Laser annealing device, production process of polycrystalline silicon thin film, and polycrystalline silicon thin film produced by the same

Patent metadata

Field	Value
Publication number	US-2016254151-A1
Application number	US-201414761998-A
Country	US
Kind code	A1
Filing date	Dec 29, 2014
Priority date	Mar 17, 2014
Publication date	Sep 1, 2016
Grant date	—

Abstract

The invention relates to the field of laser annealing, and discloses a laser annealing device, a production process of a polycrystalline silicon thin film, and a polycrystalline silicon thin film produced by the same. The laser annealing device comprises an annealing chamber, in which a laser generator is provided, wherein an annealing window, through which the laser passes, and two light-cutting plates oppositely provided above the annealing window are also provided in the annealing chamber, wherein the light-cutting end face of each of the light-cutting plates is a wedge-shaped end face. In technical solutions of the invention, since the light-cutting end face is a wedge-shaped end face, the included angle formed by the reflected beam, which is formed by the reflection of the incident beam arriving at the light-cutting end face, and the ingoing beam, which passes through the annealing window, is relatively large, and the vibrating directions of them differ relatively greatly. Hence, the phenomenon of interference will hardly occur, and thus the interference mura generated on the polycrystalline silicon thin film due to the interference is reduced, the quality of the polycrystalline silicon thin film is improved, and the percent of pass of the product is also increased.

First claim

1 . A laser annealing device comprising an annealing chamber, in which a laser generator is provided, wherein
an annealing window, through which the laser passes, and two light-cutting plates oppositely provided above the annealing window are also provided in the annealing chamber, wherein a light-cutting end face of each of the light-cutting plates is a wedge-shaped end face.

2 . The laser annealing device as claimed in claim 1 , wherein the wedge-shaped end face is two planes forming an included angle.

3 . The laser annealing device as claimed in claim 2 , wherein the upper plane in the two planes forming an included angle and the plane, in which the annealing window lies, form an included angle of 40 to 50 degrees.

4 . The laser annealing device as claimed in claim 1 , wherein the wedge-shaped end face is a semicylinder, a semielliptic cylinder or a parabolic cylinder.

5 . The laser annealing device as claimed in claim 1 , wherein the laser generator is an excimer laser.

6 . The laser annealing device as claimed in claim 5 , wherein the excimer laser is a xenon chloride excimer laser, a krypton fluoride excimer laser or an argon fluoride excimer laser.

7 . The laser annealing device as claimed in claim 1 , wherein the laser annealing device further comprises a supporter, which is positioned at the bottom of the annealing chamber, for supporting a substrate.

8 . A production process of a polycrystalline silicon thin film, wherein the production process comprises
forming an amorphous silicon thin film on a substrate; and subjecting the amorphous silicon thin film to laser annealing with the laser annealing device as claimed in claim 1 , so as to form a polycrystalline silicon thin film.

9 . A production process as claimed in claim 8 , wherein during the laser annealing, the impulse frequency of the laser is 500 Hz, the overlap ratio is 92% to 98%, the scanning speed of the laser is 4 mm/s to 16 mm/s, and the energy density of the laser is 300 to 500 mJ/cm 2 .

10 . A polycrystalline silicon thin film, wherein the polycrystalline silicon thin film is produced by the production process as claimed in claim 8 .

Assignees

• Boe Technology Group Co Ltd

Inventors

• Tian Xueyan

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P34/42

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H10P14/3814

  Continuous wave laser beam · CPC title

• H10P14/3812

  Shape of mask · CPC title

• H10P14/3808

  using laser beams · CPC title