Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element

Patent metadata

Field	Value
Publication number	US-2016268494-A1
Application number	US-201615165090-A
Country	US
Kind code	A1
Filing date	May 26, 2016
Priority date	Jun 6, 2012
Publication date	Sep 15, 2016
Grant date	—

Abstract

A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.

First claim

What is claimed is:

1 . A resonator element comprising:
a substrate; and an electrode that includes:
a first conductive layer on a surface of the substrate; and
a second conductive layer on the first conductive layer opposite to the substrate,
the second conductive layer including an excitation electrode region, and a pad electrode region,
the pad electrode region being electrically connected to the excitation electrode region,
the excitation electrode region of the second conductive layer being circumferentially recessed relative to an outer peripheral edge of the first conductive layer in a plan view, and
the first conductive layer being a first material and the second conductive layer being a second material, the second material being different from the first material.

2 . The resonator element according to claim 1 ,
wherein the second conductive layer further includes a lead electrode region, and the excitation electrode region and the pad electrode region are electrically connected by the lead electrode region.

3 . A resonator comprising:
the resonator element according to claim 1 ; and a package in which the resonator element is received.

4 . An electronic device comprising:
the resonator element according to claim 1 ; an electronic element; and a container in which the resonator element and the electronic element are mounted.

5 . The electronic device according to claim 4 ,
wherein the electronic element is at least one of a thermistor, a capacitor, a reactance element, and a semiconductor element.

6 . An electronic apparatus comprising the resonator element according to claim 1 .

7 . An electronic apparatus comprising the resonator according to claim 3 .

8 . An electronic apparatus comprising the electronic device according to claim 4 .

9 . A mobile body comprising the resonator element according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Fujihara Yoshitaka
• Hatanaka Kazuhisa
• Naito Matsutaro

Classifications

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H01L41/0475 Primary

  Electricity · mapped topic

• H03H3/02 Primary

  for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title

• H10N30/06

  Forming electrodes or interconnections, e.g. leads or terminals · CPC title

• H10N30/875 Primary

  Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins · CPC title