Mask stack and method of controlling the same

Patent metadata

Field	Value
Publication number	US-2016258050-A1
Application number	US-201514815809-A
Country	US
Kind code	A1
Filing date	Jul 31, 2015
Priority date	Mar 3, 2015
Publication date	Sep 8, 2016
Grant date	—

Abstract

A mask stack and a method of controlling the mask stack are disclosed. In one aspect, the method includes installing, in the mask stack, a first cassette comprising masks that have not been used in a deposition process and a second cassette comprising an accommodation space which is empty. The method also includes using, in the deposition process, at least one mask from the masks included in the first cassette. The method further includes inserting, into the accommodation space of the second cassette, the at least one mask used in the deposition process.

First claim

What is claimed is:

1 . A method of controlling a mask stack, the method comprising:
installing, in the mask stack, a first cassette comprising masks that have not been used in a deposition process and a second cassette comprising an accommodation space which is empty; using, in the deposition process, at least one mask from the masks included in the first cassette; and inserting, into the accommodation space of the second cassette, the at least one mask used in the deposition process.

2 . The method of claim 1 , further comprising, once all the masks included in the first cassette are transported to and inserted into the second cassette, removing the first and second cassettes from the mask stack.

3 . The method of claim 2 , further comprising reinstalling, in the mask stack, the first and second cassettes, wherein, when reinstalled, the first cassette comprises an accommodation space which is empty and the second cassette comprises masks that have not been used in a deposition process.

4 . The method of claim 2 , further comprising, after the removing, installing, in the mask stack, a third cassette comprising masks that have not been used in a deposition process and a fourth cassette having an accommodation space which is empty.

5 . The method of claim 1 , wherein the first and second cassettes are substantially vertical, when placed in the mask stack.

6 . The method of claim 1 , wherein the first and second cassettes are substantially horizontal, when placed in the mask stack.

7 . The method of claim 1 , wherein each of the first and second cassettes comprises a plurality of cassettes.

8 . The method of claim 7 , further comprising:
placing the first cassettes substantially vertical in the mask stack; and placing the second cassettes substantially horizontal in the mask stack.

9 . The method of claim 8 , further comprising placing the first cassettes between the second cassettes.

10 . A mask stack comprising:
a first cassette configured to receive masks that have not been used in a deposition process; and a second cassette configured to receive masks that have been used in a deposition process.

11 . The mask stack of claim 10 , wherein the first and second cassettes are substantially vertical, when placed in the mask stack.

12 . The mask stack of claim 10 , wherein the first and second cassettes are substantially horizontal, when placed in the mask stack.

13 . The mask stack of claim 10 , wherein each of the first and second cassettes comprises a plurality of cassettes.

14 . The mask stack of claim 13 , wherein the first cassettes are substantially vertical, when placed in the mask stack, and wherein the second cassettes are substantially horizontal, when placed in the mask stack.

15 . The mask stack of claim 14 , wherein the first cassettes are interposed between the second cassettes.

16 . A method of controlling a mask stack, the method comprising:
loading masks that have not been used in a deposition process only into a first cassette of the mask stack; and loading masks that have already been used in the deposition process only into a second cassette of the mask stack separated from the first cassette.

17 . The method of claim 16 , wherein each of the first and second cassettes comprises a plurality of cassettes.

18 . The method of claim 17 , further comprising:
placing the first cassettes substantially vertical with respect to each other in the mask stack; and placing the second cassettes substantially horizontal with respect to each other in the mask stack.

19 . The method of claim 18 , further comprising placing the first cassettes between the second cassettes.

20 . The method of claim 19 , wherein the same number of second cassettes are placed on opposite sides of the first cassettes.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Yongsuk
• Shin Jongpyo
• Cho Sunglae
• Choi Jinok

Classifications

• C23C14/042 Primary

  using masks · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title