End structure of nozzle, purging device, and load port

Patent metadata

Field	Value
Publication number	US-2016276188-A1
Application number	US-201615072823-A
Country	US
Kind code	A1
Filing date	Mar 17, 2016
Priority date	Mar 20, 2015
Publication date	Sep 22, 2016
Grant date	—

Abstract

There is provided an end structure of a nozzle 11 including a gas-flow passage 13 communicable with an opening 104 provided through a bottom of a container 100 configured to contain an object, the nozzle 11 configured so that gas is injected into or discharged from the container 100 through the gas-flow passage 13 and the opening 104 . The end structure includes a contact portion 19 provided at an upper end portion of the nozzle 11 and around the gas-flow passage 13 , and the contact portion 19 is configured to be brought into contact with a contacted portion 103 provided around the opening 104 . The contact portion 19 includes a flat portion 19 b and protruding portions 19 a and 19 c each protruding upward relative to the flat portion 19 b , and the flat portion 19 b is made of material softer than that of the protruding portions 19 a and 19 c.

First claim

What is claimed is:

1 . An end structure of a nozzle including a gas-flow passage communicable with an opening provided through a bottom of a container configured to contain an object, the nozzle being configured so that gas is injected into or discharged from the container through the gas-flow passage and the opening,
the end structure comprising a contact portion provided at an upper end portion of the nozzle and around the gas-flow passage, the contact portion being configured to be brought into contact with a contacted portion provided around the opening, the contact portion including a flat portion and a protruding portion protruding upward relative to the flat portion, the flat portion being made of material softer than that of the protruding portion.

2 . The end structure according to claim 1 , wherein the protruding portion is provided between the gas-flow passage and the flat portion.

3 . The end structure according to claim 1 , wherein the protruding portion is provided outside the flat portion.

4 . The end structure according to claim 2 , wherein the protruding portion includes a plurality of protruding portions and one of the protruding portions is provided outside the flat portion.

5 . A purging device comprising: a table configured so that a container is placed thereon; and a nozzle unit installed in the table, the purging device configured so that gas is injected into or discharged from the container through the nozzle unit,
the nozzle unit including the end structure recited in claim 1 .

6 . A load port provided adjacent to a semiconductor manufacturing device,
the load port comprising: the purging device recited in claim 5 ; and a mechanism configured to open/close a door of a container placed on the table of the purging device.

Assignees

• Sinfonia Technology Co Ltd

Inventors

• Morihana Toshimitsu
• Matsumoto Yuki
• Natsume Mitsuo

Classifications

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H01L21/67772

  Electricity · mapped topic

• H01L21/67389 Primary

  Electricity · mapped topic