Sensor device

Patent metadata

Field	Value
Publication number	US-2016265996-A1
Application number	US-201514841411-A
Country	US
Kind code	A1
Filing date	Aug 31, 2015
Priority date	Mar 12, 2015
Publication date	Sep 15, 2016
Grant date	—

Abstract

According to one embodiment, a sensor device includes a variable capacitor including a first electrode fixed to an underlying layer, and a movable second electrode provided above the first electrode, and a stacked structure including a plurality of layers and having a connection connected to the second electrode, the stacked structure covering the variable capacitor and forming a cavity therein, wherein a predetermined layer included in the plurality of layers is not provided in a first area that includes at least part of the connection.

First claim

What is claimed is:

1 . A sensor device comprising:
a variable capacitor including a first electrode fixed to an underlying layer, and a movable second electrode provided above the first electrode; and a stacked structure including a plurality of layers and having a connection connected to the second electrode, the stacked structure covering the variable capacitor and forming a cavity therein, wherein a predetermined layer included in the plurality of layers is not provided in a first area that includes at least part of the connection.

2 . The sensor device of claim 1 , wherein the predetermined layer is formed of a material having a high coefficient of thermal expansion.

3 . The sensor device of claim 1 , wherein the predetermined layer is formed of an organic material.

4 . The sensor device of claim 3 , wherein the organic material includes polyimide.

5 . The sensor device of claim 1 , wherein the predetermined layer is a coated layer.

6 . The sensor device of claim 1 , wherein a lowermost layer included in the plurality of layers has a depression at the connection.

7 . The sensor device of claim 1 , wherein a lowermost layer included in the plurality of layers has a hole.

8 . The sensor device of claim 7 , wherein the predetermined layer fills the hole.

9 . The sensor device of claim 7 , wherein the hole is positioned above the second electrode.

10 . The sensor device of claim 1 , wherein a lowermost layer included in the plurality of layers is formed of an inorganic substance.

11 . The sensor device of claim 1 , wherein an uppermost layer included in the plurality of layers is formed of an inorganic substance.

12 . The sensor device of claim 1 , wherein the plurality of layers include
a lowermost layer and an uppermost layer, and the predetermined layer is located between the lowermost and uppermost layers.

13 . The sensor device of claim 12 , wherein the plurality of layers further include an auxiliary layer located between the lowermost and uppermost layers in the first area, and located between the predetermined and uppermost layers in an area other than the first area.

14 . The sensor device of claim 13 , wherein the lowermost layer has a depression at the connection, and the auxiliary layer fills the depression.

15 . The sensor device of claim 13 , wherein the auxiliary layer is a coated layer.

16 . The sensor device of claim 1 , wherein the first area includes an entire area in which the connection is provided.

17 . The sensor device of claim 1 , wherein the sensor device functions as a pressure sensor.

18 . The sensor device of claim 17 , wherein the stacked structure functions as a pressure sensing portion.

Assignees

• Toshiba Kk

Inventors

• Hayashi Yumi

Classifications

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• G01L19/04

  Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} · CPC title