Linear inspection system
US-2015377796-A1 · Dec 31, 2015 · US
US2016266341A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016266341-A1 |
| Application number | US-201614988739-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 5, 2016 |
| Priority date | Mar 11, 2015 |
| Publication date | Sep 15, 2016 |
| Grant date | — |
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A photonic integrated circuit is provided. The photonic integrated circuit includes a substrate having a through hole interconnecting a first surface and a second surface; a transmission wire passing through the through hole and including an optical transmission structure and an electrical transmission structure; and an optical-to-electrical converter connected to the optical transmission structure of the transmission wire on the first surface.
Opening claim text (preview).
1 . A photonic integrated circuit comprising: a substrate having a through hole interconnecting a first surface and a second surface; a transmission wire passing through the through hole and including an optical transmission structure and an electrical transmission structure; and an optical-to-electrical converter connected to the optical transmission structure of the transmission wire on the first surface. 2 . The photonic integrated circuit of claim 1 , wherein: the electrical transmission structure comprises an electrical terminal at the second surface configured to receive a first electrical signal; and the optical transmission structure is configured to receive an optical signal at the second surface. 3 . The photonic integrated circuit of claim 1 , wherein the optical transmission structure extends from the first surface to the second surface within the electrical transmission structure. 4 . The photonic integrated circuit of claim 3 , wherein: the optical transmission structure includes an optical fiber; and the transmission wire further includes a reflective layer interposed between the electrical transmission structure and the optical fiber and configured to reflect an optical signal within the optical fiber. 5 . The photonic integrated circuit of claim 4 , wherein within the through hole, the electrical transmission structure does not completely surround the optical fiber. 6 . The photonic integrated circuit of claim 3 , wherein the electrical transmission structure includes a plurality of electrical transmission films electrically insulated from each other, and an insulation film formed between the electrical transmission films. 7 . The photonic integrated circuit of claim 1 , further comprising: a surface plasmon resonance (SPR) generator disposed on a surface of the transmission wire and configured to transmit an optical signal to the optical-to-electrical converter over the electrical transmission structure by a surface plasmon resonance. 8 . The photonic integrated circuit of claim 7 , wherein the SPR generator surrounds the transmission wire on the second surface. 9 . The photonic integrated circuit of claim 7 , wherein the SPR generator includes a microlens configured to refract, at a predetermined angle, the optical signal to the surface of the transmission wire. 10 . The photonic integrated circuit of claim 7 , further comprising a switch configured to alternately pass an electrical signal to the electrical transmission structure or pass an input optical signal to the SPR generator in response to a control signal. 11 . The photonic integrated circuit of claim 7 , wherein the transmission wire comprises: an internal wire; a metal layer; and an intermediate insulation layer surrounding the internal wire and disposed between the internal wire and the metal layer; wherein the SPR generator is coupled to the metal layer. 12 . The photonic integrated circuit of claim 7 , wherein the electrical transmission structure extends through the optical-to-electrical converter. 13 . The photonic integrated circuit of claim 1 , wherein: the transmission wire is referred to as a first transmission wire; the through hole is referred to as a first through hole; the substrate further comprises a second through hole; the photonic integrated circuit further comprises a second transmission wire passing through the second through hole; and the photonic integrated circuit is configured to receive power and ground through first transmission wire and the second transmission wire. 14 . A photonic integrated circuit, comprising: a substrate having a first through hole and a second through hole interconnecting a first surface and a second surface; a first transmission wire and a second transmission wire passing through the first through hole and the second through hole, respectively, the first transmission wire including an optical transmission structure and an electrical transmission structure; and an optical-to-electrical converter connected to the optical transmission structure of the first transmission wire on the first surface; wherein the first transmission wire and the second transmission wire are electrically connected or optically connected. 15 . The photonic integrated circuit of claim 14 , wherein: the second transmission wire comprises an optical transmission line disposed in the second through hole; and the optical transmission line and the optical transmission structure of the first transmission wire are optically connected. 16 . The photonic integrated circuit of claim 14 , wherein: the second transmission wire comprises an electrical transmission wire disposed in the second through hole; and the electrical transmission wire and the electrical transmission structure of the first transmission wire are electrically connected. 17 . The photonic integrated circuit of claim 14 , wherein the first transmission wire and the second transmission wire are electrically connected and optically connected. 18 . A photonic integrated circuit comprising: a first substrate having a first through hole interconnecting a first surface and a second surface of the first substrate; a second substrate stacked on the first substrate and having a second through hole interconnecting a first surface and a second surface of the second substrate; a first transmission wire passing through the first through hole and including an optical transmission structure and an electrical transmission structure; an optical-to-electrical converter connected to the optical transmission structure of the first transmission wire on the first surface; and a second transmission wire passing through the second through hole; wherein the second transmission wire is electrically connected to the electrical transmission structure. 19 . The photonic integrated circuit of claim 18 , wherein the second transmission wire comprises an optical transmission structure and an electrical transmission structure. 20 . The photonic integrated circuit of claim 18 , wherein the second transmission wire comprises: a first electrical wire; a second electrical wire; and an insulator disposed between the first electrical wire and the second electrical wire.
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