Manganese tin oxide based transparent conducting oxide and transparent conductive film and method for fabricating transparent conductive film using the same

Patent metadata

Field	Value
Publication number	US-2016225479-A1
Application number	US-201615014937-A
Country	US
Kind code	A1
Filing date	Feb 3, 2016
Priority date	Feb 4, 2015
Publication date	Aug 4, 2016
Grant date	—

Abstract

Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of Mn x Sn 1-x O (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x (0<x≦0.055) deposited on the metal thin film.

First claim

What is claimed is:

1 . A manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055).

2 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein x is 0.035-0.055.

3 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein x is 0.045.

4 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein a Root Mean Square surface roughness of the manganese tin oxide-based transparent conducting oxide is 0.6˜0.85 nm.

5 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein a sheet resistance of the manganese tin oxide-based transparent conducting oxide is 6.6˜10.4Ω/cm 2 .

6 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein a transmittance of the manganese tin oxide-based transparent conducting oxide is 82-86%.

7 . The manganese tin oxide-based transparent conducting oxide according to claim 1 , wherein the manganese tin oxide-based transparent conducting oxide is capable of being deposited on a substrate at room temperature.

8 . The manganese tin oxide-based transparent conducting oxide according to claim 7 , wherein the substrate is a glass substrate or a polymer substrate.

9 . The manganese tin oxide-based transparent conducting oxide according to claim 8 , wherein the polymer substrate is made of at least one selected from a group consisting of polyester, polyethylene, polycarbonate or polyethylene terephthalate.

10 . A multilayer transparent conductive film, comprising:
a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of Mn x Sn 1-x O (0<x≦0.055) deposited on the metal thin film.

11 . The multilayer transparent conductive film according to claim 10 , wherein x is 0.035-0.05.

12 . The multilayer transparent conductive film according to claim 10 , wherein x is 0.045.

13 . The multilayer transparent conductive film according to claim 10 , wherein the metal thin film is at least one selected from a group consisting of Ag, Au, Cu, Pd, Pt, Ni, Al, Y, La, Mg, Ca, Fe, Pb and Zn or an alloy thereof.

14 . The multilayer transparent conductive film according to claim 10 , wherein the manganese tin oxide-based transparent conducting oxide has a thickness of 20-200 nm and the metal thin film has a thickness of 5-50 nm.

Assignees

• Korea Inst Sci & Tech

Inventors

• Choi Ji-Won
• Choi Won-Kook
• Kim Jin Sang
• Yim Haena

Classifications

• H10D64/60

  Electrodes characterised by their materials · CPC title

• H10H20/833

  Transparent materials · CPC title

• H10F77/244

  made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers · CPC title

• H10F71/138

  Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes · CPC title

• C01P2006/40

  Electric properties · CPC title