Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US2016289493A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016289493-A1 |
| Application number | US-201615060029-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 3, 2016 |
| Priority date | Apr 6, 2015 |
| Publication date | Oct 6, 2016 |
| Grant date | — |
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Compositions of arylene oligomers and certain curing agents are useful to provide arylene polymer coatings having improved mechanical properties when cured in an oxygen-containing atmosphere. Methods of curing such compositions are also provided.
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What is claimed is: 1 . A composition comprising one or more curable arylene oligomers, one or more curing agents, and one or more organic solvents. 2 . The composition of claim 1 wherein the one or more curable arylene oligomers are chosen from arylene oligomers comprising as polymerized units one or more first monomers having two cyclopentadienone moieties and one or more second monomers having two or more alkyne moieties. 3 . The composition of claim 2 wherein the one or more first monomers have the structure shown in formula (1) wherein each R 1 is independently chosen from H, C 1-6 alkyl, phenyl, or substituted phenyl; and Ar 1 is an aromatic moiety. 4 . The composition of claim 3 wherein each R 1 is phenyl. 5 . The composition of claim 2 wherein the one or more second monomers are chosen from compounds of formula (5) and formula (6) wherein a is an integer from 0 to 4; b is 2 or 3; c is 2 or 3; each R 6 is independently chosen from H, Si(R 8 ) 3 , C 1-10 alkyl, C 1-10 alkoxy, C 7-15 aralkyl, C 6-10 aryl, and substituted C 6-10 aryl; each R 7 is independently chosen from H, C 1-10 alkyl, C 1-10 alkoxy, C 7-15 aralkyl, C 6-10 aryl, and substituted C 6-10 aryl; each R 8 is independently chosen from H, halogen, hydroxyl, C 1-10 alkyl, C 1-10 alkoxy, C 7-15 aralkyl, C 7-15 aralkoxy, C 6-10 aryl, C 6-20 aryloxy, and substituted C 6-10 aryl; and Ar a is C 6-10 aryl. 6 . The composition of claim 1 wherein the one or more curing agents are chosen from hindered amine compounds, hydroxyaryl-1,3,5-triazine compounds, and combinations thereof. 7 . The composition of claim 6 wherein the one or more curing agents are chosen from compounds of formulae (7) and (8) wherein R 9 is H, O − , or a monovalent organic radical having 1 to 20 carbon atoms; each R 10 is independently C 1-10 alkyl; R 11 is H or C 1-10 alkyl; R 12 is chosen from H, R 13 , OR 14 or NHR 14 ; R 13 is an organic radical having from 1 to 25 carbon atoms; R 14 is H or an organic radical having from 1 to 25 carbon atoms; and Ar 4 , Ar 5 and Ar 6 are independently aromatic moieties having from 1 to 3 aromatic rings, each of which may be unsubstituted or substituted; wherein in at least one of Ar 4 , Ar 5 and Ar 6 is substituted with hydroxyl. 8 . A method of curing an arylene oligomer comprising: disposing a composition comprising one or more curable arylene oligomers, one or more curing agents and one or more organic solvents on a substrate surface; at least partially removing the one or more organic solvents; and curing the one or more arylene oligomers in an oxygen-containing atmosphere. 9 . The method of claim 8 wherein the oxygen-containing atmosphere comprises 100 ppm or more of oxygen. 10 . The method of claim 9 wherein the oxygen-containing atmosphere is air. 11 . A method of forming a coated inorganic film comprising: providing an inorganic film; coating a layer of a composition comprising one or more curable arylene oligomers, one or more curing agents and one or more organic solvents on a surface of the inorganic film; removing the one or more organic solvents from the coating layer; curing the coating layer in an oxygen-containing atmosphere to form a coated inorganic film. 12 . The method of claim 11 further comprising disposing a protective film on the coated inorganic film. 13 . The method of claim 11 wherein the inorganic film is transparent. 14 . The method of claim 11 wherein the inorganic film is provided from a roll.
carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title
Organic materials · CPC title
Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C09D107/00 - C09D157/00, C09D161/00 take precedence); Coating compositions based on derivatives of such polymers · CPC title
Electrical insulator · CPC title
containing only carbon atoms · CPC title
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