Process for manufacturing a pyroelectric and/or piezoelectric drive

Patent metadata

Field	Value
Publication number	US-2016276569-A1
Application number	US-201415033892-A
Country	US
Kind code	A1
Filing date	Oct 27, 2014
Priority date	Nov 15, 2013
Publication date	Sep 22, 2016
Grant date	—

Abstract

A process for manufacturing a piezoelectric and/or pyroelectric device comprising a polyvinylidene fluoride film, the process comprising a step of forming at least one portion of a layer of a solution comprising a solvent and a compound comprising polyvinylidene fluoride and a step of irradiating the portion with pulses of at least one ultraviolet radiation. The irradiating step enables the formation of at least two β crystalline phases having different orientations.

First claim

1 . A method of manufacturing a piezoelectric and/or pyroelectric device comprising a film comprising poly-vinylidene fluoride and/or at least one copolymer of poly-vinylidene fluoride, the method comprising the steps of:
forming at least one portion of a layer of a solution comprising a solvent and a compound comprising poly-vinylidene fluoride and/or at least the copolymer of poly-vinylidene fluoride; and irradiating at least the portion with pulses of at least one ultraviolet radiation.

2 . The method of claim 1 , wherein the compound comprises a polymer selected from the group comprising poly-vinylidene fluoride, poly(vinylidene fluoride—trifluoro ethylene), poly(vinylidene fluoride—tetrafluoroethylene) and a mixture of at least two of these polymers.

3 . The method of claim 1 , wherein the compound further comprises ceramic particles.

4 . The method of claim 1 , wherein the duration of each pulse is in the range from 500 μs to 2 ms.

5 . The method of claim 1 , wherein the fluence of the ultraviolet radiation is in the range from 10 J/cm2 to 25 J/cm2.

6 . The method of claim 1 , wherein the solvent has an evaporation temperature in the range from 110° C. to 140° C.

7 . The method of claim 1 , wherein the solution comprises from 80% to 95% wt. of the solvent and from 5% to 20% wt. of the compound.

8 . The method of claim 1 , further comprising the steps of:
providing a substrate; depositing on the substrate a coating reflecting the ultraviolet radiation; and forming the film at least partially on the coating.

9 . The method claim 1 , wherein the solvent is capable of at least partially absorbing the ultraviolet radiation.

10 . A pyroelectric and/or piezoelectric device comprising a film comprising polyvinylidene fluoride and/or at least one copolymer of polyvinylidene fluoride and having two β crystalline phases having different directions.

11 . The device of claim 10 , comprising a substrate having the film formed thereon, made of a polymer having a glass transition temperature lower than or equal to 130° C.

Assignees

• Commissariat à l'Energie Atomique et aux Energies Alternatives
• Commissariat à I'énergie atomique et aux énergies alternatives

Inventors

• Aliane Abdelkader

Classifications

• H01L41/45

  Electricity · mapped topic

• H01L37/025 Primary

  Electricity · mapped topic

• H01L41/317

  Electricity · mapped topic

• H10N30/077

  by liquid phase deposition · CPC title

• H10N15/15 Primary

  Thermoelectric active materials · CPC title