Gas laser oscillation apparatus of orthogonal excitation type

Patent metadata

Field	Value
Publication number	US-2016240992-A1
Application number	US-201415028775-A
Country	US
Kind code	A1
Filing date	May 27, 2014
Priority date	Dec 17, 2013
Publication date	Aug 18, 2016
Grant date	—

Abstract

A gas laser oscillation apparatus of orthogonal excitation type includes an electric discharge region having a pair of electric discharge electrodes, an axial flow blower having a plurality of rotor vanes and working by a permanent magnet motor, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to an optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a gas duct having a gas passageway and arranged between the electric discharge region and the first heat exchanger, the axial flow blower being arranged on the gas passageway. The axial flow blower is arranged on a windward side of the first heat exchanger. The second heat exchanger is arranged on a windward side of the axial flow blower.

First claim

1 . A gas laser oscillation apparatus of orthogonal excitation type,
the apparatus comprising; an electric discharge region having a pair of electric discharge electrodes, an axial flow blower having a stationary vane disposed between two rotor vanes and working by a motor, the motor fixed to a casing by the stationary vane, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to an optical axis, a gas duct having a gas passageway and arranged between the electric discharge region and the first heat exchanger, the axial flow blower being arranged on the gas passageway, wherein the axial flow blower is arranged on a windward side of the first heat exchanger.

2 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 1 ,
the apparatus further comprising; a second heat exchanger having a plurality of cooling fins, the fins arranged on a plane perpendicular to an optical axis, wherein the second heat exchanger is arranged on a windward side of the axial flow blower.

3 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 2 ,
wherein the first heat exchanger and the second heat exchanger are arranged in a direction parallel to an electric discharge direction of the electric discharge region.

4 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 2 ,
wherein the first heat exchanger and the second heat exchanger are arranged in a direction perpendicular to an electric discharge direction of the electric discharge region.

5 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 1 ,
wherein the motor has permanent magnets embedded in a rotor.

6 . A gas laser oscillation apparatus of orthogonal excitation type,
the apparatus comprising; a first electric discharge region having a pair of electric discharge electrodes, a second electric discharge region having a pair of electric discharge electrodes and sharing an optical axis with the first electric discharge region, a first axial flow blower having a plurality of first stationary vane disposed between two rotor vanes and working by a first motor, the first motor fixed to a casing by the first stationary vane, a second axial flow blower having a second stationary vane disposed between two rotor vanes and working by a second motor, the second motor fixed to a casing by the second stationary vane, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a first gas duct having a first gas passageway and arranged between the first electric discharge region and the first heat exchanger, the first axial flow blower being arranged on the first gas passageway, a second gas duct having a second gas passageway and arranged between the second electric discharge region and the second heat exchanger, the second axial flow blower being arranged on the second gas passageway, wherein the first gas duct includes, on the first gas passageway, the second heat exchanger on a windward side of the first axial flow blower and; the second gas duct includes, on the second gas passageway, the first heat exchanger on a windward side of the second axial flow blower.

7 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 6 ,
wherein the first heat exchanger has a first header pipe and a first bend pipe at both ends of the exchanger; the second heat exchanger has a second header pipe and a second bend pipe at both ends of the exchanger; and a direction toward the first bend pipe from the first header pipe is opposing to a direction toward the second bend pipe from the second header pipe.

8 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 6 ,
wherein the first heat exchanger has a first header pipe and a first bend pipe at both ends of the exchanger; the second heat exchanger has a second header pipe and a second bend pipe at both ends of the exchanger; and a direction toward the first bend pipe from the first header pipe is the same with a direction toward the second bend pipe from the second header pipe.

9 . A gas laser oscillation apparatus of orthogonal excitation type,
the apparatus comprising; a first electric discharge region having a pair of electric discharge electrodes, a second electric discharge region having a pair of electric discharge electrodes and sharing an optical axis with the first electric discharge region, a first axial flow blower having a first stationary vane disposed between two rotor vanes and working by a first motor, the first motor fixed to a casing by the first stationary vane, a second axial flow blower having a second stationary vane disposed between two rotor vanes and working by a second motor, the second motor fixed to a casing by the second stationary vane, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a third heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a fourth heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a first gas duct having a first gas passageway and arranged between the first electric discharge region and the first heat exchanger, the first axial flow blower and the second heat exchanger being arranged on the first gas passageway, a second gas duct having a second gas passageway and arranged between the second electric discharge region and the second heat exchanger, the second axial flow blower and the fourth heat exchanger being arranged on the second gas passageway, wherein the second heat exchanger is arranged on a windward side of the first axial flow blower; and the fourth heat exchanger is arranged on a windward side of the second axial flow blower.

10 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 1 ,
wherein the first heat exchanger has a pipe inserted perpendicularly to the plurality of cooling fins, the pipe through which coolant is supplied, and the first heat exchanger is arranged in a direction parallel to the two rotor vanes of the axial flow blower.

11 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 2 ,
wherein the motor has permanent magnets embedded in a rotor.

12 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 3 ,
wherein the motor has permanent magnets embedded in a rotor.

13 . The gas laser oscillation apparatus of orthogonal excitation type as set forth in claim 4 ,
wherein the motor has permanent magnets embedded in a rotor.

Assignees

• Mitsubishi Electric Corp

Inventors

• Funaoka Kouji
• Matsumoto Yasunari

Classifications

• H01S3/0326

  by an electromagnetic field · CPC title

• H01S3/041 Primary

  for gas lasers {(H01S3/0401 takes precedence)} · CPC title

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/038

  Electrodes, e.g. special shape, configuration or composition · CPC title

• H01S3/2232

  Carbon dioxide (CO2) or monoxide [CO] · CPC title