Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US2016246289A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016246289-A1 |
| Application number | US-201615142179-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 29, 2016 |
| Priority date | Nov 5, 2013 |
| Publication date | Aug 25, 2016 |
| Grant date | — |
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Official abstract text for this publication.
A servo system includes a motor having a stator and a movable element which moves relative to the stator, an encoder which detects at least one of a position and a speed of the movable element of the motor, and a controller including first circuitry which controls operation of the motor based on a detection result of the encoder. The first circuitry of the controller transmits a first command signal that changes a communication speed between the encoder and the controller from a first speed to a second speed which is higher than the first speed, and the encoder includes second circuitry which changes the communication speed between the encoder and the controller to the second speed when the first command signal is received from the controller.
Opening claim text (preview).
1 . A servo system, comprising: a motor comprising a stator and a movable element configured to move relative to the stator; an encoder configured to detect at least one of a position and a speed of the movable element of the motor; and a controller comprising first circuitry configured to control operation of the motor based on a detection result of the encoder, wherein the first circuitry of the controller is configured to transmit a first command signal that changes a communication speed between the encoder and the controller from a first speed to a second speed which is higher than the first speed, and the encoder comprises second circuitry configured to change the communication speed between the encoder and the controller to the second speed when the first command signal is received from the controller. 2 . The servo system according to claim 1 , wherein the second circuitry of the encoder is configured to transmit a first response signal to the controller when the first command signal is received and when the communication speed between the encoder and the controller is available to be set to the second speed, and to change the communication speed between the encoder and the controller to the second speed when the encoder transmits the first response signal to the controller. 3 . The servo system according to claim 2 , wherein the second circuitry of the encoder is configured to change the communication speed between the encoder and the controller to the second speed after at least a first period elapses from reception of the first command signal when the encoder transmits the first response signal to the controller. 4 . The servo system according to claim 3 , wherein the second circuitry of the encoder is configured to determine whether the encoder receives a signal from the controller before the first period elapses, and not to change the communication speed between the encoder and the controller to the second speed when the circuitry of the encoder determines that the encoder receives a signal from the controller. 5 . The servo system according to claim 4 , wherein the first circuitry of the controller is configured to change the communication speed between the controller and the encoder to the second speed after at least a second period which is longer than the first period elapses from a point of time at which the controller transmits the first command signal when the first response signal is received. 6 . The servo system according to claim 5 , wherein the first circuitry of the controller is configured to transmit a second command signal that confirms whether the encoder has changed the communication speed between the encoder and the controller to the second speed after the controller changes the communication speed between the controller and the encoder to the second speed, and the second circuitry of the encoder is configured to transmit a second response signal to the controller when the communication speed between the encoder and the controller is set to the second speed when the second command signal is changed. 7 . The servo system according to claim 1 , wherein the first circuitry of the controller is configured to set a plurality of parameters including the second speed, and the second circuitry of the encoder is configured to change the communication speed between the encoder and the controller to the second speed of the parameters included in the first command signal. 8 . The servo system according to claim 1 , wherein the second circuitry of the encoder is configured to initialize the communication speed between the encoder and the controller to the first speed when a power source of the encoder is interrupted. 9 . The servo system according to claim 2 , wherein the first circuitry of the controller is configured to set a plurality of parameters including the second speed, and the second circuitry of the encoder is configured to change the communication speed between the encoder and the controller to the second speed of the parameters included in the first command signal. 10 . The servo system according to claim 3 , wherein the first circuitry of the controller is configured to set a plurality of parameters including the second speed, and the second circuitry of the encoder is configured to change the communication speed between the encoder and the controller to the second speed of the parameters included in the first command signal. 11 . An encoder device for a servo system, comprising: first circuitry configured to change a communication speed from a first speed to a second speed between the first circuitry and a controller which controls operation of a motor based on a detection result of the first circuitry, when a first command signal is received from the controller, wherein the controller comprises second circuitry configured to transmit the first command signal that changes the communication speed between the first circuitry and the controller from the first speed to the second speed which is higher than the first speed. 12 . The encoder according to claim 11 , wherein the first circuitry is configured to transmit a first response signal to the controller when the first command signal is received and when the communication speed between the first circuitry and the controller is available to be set to the second speed, and to change the communication speed between the first circuitry and the controller to the second speed when the first circuitry transmits the first response signal to the controller. 13 . The encoder according to claim 12 , wherein the first circuitry is configured to change the communication speed between the first circuitry and the controller to the second speed after at least a first period elapses from reception of the first command signal when the first circuitry transmits the first response signal to the controller. 14 . The encoder according to claim 13 , wherein the first circuitry is configured to determine whether the circuitry receives a signal from the controller before the first period elapses, and not to change the communication speed between the first circuitry and the controller to the second speed when the first circuitry determines that the first circuitry receives the signal from the controller. 15 . The encoder according to claim 14 , wherein the second circuitry of the controller is configured to change the communication speed between the controller and the first circuitry to the second speed after at least a second period which is longer than the first period elapses from a point of time at which the controller transmits the first command signal when the first response signal is received. 16 . The encoder according to claim 15 , wherein the second circuitry of the controller is configured to transmit a second command signal that confirms whether the first circuitry has changed the communication speed between the first circuitry and the controller to the second speed after the controller changes the communication speed between the controller and the first circuitry to the second speed, and the first circuitry is configured to transmit a second response signal to the controller when the communication speed between the first circuitry and the controller is set to the second speed when the second command signal is changed. 17 . The encoder according to claim 11 , wherein the second circuitry of the controller is configured to set a plurality of parameters including the second speed, and the first circuitry is configured to change the communication speed between the first circuitry and the controller to the seco
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