Abrasive grindstone

Patent metadata

Field	Value
Publication number	US-2016236325-A1
Application number	US-201615042556-A
Country	US
Kind code	A1
Filing date	Feb 12, 2016
Priority date	Feb 13, 2015
Publication date	Aug 18, 2016
Grant date	—

Abstract

An abrasive grindstone for grinding a workpiece is disclosed. The abrasive grindstone includes diamond abrasive grains and a boron compound. The diamond abrasive grains and the boron compound are compounded at a predetermined volume ratio. The average grain size Y of the diamond abrasive grains is set to 0 μm<Y≦50 μm. The average grain size ratio Z of the boron compound to the diamond abrasive grains is set to 0.8≦Z≦3.0. Preferably, the workpiece is a silicon wafer, and the average grain size ratio Z is set to 0.8≦Z≦2.0.

First claim

What is claimed is:

1 . An abrasive grindstone for grinding a workpiece, comprising diamond abrasive grains and a boron compound;
said diamond abrasive grains and said boron compound being compounded at a predetermined volume ratio; an average grain size Y of said diamond abrasive grains being set to 0 μm<Y≦50 μm; an average grain size ratio Z of said boron compound to said diamond abrasive grains being set to 0.8≦Z≦3.0.

2 . The abrasive grindstone according to claim 1 ,
wherein said workpiece is a silicon wafer, and said average grain size ratio Z is set to 0.8≦Z≦2.0.

3 . The abrasive grindstone according to claim 1 ,
wherein said predetermined volume ratio between said diamond abrasive grains and said boron compound is set to 1:1 to 1:3.

4 . The abrasive grindstone according to claim 1 ,
wherein said boron compound is selected from the group consisting of boron carbide, cubic boron nitride (CBN), and hexagonal boron nitride (HBN).

Assignees

• Disco Corp

Inventors

• Oshima Ryuji
• Maji Ryogo

Classifications

• B24D3/06

  metallic {or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements} · CPC title

• B24D3/28

  Resins {or natural or synthetic macromolecular compounds (B24D3/22 takes precedence)} · CPC title

• B24D3/00

  Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents · CPC title

• B24D3/34 Primary

  characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties · CPC title

• B24D3/14

  ceramic, i.e. vitrified bondings · CPC title