Apparatus for fabricating oled display device and method of fabricating oled display using the apparatus

Patent metadata

Field	Value
Publication number	US-2016271633-A1
Application number	US-201514819711-A
Country	US
Kind code	A1
Filing date	Aug 6, 2015
Priority date	Mar 16, 2015
Publication date	Sep 22, 2016
Grant date	—

Abstract

An apparatus fabricating an organic light-emitting diode (OLED) display device includes a chamber, a stage in the chamber to support an array substrate, a cover plate in the chamber above the stage, and a solvent absorption plate on a first surface of the cover, the solvent absorption plate including a solvent, and the solvent absorption plate facing the stage to have the array substrate face the solvent absorption plate.

First claim

What is claimed is:

1 . An apparatus fabricating an organic light-emitting diode (OLED) display device, the apparatus comprising:
a chamber; a stage in the chamber to support an array substrate; a cover plate in the chamber above the stage; and a solvent absorption plate on a first surface of the cover, the solvent absorption plate including a solvent, and the solvent absorption plate facing the stage to have the array substrate face the solvent absorption plate.

2 . The apparatus as claimed in claim 1 , further comprising a solvent injection device to provide a stored solvent to the solvent absorption plate.

3 . The apparatus as claimed in claim 2 , wherein the solvent injection device is a roller that provides the stored solvent to the solvent absorption plate.

4 . The apparatus as claimed in claim 2 , wherein the solvent injection device is an inkjet head that ejects the stored solvent onto the solvent absorption plate through a plurality of nozzles.

5 . The apparatus as claimed in claim 2 , wherein the stored solvent is an organic solvent.

6 . The apparatus as claimed in claim 1 , further comprising:
a first sealing member contacting a first side of the stage in a lengthwise direction and a first side of the cover plate in the lengthwise direction; and a second sealing member contacting a second side of the stage in the lengthwise direction and a second side of the cover plate in the lengthwise direction.

7 . The apparatus as claimed in claim 6 , wherein the array substrate is disposed in a sealed space defined by the stage, the cover plate, and the first and second sealing members.

8 . The apparatus as claimed in claim 1 , wherein the array substrate includes a first substrate, a plurality of first electrodes on the first substrate, a pixel-defining layer exposing at least some of the first electrodes therethrough, and an organic layer covering the first electrodes exposed by the pixel-defining layer.

9 . The apparatus as claimed in claim 1 , wherein the cover plate includes a first heat transfer unit below the solvent absorption plate.

10 . A method of fabricating an OLED display device, the method comprising:
providing a solvent to a solvent absorption plate; placing an array substrate on a stage in a chamber; placing a cover plate with the solvent absorption plate in the chamber, such that the solvent absorption plate faces the array substrate; and allowing the solvent to condense onto at least part of an organic layer disposed on the array substrate.

11 . The method as claimed in claim 10 , wherein providing the solvent includes providing the solvent to the solvent absorption plate using a roller member.

12 . The method as claimed in claim 10 , wherein providing the solvent includes:
storing the solvent in an inkjet head with a plurality of nozzles; and ejecting the solvent onto the solvent absorption plate through the nozzles.

13 . The method as claimed in claim 10 , wherein allowing the solvent to condense includes:
sealing the chamber to define a sealed space with first and second sealing members, the first sealing member contacting a first side of the stage in a lengthwise direction and a first side of the cover plate in the lengthwise direction, and the second sealing member contacting a second side of the stage in the lengthwise direction and a second side of the cover plate in the lengthwise direction, and disposing the array substrate in the sealed space defined by the stage, the cover plate, and the first and second sealing members.

14 . The method as claimed in claim 10 , wherein allowing the solvent to condense includes heating the solvent absorption plate to a predetermined temperature.

15 . The method as claimed in claim 10 , further comprising drying the array substrate.

16 . A method of fabricating an OLED display device, the method comprising:
forming a first organic layer by drying an array substrate having a first organic film thereon; placing the dried array substrate on a stage in a chamber; providing a solvent to a solvent absorption plate; placing the solvent absorption plate on a cover plate; placing the cover plate with the solvent absorption plate in the chamber; forming a second organic film on the array substrate by allowing the solvent to evaporate from the solvent absorption plate; and forming a second organic layer by drying the array substrate with the second organic film formed thereon.

17 . The method as claimed in claim 16 , wherein the solvent absorption plate and the cover plate are disposed in the chamber to face each other.

18 . The method as claimed in claim 16 , wherein providing the solvent includes providing a solvent stored in a roller member to the solvent absorption plate using a roller member or ejecting a solvent stored in an inkjet head with a plurality of nozzles onto the solvent absorption plate through the nozzles.

19 . The method as claimed in claim 16 , wherein providing the solvent includes ejecting a solvent stored in a slit nozzle onto the solvent absorption plate.

20 . The method as claimed in claim 16 , wherein forming the second organic film includes allowing the solvent to evaporate from the solvent absorption plate and to condense onto at least part of the first organic layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Jang Sub

Classifications

• H10K71/441

  in the presence of solvent vapors, e.g. solvent vapour annealing · CPC title

• B05B7/1686

  involving vaporisation of the material to be sprayed or of an atomising-fluid-generating product · CPC title

• H01L51/0011

  Electricity · mapped topic

• B05B7/2491 Primary

  characterised by the means for producing or supplying the atomising fluid, e.g. air hoses, air pumps, gas containers, compressors, fans, ventilators, their drives · CPC title

• H01L51/001

  Electricity · mapped topic