Frequency-Characteristics Measurement Method and Positioning Control Device

Patent metadata

Field	Value
Publication number	US-2016246305-A1
Application number	US-201315025945-A
Country	US
Kind code	A1
Filing date	Nov 15, 2013
Priority date	Nov 15, 2013
Publication date	Aug 25, 2016
Grant date	—

Abstract

A sinusoidal signal that is frequency-swept so as to have a frequency region in which each frequency has a different number of cycles and/or application duration is applied to a control system in a movement device that moves a movement target, time-series data for transmission characteristics obtained from said control system as a result of the application of the aforementioned sinusoidal signal is acquired, and said time-series data is subjected to spectral analysis. This allows the provision of a positioning control device and a frequency-characteristics measurement method that make it possible to optimize measuring precision while minimizing increases in the amount of time it takes to measure frequency characteristics.

First claim

1 . A positioning control device comprising:
a signal applying unit configured to apply a sinusoidal signal to a control system in a movement device that moves an object to be moved, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency; a time-series data acquisition unit configured to acquire time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal; and a spectrum analyzing unit configured to perform spectral analysis to the time-series data.

2 . The positioning control device according to claim 1 ,
wherein the signal applying unit performs a frequency-sweep so as to have at least one frequency region in which a cycle number of the sinusoidal signal is constant and at least one frequency region in which the cycle number of the sinusoidal signal is different at each frequency.

3 . The positioning control device according to claim 2 ,
wherein the cycle number in the frequency region in which the cycle number of the sinusoidal signal is constant, is settable by an operator.

4 . The positioning control device according to claim 2 ,
wherein the cycle number in the frequency region in which the cycle number of the sinusoidal signal is constant, is determined based on frequency-sweep time of the sine wave applying unit that has been previously determined.

5 . The positioning control device according to claim 1 ,
wherein the signal applying unit performs a frequency-sweep so as to have at least one frequency region in which the applying duration of the sinusoidal signal is constant and at least one frequency region in which the applying duration of the sinusoidal signal is different at each frequency.

6 . The positioning control device according to claim 5 , wherein the applying duration in the frequency region in which the applying duration of the sinusoidal signal is constant, is settable by an operator.

7 . The positioning control device according to claim 5 ,
wherein the applying duration in the frequency region in which the applying duration of the sinusoidal signal is constant, is determined based on frequency sweep time of the sine wave applying unit that has been previously determined.

8 . The positioning control device according to claim 1 ,
wherein the cycle number or the applying duration in the frequency region in which at least one of the cycle number and the applying duration of the sinusoidal signal to be applied to the control system is different at each frequency, is determined based on an indicator or a measurement error.

9 . The positioning control device according to claim 8 ,
wherein the indicator of a measurement error is acquired from discretization noise in frequency response characteristics of the sinusoidal signal.

10 . The positioning control device according to claim 1 , comprising a display unit configured to display the cycle number or the duration of the sinusoidal signal at each frequency.

11 . A component mounting device comprising the positioning control device of claim 1 .

12 . A semiconductor manufacturing inspection device comprising the positioning control device of claim 1 .

13 . A substrate processing device comprising the positioning control device of claim 1 .

14 . A frequency-characteristics measurement method comprising:
a step of applying a sinusoidal signal to a control system in a movement device that moves an object to be moved, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency; a step of acquiring time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal; and a step of performing spectral analysis to the time-series data.

15 . The frequency-characteristics measurement method according to claim 14 ,
wherein the frequency-sweep is performed so as to have at least one frequency region in which the cycle number of the sinusoidal signal is constant and at least one frequency region in which the cycle number of the sinusoidal signal is different at each frequency.

16 . The frequency-characteristics measurement method of claim 15 ,
wherein the cycle number in the frequency region in which the cycle number of the sinusoidal signal is constant, is determined based on time of the frequency-sweep that has previously determined.

17 . The frequency-characteristics measurement method of claim 14 ,
wherein the frequency-sweep is performed so as to have at least one frequency region in which the applying duration of the sinusoidal signal is constant and at least one frequency region in which the applying duration of the sinusoidal signal is different at each frequency.

18 . The positioning control device of claim 17 ,
wherein the applying duration in the frequency region in which the applying duration of the sinusoidal signal is constant, is determined based on time of the frequency-sweep that has been previously determined.

19 . The frequency-characteristics measurement method of claim 14 ,
wherein the cycle number or the applying duration in the frequency region in which at least one of the cycle number and the applying duration of the sinusoidal signal to be applied to the control system is different at each frequency, is determined based on an indicator of a measurement error.

20 . The frequency-characteristics measurement method of claim 19 ,
wherein the indicator of a measurement error is acquired from discretization noise in frequency response characteristics of the sinusoidal signal.

Assignees

• Hitachi Ltd

Inventors

• Odai Masaki
• Momoi Yasuyuki
• Ogawa Hironori

Classifications

• G01R23/20

  Measurement of non-linear distortion · CPC title

• G05D3/12 Primary

  using feedback · CPC title

• G05B15/02

  electric · CPC title

• G05B2219/37597

  Spectrum analyser · CPC title

• G05B2219/37534

  Frequency analysis · CPC title