Magnetic bearing device and vacuum pump

Patent metadata

Field	Value
Publication number	US-2016290351-A1
Application number	US-201415037071-A
Country	US
Kind code	A1
Filing date	Oct 3, 2014
Priority date	Nov 29, 2013
Publication date	Oct 6, 2016
Grant date	—

Abstract

Provided is a magnetic bearing device which allows easy initial adjustment and allows optimal bearing control to be performed by a simple algorithm without increasing a memory capacity of a controller. A pair of square multipliers and an adder acquire respective steady-state current values of a pair of electromagnets which attract a rotor shaft of a magnetic bearing not shown in opposite radial directions, square the respective steady-state current values, and add up the respective squared steady-state current values. Then, to optimally change respective currents in the electromagnets in accordance with a mounting posture of the magnetic bearing, a correction coefficient arithmetic operator calculates a correction gain instruction value acting on the electromagnets from the steady-state current values squared/added up. Then, a gain instruction value obtained by adding the correction gain instruction value to a fundamental gain of a control circuit for the electromagnets is input to a gain amplifier. The gain amplifier generates a corrected current instruction value on the basis of the gain instruction value and optimally controls the magnetic bearing.

First claim

1 . A magnetic bearing device, comprising:
a magnetic bearing that supports a rotor shaft in a state of non-contact, using an electromagnetic force of an electromagnet; and a controller that controls the magnetic bearing, wherein the controller includes: a current acquisition means for acquiring steady-state current values of respective currents flowing in a pair of the electromagnets that attract the rotor shaft of the magnetic bearing in opposite directions; a correction coefficient arithmetic means for determining, from the steady-state current values, a correction gain instruction value for compensating for an unstable spring constant due to an attracting force of a pair of the electromagnets, which results from a mounting posture of the magnetic bearing; a first addition means for adding up the correction gain instruction value and a fundamental gain, which is uniquely determined irrespective of the mounting posture of the magnetic bearing, to obtain a gain instruction value; and a current control means for controlling respective currents flowing in a pair of the electromagnets, using a current instruction value generated on the basis of the gain instruction value.

2 . The magnetic bearing device according to claim 1 , wherein the current acquisition means acquires the steady-state current values on the basis of current detection values of respective currents flowing in a pair of the electromagnets or on the basis of the current instruction value.

3 . The magnetic bearing device according to claim 1 , wherein the current control means controls a force instruction middle signal having position information of the rotor shaft in accordance with the gain instruction value, and adds up the force instruction middle signal, which is controlled in accordance with the gain instruction value, and a bias current setting value to generate the current instruction value.

4 . The magnetic bearing device according to claim 1 , wherein the current instruction value cancels out the unstable spring constant for a pair of the electromagnets and exerts only a force which returns the rotor shaft to a center of the magnetic bearing.

5 . The magnetic bearing device according to claim 1 , wherein the current acquisition means includes:
a pair of squaring means for individually squaring the steady-state current values of the respective currents flowing in a pair of the electromagnets; and a second addition means for adding up the steady-state current values individually squared by a pair of the squaring means.

6 . The magnetic bearing device according to claim 5 , further comprising:
a low pass filter that performs an averaging process on the steady-state current values squared/added up by a pair of the squaring means and the second addition means and transmits a value resulting from the averaging process to the correction constant arithmetic means.

7 . The magnetic bearing device according to claim 6 , wherein the low-pass filter has a resonance frequency of about 1 Hz.

8 . The magnetic bearing device according to claim 3 , further comprising:
a linearization means for linearizing, using the bias current setting value, a non-linear characteristic showing a relationship between the current instruction value generated by the current control means and the attracting force of the electromagnets.

9 . The magnetic bearing device according to claim 8 , wherein the linearization means functions only when no current is flowing in each of a pair of the electromagnets.

10 . A vacuum pump, comprising:
a magnetic bearing device comprising:
a magnetic bearing that supports a rotor shaft in a state of non-contact, using an electromagnetic force of an electromagnet; and
a controller that controls the magnetic bearing, wherein the controller comprises:
a current acquisition means for acquiring steady-state current values of respective currents flowing in a pair of the electromagnets that attract the rotor shaft of the magnetic bearing in opposite directions;
a correction coefficient arithmetic means for determining, from the steady-state current values, a correction gain instruction value for compensating for an unstable spring constant due to an attracting force of a pair of the electromagnets, which results from a mounting posture of the magnetic bearing;
a first addition means for adding up the correction gain instruction value and a fundamental gain, which is uniquely determined irrespective of the mounting posture of the magnetic bearing, to obtain a gain instruction value; and
a current control means for controlling respective currents flowing in a pair of the electromagnets, using a current instruction value generated on the basis of the gain instruction value.

11 . The magnetic bearing device according to claim 2 , wherein the current control means controls a force instruction middle signal having position information of the rotor shaft in accordance with the gain instruction value, and adds up the force instruction middle signal, which is controlled in accordance with the gain instruction value, and a bias current setting value to generate the current instruction value.

12 . The magnetic bearing device according to claim 2 , wherein the current instruction value cancels out the unstable spring constant for a pair of the electromagnets and exerts only a force which returns the rotor shaft to a center of the magnetic bearing.

13 . The magnetic bearing device according to claim 3 , wherein the current instruction value cancels out the unstable spring constant for a pair of the electromagnets and exerts only a force which returns the rotor shaft to a center of the magnetic bearing.

14 . The magnetic bearing device according to claim 2 , wherein the current acquisition means includes:
a pair of squaring means for individually squaring the steady-state current values of the respective currents flowing in a pair of the electromagnets; and a second addition means for adding up the steady-state current values individually squared by a pair of the squaring means.

15 . The magnetic bearing device according to claim 3 , wherein the current acquisition means includes:
a pair of squaring means for individually squaring the steady-state current values of the respective currents flowing in a pair of the electromagnets; and a second addition means for adding up the steady-state current values individually squared by a pair of the squaring means.

16 . The magnetic bearing device according to claim 4 , wherein the current acquisition means includes:
a pair of squaring means for individually squaring the steady-state current values of the respective currents flowing in a pair of the electromagnets; and a second addition means for adding up the steady-state current values individually squared by a pair of the squaring means.

17 . The magnetic bearing device according to claim 4 , further comprising:
a linearization means for linearizing, using the bias current setting value, a non-linear characteristic showing a relationship between the current instruction value generated by the current control means and the attracting force of the electromagnets.

Assignees

• Edwards Japan Ltd

Inventors

• Kawashima Toshiaki

Classifications

• F16C32/0489

  with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing · CPC title

• F16C32/0451 Primary

  Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control · CPC title

• H02K7/09

  with magnetic bearings · CPC title

• F04D29/053

  Shafts · CPC title

• F16C2233/00

  Monitoring condition, e.g. temperature, load, vibration · CPC title