nanocomposite layer disposed on the substrate, and a protective layer disposed on the nanocomposite layer. The nanocomposite layer includes metallic nanowires, a first polymeric material, and a second polymeric material. The protective layer includes a third polymeric material. The metallic nanowires are randomly arranged in the nanocomposite layer.
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What is claimed is: 1 . A strain sensor, comprising: a substrate; a nanocomposite layer disposed on the substrate, and comprising metallic nanowires, a first polymeric material, and a second polymeric material; and a protective layer disposed on the nanocomposite layer, and comprising a third polymeric material, wherein the metallic nanowires are randomly arranged in the nanocomposite layer. 2 . The strain sensor of claim 1 , wherein the protective layer further comprises one or more of the first polymeric material and the second polymeric material. 3 . The strain sensor of claim 1 , wherein the first polymeric material is one or more selected from the group consisting of poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS), polyacetylene, polyparaphenylene, polypyrrole, and polyaniline. 4 . The strain sensor of claim 1 , wherein the second polymeric material is one or more selected from the group consisting of polydimethylsiloxane (PDMS), ecoflex and polyurethane (PU). 5 . The strain sensor of claim 1 , wherein the substrate is one or more selected from the group consisting of PDMS, ecoflex, and PU. 6 . The strain sensor of claim 1 , wherein the third polymeric material is one or more selected from the group consisting of PDMS, ecoflex, and PU. 7 . The strain sensor of claim 1 , wherein the metallic nanowires comprise gold, silver, nickel, copper, platinum, aluminum, or a combination thereof. 8 . A method of manufacturing a strain sensor using a nanocomposite, the method comprising: forming, on a substrate, a nanocomposite layer comprising metallic nanowires, a first polymeric material, and a second polymeric material; and forming, on the nanocomposite layer, a protective layer comprising a third polymeric material, wherein the metallic nanowires are randomly arranged in the nanocomposite layer. 9 . The method of claim 7 , wherein the forming of a nanocomposite layer comprises: exposing the substrate to oxygen-plasma; spin-coating a first solution comprising the metallic nanowires on the oxygen-plasma treated substrate and performing a first heat treatment; and spin-coating, on the substrate on which the metallic nanowires are randomly arranged, a second solution comprising the first polymeric material and the second polymeric material, and performing a second heat treatment. 10 . The method of claim 8 , wherein the spin-coating of the first solution is performed at a rotational speed of about 200 to about 400 rpm. 11 . The method of claim 8 , wherein a concentration of the first polymeric material in the second solution is about 10 to about 50%. 12 . The method of claim 8 , wherein a concentration of the second polymeric material in the second solution is about 50 to about 90%. 13 . The method of claim 7 , wherein the forming of a protective layer comprises: spin-coating a third solution comprising a third polymeric material on the substrate, on which the nanocomposite layer is formed, and performing a second heat treatment. 14 . The method of claim 8 , wherein the first heat treatment comprises heating at about 50 to about 120° C. for about 10 to about 30 minutes. 15 . The method of claim 8 , wherein the second heat treatment comprises heating, under a nitrogen (N 2 ) atmosphere, at about 50 to about 120° C. for about 10 to about 30 minutes and heating at about 120 to about 200° C. for about 60 to about 120 minutes.
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