Method for producing a substrate coated with a stack including a conductive transparent oxide film

Patent metadata

Field	Value
Publication number	US-2016229741-A1
Application number	US-201415029656-A
Country	US
Kind code	A1
Filing date	Oct 14, 2014
Priority date	Oct 17, 2013
Publication date	Aug 11, 2016
Grant date	—

Abstract

A process for obtaining an item including a substrate made of glass or glass ceramic coated on at least one portion of at least one of its faces with a stack of thin-layers including no silver layers and including at least one thin layer of a transparent electrically conductive oxide, the process including: a step of depositing the stack, in which step the thin layer of a transparent electrically conductive oxide and at least one thin homogenizing layer are deposited, the thin homogenizing layer being a metal layer or a layer based on a metal nitride other than aluminum nitride, or a layer based on metal carbide; then a heat treatment step in which the stack is exposed to radiation.

First claim

1 . A process for obtaining an item comprising a substrate made of glass or glass ceramic coated on at least one portion of at least one of its faces with a stack of thin-layers comprising no silver layers and comprising at least one thin layer of a transparent electrically conductive oxide, said process comprising:
a step of depositing said stack, in which step said thin layer of a transparent electrically conductive oxide and at least one thin homogenizing layer are deposited, said thin homogenizing layer being a metal layer or a layer based on a metal nitride other than aluminum nitride, or a layer based on a metal carbide; then a heat treatment step in which said stack is exposed to radiation.

2 . The process as claimed in claim 1 , wherein the transparent conductive oxide is chosen from indium tin oxide, indium zinc oxide, antimony- or fluorine-doped tin oxide, aluminum- and/or gallium- and/or titanium-doped zinc oxide, niobium- and/or tantalum-doped titanium oxide and zinc or cadmium stannate.

3 . The process as claimed in claim 2 , wherein the transparent conductive oxide is indium tin oxide.

4 . The process as claimed in claim 1 , wherein a physical thickness of the thin layer of a transparent electrically conductive oxide is at least 30 nm.

5 . The process as claimed in claim 1 , wherein a ratio of the light absorption to a physical thickness of the thin layer of a transparent electrically conductive oxide is comprised in a range extending from 0.1 to 0.9 μm −1 before heat treatment.

6 . The process as claimed in claim 1 , wherein the stack comprises a plurality of layers of a transparent conductive oxide.

7 . The process as claimed in claim 1 , wherein the thin homogenizing layer is located above the layer of a transparent electrically conductive oxide.

8 . The process as claimed in claim 1 , wherein the thin homogenizing layer is a metal layer chosen from layers of a metal chosen from titanium, tin, zirconium, zinc, aluminum, cerium or any one of their alloys.

9 . The process as claimed in claim 8 , wherein the metal is titanium.

10 . The process as claimed in claim 1 , wherein the thin homogenizing layer is based on a metal nitride chosen from titanium nitride, hafnium nitride, zirconium nitride or any one of their solid solutions,

11 . The process as claimed in claim 1 , wherein the thin homogenizing layer is based on a metal carbide chosen from titanium carbide, tungsten carbide or any one of their solid solutions.

12 . The process as claimed in claim 1 , wherein a physical thickness of the thin homogenizing layer is at most 15 nm.

13 . The process as claimed in claim 1 , wherein the radiation is emitted by at least one flash lamp.

14 . The process as claimed in claim 1 , wherein the radiation is laser radiation focused on said coating in the form of at least one laser line.

15 . The process as claimed in claim 14 , wherein a wavelength of the laser radiation is comprised in a range extending from 500 to 2000 nm.

16 . An item obtainable by way of the process of claim 1 .

17 . A single, multiple or laminated glazing unit, a mirror, a glass wall coating, an oven door or a fireplace insert comprising at least one item according to claim 16 .

18 . A photovoltaic cell, display screen or active glazing unit comprising at least one item according to claim 16 , the coating being used as an electrode.

19 . The process as claimed in claim 4 , wherein the physical thickness of the thin layer of a transparent electrically conductive oxide is at least 50 nm.

20 . The process as claimed in claim 5 , wherein the ratio is in the range extending from 0.2 to 0.7 μm −1 before heat treatment.

21 . The process as claimed in claim 6 , wherein the stack comprises two or three layers of a transparent conductive oxide.

22 . The process as claimed in claim 8 , wherein the metal layer is an alloy of tin and zinc.

23 . The process as claimed in claim 12 , wherein the physical thickness of the thin homogenizing layer is at most 8 nm.

24 . The process as claimed in claim 13 , wherein the at least one flash lamp is a xenon flash lamp.

25 . The process as claimed in claim 15 , wherein the wavelength of the laser radiation is comprised in the range extending from 700 to 1100 nm.

Assignees

• Saint Gobain

Inventors

• Canova Lorenzo
• Lamine Driss
• Nadaud Nicolas
• Roy Sébastien
• Wanakule Nisita

Classifications

• C03C17/3668 Primary

  the multilayer coating having electrical properties · CPC title

• C03C17/3441

  comprising carbon, a carbide or oxycarbide · CPC title

• C03C17/3423 Primary

  at least one of the coatings comprising a suboxide · CPC title

• C03C2217/948

  Layers comprising indium tin oxide [ITO] · CPC title

• C03C17/3435

  comprising a nitride, oxynitride, boronitride or carbonitride · CPC title