Slit nozzle

Patent metadata

Field	Value
Publication number	US-2016236227-A1
Application number	US-201514625353-A
Country	US
Kind code	A1
Filing date	Feb 18, 2015
Priority date	Feb 18, 2015
Publication date	Aug 18, 2016
Grant date	—

Abstract

A slit nozzle for dispensing liquid onto a surface of a wafer, comprises a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm. The nozzle body has a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber. The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber.

First claim

What is claimed is:

1 . A slit nozzle for dispensing liquid onto a surface of a wafer, comprising a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm, a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber, wherein the dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of said nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of said discharge opening and said liquid distribution chamber.

2 . The slit nozzle according to claim 1 , wherein the dispensing chamber has a cross-sectional shape corresponding to the shape of the discharge opening, and a cross-sectional area that differs from the cross-sectional area of the discharge opening nozzle by less than 10%.

3 . The slit nozzle according to claim 1 , wherein the liquid distribution chamber has a cross-sectional shape corresponding to the shape of the discharge opening, and a cross-sectional area that differs from the cross-sectional area of the discharge opening nozzle by less than 10%.

4 . The slit nozzle according to claim 1 , wherein the cross-sectional area of said reduction section is at least 50% less than a cross-sectional area of each of said discharge opening, said dispensing chamber and said liquid distribution chamber.

5 . The slit nozzle according to claim 1 , wherein the cross-sectional area of said reduction section is at least 70% less than a cross-sectional area of each of said discharge opening, said dispensing chamber and said liquid distribution chamber.

6 . The slit nozzle according to claim 1 , wherein the length of said discharge opening is from 20-50 mm.

7 . The slit nozzle according to claim 1 , wherein said nozzle body comprises at least one first suction opening in the liquid distribution chamber.

8 . The slit nozzle according to claim 1 , wherein said nozzle body comprises at least one first suction opening in the liquid distribution chamber, at a distance of not more than 5 mm from said reduction section.

9 . The slit nozzle according to claim 7 , wherein said at least one first suction opening is elongated in a direction lengthwise of the liquid distribution chamber and parallel to said reduction section.

10 . The slit nozzle according to claim 7 , further comprising at least one second suction opening in the dispensing chamber.

11 . The slit nozzle according to claim 7 , further comprising at least one second suction opening in the dispensing chamber at a distance from the discharge opening of not more than 10 mm.

12 . The slit nozzle according to claim 10 , wherein said at least one second suction opening is elongated in a direction lengthwise of the discharge opening and parallel to the discharge opening.

13 . The slit nozzle according to claim 10 , comprising at least two second suction openings, one on each side of the dispensing chamber.

14 . The slit nozzle according to claim 1 , wherein the width of the reduction section is less than the width of the dispensing chamber and the length of the reduction section differs from the length of the dispensing chamber by less than 30%.

15 . The slit nozzle according to claim 1 , wherein said liquid distribution chamber comprises a liquid inlet configured to connect to a liquid supply pipe so as to form an angle relative to said nozzle body of 45-90°.

16 . The slit nozzle according to claim 1 , wherein the liquid distribution chamber is tapered in an upper portion thereof (hidden claims: preferably, the distribution chamber is rounded; preferably, it is rounded at a radius of not more than 50% of the breadth b of the distribution chamber and not less than the width of the distribution chamber).

17 . The slit nozzle according to claim 1 , wherein said nozzle body has a vertical extent h 1 from a narrowest area of the reduction section to the discharge opening in the range of 10-100 mm.

18 . The slit nozzle according to claim 1 , wherein the dispensing chamber comprises a transition region where the width of said dispensing chamber gradually increases from the width of the reduction section to the width of the discharge opening (hidden claim: this transition area is in the range of 10% to 100% of the distance h 1 ).

19 . The slit nozzle according to claim 1 , wherein the reduction section has a vertical extent h 2 of 0-100 mm.

20 . The slit nozzle according to claim 1 , wherein the liquid distribution chamber has a vertical extent h 3 from the reduction section to the upper end of the liquid distribution chamber that is greater than or equal to the width of the distribution chamber.

Assignees

• Lam Res Ag

Inventors

• Detterbeck Stefan
• Passegger Thomas
• Bandarapu Bhaskar
• Findenig Richard

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• B05B1/04

  in flat form, e.g. fan-like, sheet-like · CPC title

• B05B1/044 Primary

  Slits, e.g. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains (B05B1/046 takes precedence) · CPC title

• B05B1/28

  with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material · CPC title

• B05C5/0254 Primary

  Coating heads with slot-shaped outlet (B05C5/0283 takes precedence) · CPC title