Evacuation of a Film Chamber

Patent metadata

Field	Value
Publication number	US-2016258448-A1
Application number	US-201415023087-A
Country	US
Kind code	A1
Filing date	Sep 15, 2014
Priority date	Sep 26, 2013
Publication date	Sep 8, 2016
Grant date	—

Abstract

A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

First claim

1 . A device for evacuating a film chamber, comprising: a pump system that comprises at least two vacuum pumps configured to evacuate the film chamber alternately, wherein a suction capacity of the first vacuum pump is greater than that of the second vacuum pump, and wherein a final pressure achievable by the second vacuum pump is less than that of the first vacuum pump.

2 . The device of claim 1 , wherein each of the two vacuum pumps is connected with the film chamber via a separate pipeline.

3 . The device of claim 1 , wherein the two vacuum pumps are connected with the film chamber via a common pipeline.

4 . The device of claim 1 , wherein the pump system has a valve with at least three ports, of which
a first port is connected with the first vacuum pump, a second port is connected with the second vacuum pump, and a third port is connected with the film chamber, wherein a first switching position of the value connects the first port with the third port, and a second switching position of the value connects second port with the third port.

5 . The device of claim 4 , wherein the valve is a 3/2-way valve.

6 . The device of claim 1 , wherein a pipeline connecting the film chamber and the second vacuum pump is connected with a buffer chamber.

7 . The device of claim 6 , wherein the buffer chamber has a volume in the range of six to fifteen times the volume of the film chamber.

8 . The device of claim 1 , wherein the suction capacity of the first vacuum pump is higher than an initial volume of the film chamber, and the final pressure achievable by the first vacuum pump is higher than 50 mbar.

9 . The device of claim 1 , wherein the suction capacity of the second vacuum pump is less than a pre-evacuated residual volume of the film chamber, and the final pressure achievable by the second vacuum pump is less than 50 mbar.

10 . The device of claim 1 , wherein the first vacuum pump comprises one or a plurality of jet pumps.

11 . The device of claim 1 , wherein at least one of the two vacuum pumps comprises a pipeline connecting the pump with the film chamber and comprising a stop valve.

12 . A method for evacuating a film chamber, comprising: alternatively evacuating the film chamber by a first vacuum pump and a second vacuum pump, wherein a suction capacity of the first vacuum pump is greater than that of the second vacuum pump, and wherein a final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

13 . The method of claim 12 , further comprising, prior to the evacuation by the second vacuum pump, evacuating by the second vacuum pump a buffer chamber arranged between the second vacuum pump and the second port.

14 . The method of claim 12 , further comprising: prior to the evacuation by the first vacuum pump, switching a valve to a first switching position, and wherein the valve is switched to the second switching position prior to the evacuation by the second vacuum pump.

Assignees

• Inficon Gmbh

Inventors

• Decker Silvio
• Dauenhauer Michael
• Wetzig Daniel
• Bruhns Hjalmar

Classifications

• F04F5/44

  Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42 · CPC title

• G01M3/229

  removably mounted in a test cell · CPC title

• F04F5/22

  of multi-stage type · CPC title

• F04F5/54 Primary

  Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type · CPC title

• G01M3/205 Primary

  Accessories or associated equipment; Pump constructions · CPC title