Substrate treating apparatus and treatment liquid nozzle

Patent metadata

Field	Value
Publication number	US-2016218022-A1
Application number	US-201615006359-A
Country	US
Kind code	A1
Filing date	Jan 26, 2016
Priority date	Jan 28, 2015
Publication date	Jul 28, 2016
Grant date	—

Abstract

Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a housing having a space for treating a substrate in the interior thereof, a spin head which supports and rotates the substrate inside the housing, and an ejection unit having a first nozzle member for ejecting a first treatment liquid onto the substrate positioned on the spin head. The first nozzle member includes a body having an ejection passage, through which the first treatment liquid flows, therein and a first discharge hole communicated with the ejection passage to eject the first treatment liquid onto the substrate, and a vibrator installed in the body to provide vibration for the first treatment liquid flowing through the ejection passage. The vibrator has an interference preventing recess for preventing an interference by reflective waves therein.

First claim

What is claimed is:

1 . A substrate treating apparatus, comprising:
a housing having a space for treating a substrate in the interior thereof; a spin head which supports and rotates the substrate inside the housing; and an ejection unit having a first nozzle member for ejecting a first treatment liquid onto the substrate positioned on the spin head, wherein the first nozzle member comprises: a body having an ejection passage, through which the first treatment liquid flows, therein and a first discharge hole communicated with the ejection passage to eject the first treatment liquid onto the substrate; and a vibrator installed in the body to provide vibration for the first treatment liquid flowing through the ejection passage, and wherein the vibrator has an interference preventing recess for preventing an interference by reflective waves therein.

2 . The substrate treating apparatus of claim 1 , wherein the interference preventing recess is formed at a central portion of the vibrator.

3 . The substrate treating apparatus of claim 2 , wherein the interference preventing recess has a polygonal shape.

4 . The substrate treating apparatus of claim 3 , wherein the vibrator is a piezoelectric element.

5 . The substrate treating apparatus of claim 1 , wherein the vibrator has a polygonal shape.

6 . The substrate treating apparatus of claim 1 , wherein the ejection unit further comprises:
a second nozzle member for ejecting a second treatment liquid onto the substrate.

7 . The substrate treating apparatus of claim 1 , wherein the first treatment liquid is a cleaning liquid, and the second treatment liquid is a mixture solution containing ammonia and hydrogen peroxide.

8 . A treatment liquid nozzle configured to supply a treatment liquid to a target treatment body and comprising a vibrator for providing vibration with the treatment liquid, wherein the vibrator has an interference preventing recess for preventing an interference by reflective waves therein.

9 . The treatment liquid nozzle of claim 8 , wherein the interference preventing recess is formed at a central portion of the vibrator.

10 . The treatment liquid nozzle of claim 9 , wherein the interference preventing recess has a polygonal shape.

11 . The treatment liquid nozzle of claim 10 , wherein the vibrator is a piezoelectric element.

12 . The treatment liquid nozzle of claim 8 , wherein the vibrator has a polygonal shape.

13 . A treatment liquid nozzle configured to supply a treatment liquid to a target treatment body and comprising a vibrator for providing vibration with the treatment liquid, wherein the vibrator has a polygonal shape.

14 . The treatment liquid nozzle of claim 13 , wherein the vibrator is a piezoelectric element.

Assignees

• Semes Co Ltd

Inventors

• Ju yoon jong
• Choi Kihoon
• Lee Hyeon Jun

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/02

  Cleaning by the force of jets or sprays · CPC title

• B08B2203/0288

  Ultra or megasonic jets · CPC title

• B05B17/0607

  generated by electrical means, e.g. piezoelectric transducers · CPC title

• B08B3/12

  by sonic or ultrasonic vibrations · CPC title