Gas supply apparatus, vacuum processing apparatus, and gas supply method
US-2024055278-A1 · Feb 15, 2024 · US
US2016290692A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016290692-A1 |
| Application number | US-201615079107-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 24, 2016 |
| Priority date | Apr 3, 2015 |
| Publication date | Oct 6, 2016 |
| Grant date | — |
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A caulking fixation type power element has a diaphragm, an upper lid member forming a pressure actuation chamber with a working gas, a receiving member provided with a through hole in its center portion and arranged in an opposite side to the upper lid member in relation to the diaphragm, and a stopper member arranged in a lower space formed between the diaphragm and the receiving member, and is integrated according to a circumferential welding by lapping the upper lid member, the diaphragm and the receiving member, the stopper member has a main body portion inserted to the through hole of the receiving member, and a flange portion having a larger diameter than the through hole and formed in one end of the main body portion, and the flange portion is arranged so as to come into contact with the receiving member from the lower space side.
Opening claim text (preview).
What is claimed is: 1 . A caulking fixation type power element comprising: a diaphragm; an upper lid member forming in relation to said diaphragm a pressure actuation chamber in which a working gas is sealed in; a receiving member which is provided with a through hole in its center portion and is arranged in an opposite side to said upper lid member in relation to said diaphragm; a stopper member arranged in a lower space which is formed between said diaphragm and said receiving member; and the caulking fixation type power element being integrated according to a circumferential welding by lapping said upper lid member, said diaphragm and said receiving member, wherein said stopper member has a main body portion which is inserted to said through hole of said receiving member, and a flange portion which has a larger diameter than said through hole and is formed in one end of said main body portion, and wherein said flange portion is arranged so as to come into contact with said receiving member from said lower space side. 2 . The caulking fixation type power element according to claim 1 , wherein said upper lid member further comprises a sealing hole for sealing said working gas, and a sealing plug for sealing said sealing hole. 3 . An expansion valve comprising: a valve main body having an inlet portion to which a high-pressure refrigerant is introduced, a valve chamber which is communicated with said inlet port, a valve hole which is open to said valve chamber, a valve seat which is formed in an inlet of said valve hole, and an outlet port to which refrigerant passing through said valve hole is fed; and a valve member which is arranged so as to face to said valve seat, wherein the caulking fixation type power element according to claim 1 is attached to an upper end of said valve main body via a caulking portion. 4 . An expansion valve comprising: a valve main body having an inlet portion to which a high-pressure refrigerant is introduced, a valve chamber which is communicated with said inlet port, a valve hole which is open to said valve chamber, a valve seat which is formed in an inlet of said valve hole, and an outlet port to which refrigerant passing through said valve hole is fed; and a valve member which is arranged so as to face to said valve seat, wherein the caulking fixation type power element according to claim 2 is attached to an upper end of said valve main body via a caulking portion.
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