Priming Material for Substrate Coating

Patent metadata

Field	Value
Publication number	US-2016276151-A1
Application number	US-201514791877-A
Country	US
Kind code	A1
Filing date	Jul 6, 2015
Priority date	Mar 16, 2015
Publication date	Sep 22, 2016
Grant date	—

Abstract

A coating technique and a priming material are provided. In an exemplary embodiment, the coating technique includes receiving a substrate and identifying a material of the substrate upon which a layer is to be formed. A priming material is dispensed on the material of the substrate, and a film-forming material is applied to the priming material. The priming material includes a molecule containing a first group based on an attribute of the substrate material and a second group based on an attribute of the film-forming material. Suitable attributes of the substrate material and the film-forming material include water affinity and degree of polarity and the first and second groups may be selected to have a water affinity or degree of polarity that corresponds to that of the substrate material and the film-forming material, respectively.

First claim

1 . A method of circuit device fabrication, the method comprising:
receiving a substrate; identifying a material of the substrate upon which a layer is to be formed; dispensing a priming material on the material of the substrate; and applying a film-forming material to the priming material, wherein the priming material includes a molecule containing a first group based on an attribute of the material and a second group based on an attribute of the film-forming material.

2 . The method of claim 1 , wherein the first group is configured to have a water affinity that corresponds to a water affinity of the material of the substrate, and wherein the second group is configured to have a water affinity that corresponds to a water affinity of the film-forming material.

3 . The method of claim 1 , wherein the first group is configured to have a degree of polarity that corresponds to a degree of polarity of the material of the substrate, and wherein the second group is configured to have a degree of polarity that corresponds to a degree of polarity of the film-forming material.

4 . The method of claim 1 , wherein at least one of the first group and the second group includes at least one of: a hydroxyl group, an amine group, an amide group, a thiol group, an ester, carboxylic acid, an anhydride group, silane, an epoxy group, a ketone, a cyano group, an isocyzno group, or an imide group.

5 . The method of claim 1 , wherein at least one of the first group and the second group includes at least one of: an alkyl group, a phenyl group, a biphenyl group, a benzyl group, an ether group, a cycloalkyl group, or an aromatic ring.

6 . The method of claim 1 , wherein a first one of the first group and the second group includes at least one of: a hydroxyl group, an amine group, an amide group, a thiol group, an ester, carboxylic acid, an anhydride group, silane, an epoxy group, a ketone, a cyano group, an isocyzno group, or an imide group, and
wherein a second one of the first group and the second group includes at least one of: an alkyl group, a phenyl group, a biphenyl group, a benzyl group, an ether group, a cycloalkyl group, or an aromatic ring.

7 . The method of claim 1 , wherein the molecule of the priming material further includes a linking structure joining the first group and the second group, and wherein the linking structure includes at least one of: an alkyl structure, an aryl structure, a heteroaryl structure, or a heterocycloalkyl structure.

8 . The method of claim 1 , wherein the dispensing of the priming material includes rotating the substrate to distribute the priming material on the material of the substrate.

9 . A method of film formation, the method comprising:
receiving a substrate having a material at a top surface of the substrate; selecting a priming material for application using a coating technique based on a property of the material of the substrate; applying the selected priming material to the material of the substrate; applying a film-forming material to the priming material; and evaporating the priming material and the film-forming material to leave a component of the film-forming material.

10 . The method of claim 9 , wherein the applying of the priming material includes rotating the substrate to disperse the priming material radially on the substrate, and wherein the applying of the film-forming material includes rotating the substrate to disperse the film-forming material radially on the substrate.

11 . The method of claim 9 , wherein the priming material includes a molecular group configured based on a water affinity of the material of the substrate.

12 . The method of claim 9 , wherein the priming material includes a molecule having at least one of: a hydroxyl group, an amine group, an amide group, a thiol group, an ester, carboxylic acid, an anhydride group, silane, an epoxy group, a ketone, a cyano group, an isocyzno group, or an imide group based on the property of the material.

13 . The method of claim 9 , wherein the priming material includes a molecule having at least one of: an alkyl group, a phenyl group, a biphenyl group, a benzyl group, an ether group, a cycloalkyl group, or an aromatic ring based on the property of the material.

14 . The method of claim 9 further comprising selecting the priming material further based on a property of the film-forming material such that the priming material includes a molecule having a first molecular group based on the property of the material of the substrate and a second molecular group based on the property of the film-forming material.

15 . A coating primer comprising:
a molecule having a first molecular group associated with a substrate material and a second molecular group associated with a film-forming material to be applied on the coating primer.

16 . The coating primer of claim 15 , wherein the first molecular group has at least one of: a water affinity or a polarity corresponding to at least one of: a water affinity of the substrate material or a polarity of the substrate material.

17 . The coating primer of claim 16 , wherein the second molecular group has at least one of: a water affinity or a polarity corresponding to at least one of: a water affinity of the film-forming material or a polarity of the film-forming material.

18 . The coating primer of claim 15 , wherein the first molecular group and the second molecular group each include at least one of: a hydroxyl group, an amine group, an amide group, a thiol group, an ester, carboxylic acid, an anhydride group, silane, an epoxy group, a ketone, a cyano group, an isocyzno group, or an imide group.

19 . The coating primer of claim 15 , wherein the first molecular group and the second molecular group each include at least one of: an alkyl group, a phenyl group, a biphenyl group, a benzyl group, an ether group, a cycloalkyl group, or an aromatic ring.

20 . The coating primer of claim 15 , wherein the molecule further includes a linking structure linking the first molecular group and the second molecular group, and wherein the linking structure includes at least one of an alkyl structure, an aryl structure, a heteroaryl structure, or a heterocycloalkyl structure.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Chen-Yu
• Chang Ching-Yu

Classifications

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• G03F7/168

  Finishing the coated layer, e.g. drying, baking, soaking · CPC title