Measuring probe

Patent metadata

Field	Value
Publication number	US-2016258733-A1
Application number	US-201514789283-A
Country	US
Kind code	A1
Filing date	Jul 1, 2015
Priority date	Mar 5, 2015
Publication date	Sep 8, 2016
Grant date	—

Abstract

A measuring probe includes a stylus having a contact part to be in contact with an object to be measured, an axial motion mechanism having a moving member that allows the contact part to move in an axial direction, and a rotary motion mechanism having a rotating member that allows the contact part to move along a plane perpendicular to the axial direction by means of rotary motion. The measuring probe includes a probe main body that incorporates the axial motion mechanism, and a probe module that is supported by the probe main body, incorporates the rotary motion mechanism, and supports the stylus. The probe main body and the probe module are detachably coupled to each other with a pair of rollers and a ball capable of positioning to each other. This allows adequate detection sensitivity and a restoring force suitable for the stylus to be obtained at a low cost.

First claim

What is claimed is:

1 . A measuring probe including a stylus having a contact part to be in contact with an object to be measured, an axial motion mechanism having a moving member that allows the contact part to move in an axial direction, and a rotary motion mechanism having a rotating member that allows the contact part to move along a plane perpendicular to the axial direction by means of rotary motion, the measuring probe comprising
a probe main body that incorporates one of the axial motion mechanism and the rotary motion mechanism, and a probe module that is supported by the probe main body, incorporates the other one of the axial motion mechanism and the rotary motion mechanism, and supports the stylus, wherein the probe main body and the probe module are detachably coupled to each other with a first engagement part capable of positioning to each other.

2 . The measuring probe according to claim 1 , wherein
the axial motion mechanism is incorporated in the probe main body, and the rotary motion mechanism is incorporated in the probe module.

3 . The measuring probe according to claim 2 , wherein
a plurality of the probe modules are prepared for the single probe main body, and a different restoring force per unit displacement when the rotating member is displaced is set for each of the plurality of probe modules.

4 . The measuring probe according to claim 2 , wherein
the rotating member includes a balancing member on a side opposite to the stylus with respect to a rotation center of the rotary motion mechanism, and a distance between the rotation center and the balancing member is adjustable.

5 . The measuring probe according to claim 4 , wherein
a plurality of the probe modules are prepared for the single probe main body, and a different distance between the rotation center and the balancing member is set for each of the plurality of probe modules.

6 . The measuring probe according to claim 2 , wherein
a plurality of the probe modules are prepared for the single probe main body, the rotating member includes a balancing member on a side opposite to the stylus with respect to a rotation center of the rotary motion mechanism, and different mass of the balancing member is set for each of the plurality of probe modules.

7 . The measuring probe according to claim 2 , wherein the probe module includes
a balance weight corresponding to mass of the stylus, and a counterbalance mechanism supported by an axial element housing member for supporting the axial motion mechanism, the counterbalance mechanism keeping the stylus and the balance weight in balance.

8 . The measuring probe according to claim 7 , wherein
a plurality of the probe modules are prepared for the single probe main body, and different mass of the balance weight is set for each of the plurality of probe modules.

9 . The measuring probe according to claim 1 , wherein
the axial motion mechanism is incorporated in the probe module, and the rotary motion mechanism is incorporated in the probe main body.

10 . The measuring probe according to claim 9 , wherein
a plurality of the probe modules are prepared for the single probe main body, and a different restoring force per unit displacement when the moving member is displaced is set for each of the plurality of probe modules.

11 . The measuring probe according to claim 1 , comprising an axial element housing member that supports the axial motion mechanism, and wherein
the axial element housing member is provided with a displacement detector for detecting displacement of the moving member.

12 . The measuring probe according to claim 11 , wherein the displacement detector outputs a relative position detection signal that allows detection of a relative position of the moving member.

13 . The measuring probe according to claim 11 , wherein the displacement detector outputs an absolute position detection signal that allows detection of an absolute position of the moving member.

14 . The measuring probe according to claim 11 , wherein
the axial element housing member is provided with an interference optical system including an interference light source, a reference mirror for reflecting light from the interference light source, and a target mirror disposed in the moving member for reflecting light from the interference light source, the interference optical system capable of causing interference of reflected light from the reference mirror and the target mirror to generate a plurality of interference fringes, and the displacement detector can detect a phase shift of the plurality of interference fringes generated in the interference optical system.

15 . The measuring probe according to claim 1 , comprising a preceding module that detachably couples and supports the probe main body with a second engagement part capable of positioning the probe main body, and wherein
a reference member is provided on an opposite end to the stylus of a member directly supporting the stylus, and an orientation detector for detecting displacement of the reference member corresponding to a rotary movement of the stylus is incorporated in the preceding module.

16 . The measuring probe according to claim 1 , wherein a reference member is provided on an opposite end to the stylus of a member directly supporting the stylus, and
an orientation detector for detecting displacement of the reference member corresponding to a rotary movement of the stylus is incorporated in the probe main body.

17 . The measuring probe according to claim 16 , wherein
the axial motion mechanism includes a plurality of first diaphragm structures that allow the moving member to be displaced, and the orientation detector is disposed between the rotary motion mechanism and the plurality of first diaphragm structures when the axial motion mechanism is incorporated in the probe main body and the rotary motion mechanism is incorporated in the probe module.

18 . The measuring probe according to claim 15 , wherein
the reference member is a reflecting mirror for reflecting light, the measuring probe includes a light source for causing light to be incident on the reflecting mirror along an optical axis, and the orientation detector detects displacement of reflected light, reflected from the reflecting mirror, from the optical axis.

19 . The measuring probe according to claim 18 , wherein the optical axis is provided so as to pass through the rotation center of the rotary motion mechanism.

20 . The measuring probe according to claim 1 , wherein the axial motion mechanism includes a plurality of first diaphragm structures that allow the moving member to be displaced, and
the measuring probe comprises a first limiting member for limiting an amount of deformation in the plurality of first diaphragm structures within a range of elastic deformation.

21 . The measuring probe according to claim 1 , wherein the rotary motion mechanism includes a second diaphragm structure that allows the rotating member to be displaced, and
the measuring probe comprises a second limiting member for limiting an amount of deformation in the second diaphragm structure within a range of elastic deformation.

22 . The measuring probe according to claim 1 , wherein at least part of a gap between a first wall member, which is disposed so as to face the moving member and to be integral with the axial element housing member for supporting the axial motion mechanism, and the

Assignees

• Mitutoyo Corp

Inventors

• Shimaoka Atsushi
• Miyazaki Tomoyuki
• Hidaka Kazuhiko

Classifications

• G01B5/20

  for measuring contours or curvatures · CPC title

• G01B3/008 Primary

  Arrangements for controlling the measuring force · CPC title

• G01B5/012

  Contact-making feeler heads therefor · CPC title

• G01B11/007

  feeler heads therefor · CPC title

• G01B5/0016

  due to weight (on machine tools B23Q11/001) · CPC title