Hydrophobic Phosphonate and Silane Chemistry

Patent metadata

Field	Value
Publication number	US-2016289458-A1
Application number	US-201615078753-A
Country	US
Kind code	A1
Filing date	Mar 23, 2016
Priority date	Apr 3, 2015
Publication date	Oct 6, 2016
Grant date	—

Abstract

Embodiments of a chemical, methods of applying a chemical, and devices with a coating of a chemical can be used to protect devices from harm, such as for example corrosion, water tensile forces, dust, and oxidation. The device can include a phosphonate-coating, a silane-coating, or both, located on a substrate. The silane-coating can include chemical formula (1), chemical formula (2), or combinations thereof; and the phosphonate-coating can include chemical formula (3):

where R 1 can be a hydrophobic group; R 3 and R 5 can be any chemical element or group; r can be a positive integer; and X and Z can each be a bond to the substrate.

First claim

What is claimed is:

1 . A device comprising:
a. a substrate; a. a phosphonate-coating located on the substrate, wherein the phosphonate-coating includes:

where:
i. each R 1 independently is a hydrophobic group;
ii. Z is a bond to the substrate;
iii. each R 5 is independently a chemical element or a group.

2 . The device of claim 1 , wherein at least one R 5 is —OCH 3 .

3 . The device of claim 1 , wherein:
b. R 5 is a phosphonate-reactive-group, R 1 , R 6 , or Z; c. the phosphonate-reactive-group is —Cl, —OR 6 , —OCOR 6 , or —OH; d. each R 6 is independently an alkyl group, an aryl group, or combinations thereof.

4 . The device of claim 1 , the hydrophobic group includes CF 3 (CF 2 ) n (CH 2 ) m , where n and m are integers within the boundaries of: 0≦n≦20 and 0≦m≦5.

5 . The device of claim 1 , further comprising a silane-coating located on the substrate, wherein the silane-coating includes chemical formula (1), chemical formula (2), or combinations thereof:

where:
i. r s a positive integer;
ii. X is a bond to the substrate;
iii. each R 3 is independently a chemical element or a group.

6 . The device of claim 5 , wherein at least one R 3 is —OCH 3 .

7 . The device of claim 5 , wherein:
a. each R 3 is independently selected from the group consisting of: a silane-reactive-group, —H, R 1 , R 6 , and X; b. each silane-reactive-group is independently selected from the group consisting of: —Cl, —OR 6 , —OCOR 6 , —N(R 6 ) 2 , and —OH; and c. each R 6 is independently an alkyl group, an aryl group, or combinations thereof.

8 . The device of claim 5 , wherein:
a. the substrate includes a plurality of protrusions, and gaps between the protrusions, extending outwards from a base-portion of the substrate; b. the silane-coating and the phosphonate-coating are conformal-coatings.

9 . The device of claim 5 , wherein:
a. the substrate includes different regions made of different materials; b. one region of the substrate includes at least three times more silane-coating than phosphonate-coating; and c. another region of the substrate includes at least three times more phosphonate-coating than silane-coating.

10 . The device of claim 5 , wherein:
a. the substrate includes different regions made of different materials; b. X is —O—Si; and c. Z is —O-Metal, where Metal s a metal atom.

11 . A phosphonate chemical including (R 1 ) i PO(R 4 ) j (R 5 ) k , where:
a. each R 1 independently is a hydrophobic group; b. i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; c. R 4 is a phosphonate-reactive-group; d. each phosphonate-reactive-group is independently selected from: —Cl, —OR 6 , —OCOR 6 , and —OH; e. each R 6 is independently an alkyl group, an aryl group, or combinations thereof; and f. each R 5 , if any, is independently any chemical element or group.

12 . The phosphonate chemical of claim 11 , wherein the phosphonate chemical has a molecular weight between 400 and 600 grams per mole.

13 . A method of applying protective chemistry to a device, the method comprising applying a phosphonate chemical onto a substrate of the device by vapor deposition, wherein the chemical includes (R 1 ) i PO(R 4 ) j (R 5 ) k , where:
a. each R 1 independently is a hydrophobic group; a. i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; b. R 4 is a phosphonate-reactive-group and each phosphonate-reactive-group is independently selected from: —Cl, —OR 6 , —OCOR 6 , and —OH; c. each R 6 is independently an alkyl group, an aryl group, or combinations thereof; and d. each R 5 , if any, is independently any chemical element or group.

14 . The method of claim 13 , wherein the phosphonate chemical has a molecular weight between 400 and 600 grams per mole.

15 . The method of claim 13 , wherein:
a. R 5 is a phosphonate-reactive-group, R 1 , R 6 , or Z; and b. the phosphonate-reactive-group is —Cl, —OR 6 , —OCOR 6 , or —OH.

16 . The method of claim 13 , further comprising exposing the device to a gas before applying the phosphonate chemical, wherein the gas includes water vapor and the water vapor has a pressure of less than 100 Torr.

17 . The method of claim 13 , further comprising baking the device after applying the phosphonate chemical, wherein baking the device occurs at a temperature between 100° C. and 320° C. for between 5 and 90 minutes.

18 . The method of claim 13 , further comprising plasma cleaning the device, at a temperature between 140° C. and 200° C., before applying the phosphonate chemical.

19 . The method of claim 13 , further comprising applying a silane chemical onto the substrate by vapor deposition, wherein the silane chemical includes Si(R 1 ) d (R 2 ) e (R 3 ) g where:
a. d is 1, 2, or 3, e is 1, 2, or 3, g is 0, 1, or 2, and d+e+g=4; b. R 2 is a silane-reactive-group; c. each silane-reactive-group is independently selected from: —Cl, —OR 6 , —OCOR 6 , —N(R 6 ) 2 , and —OH; and d. each R 3 , if any, is independently any chemical element or group.

20 . The method of claim 19 , wherein:
a. each R 3 is independently selected from the group consisting of: a silane-reactive-group, —H, R 1 , R 6 , and X; and b. each silane-reactive-group is independently selected from the group consisting of: —Cl, —OR 6 , —OCOR 6 , —N(R 6 ) 2 , and —OH.

Assignees

• Moxtek Inc

Inventors

• Linford Matt
• Diwan Anubhav
• Lane Fred

Classifications

• C09D5/08 Primary

  Anti-corrosive paints · CPC title

• C23C16/24

  Deposition of silicon only · CPC title

• C09D4/00

  Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond {; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16} · CPC title

• C23C16/30

  Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides · CPC title

• C09D5/082 Primary

  characterised by the anti-corrosive pigment · CPC title