Surface correction of mirrors with decoupling coating

Patent metadata

Field	Value
Publication number	US-2016209750-A1
Application number	US-201514981018-A
Country	US
Kind code	A1
Filing date	Dec 28, 2015
Priority date	Jun 27, 2013
Publication date	Jul 21, 2016
Grant date	—

Abstract

A mirror ( 1 ) for EUV lithography includes a substrate ( 2 ) and a reflective coating ( 3, 4 ). The reflective coating has a first group ( 3 ) of layers ( 3 a, 3 b ) and a second group ( 4 ) of layers ( 4 a, 4 b ), wherein the first group and second group of layers ( 3 a, 3 b; 4 a, 4 b ) reflect radiation having a used wavelength between 5 nm and 30 nm. The first group of layers is arranged between the substrate and the second group of layers, and a decoupling coating ( 6 ) is arranged between the first group and second group of layers, said decoupling coating optically decoupling the second group of layers from the first group of layers by preventing the radiation having the used wavelength from reaching the first group of layers. The reflective coating preferably has a correction layer ( 5 ) having a layer thickness variation for correcting the surface form of the mirror.

First claim

What is claimed is:

1 . A mirror for extreme ultraviolet (EUV) lithography, comprising:
a substrate and a reflective coating, wherein the reflective coating comprises a first group of layers and a second group of layers, wherein the first group and the second group of layers are configured respectively to reflect radiation having a used wavelength (λ B ) between 5 nm and 30 nm, wherein the first group of layers is arranged between the substrate and the second group of layers, and wherein the reflective coating further comprises a decoupling coating arranged between the first group and the second group of layers, wherein the decoupling coating is configured to decouple optically the second group of layers from the first group of layers by preventing the radiation having the used wavelength from reaching the first group of layers, and wherein the decoupling coating comprises at least one absorption layer configured to absorb the radiation having the used wavelength (λ B ) between 5 nm and 30 nm.

2 . The mirror according to claim 1 , further comprising a correction layer having a layer thickness variation correcting a surface form of the mirror and arranged between the first group and the second group of layers.

3 . The mirror according to claim 1 , wherein the absorption layer is formed from at least one material selected from the group consisting of: Ni, Ag, Ac, Te, Cu, Co, Sn, Zn, Pt, Au, W, Fe, Al, Ti, Os, Hf, Ta.

4 . The mirror according to claim 1 , wherein the absorption layer is formed from at least one alloy or chemical compound.

5 . The mirror according to claim 1 , wherein the absorption layer has a thickness of more than 50 nm.

6 . The mirror according to claim 1 , wherein the decoupling coating comprises a plurality of first layers and second layers arranged alternately one above another, wherein the first layers comprise a first material, the refractive index of which for radiation having a wavelength between 5 nm and 30 nm is greater than the refractive index of a second material, which the second layers comprise, and wherein the decoupling coating has a reflectivity maximum at a wavelength (λ E ) that deviates from the used wavelength (λ B ) by more than 2 nm.

7 . The mirror according to claim 1 , wherein the decoupling coating comprises a third group of layers, wherein the second and third groups of layers respectively comprise a plurality of first layers and second layers arranged alternately one above another in a periodic arrangement, wherein the first layers comprise a first material, the refractive index of which for radiation having a wavelength between 5 nm and 30 nm is greater than the refractive index of a second material, which the second layers comprise, and wherein a total number of pairs comprising first and second layers in the second and the third groups is more than 50.

8 . The mirror according to claim 1 , wherein the decoupling coating comprises a third group of layers, wherein the second group and third group of layers respectively comprise a plurality of first layers and second layers arranged alternately one above another in an aperiodic arrangement, wherein the first layers comprise a first material, the refractive index of which for radiation having a wavelength between 5 nm and 30 nm is greater than the refractive index of a second material, which the second layers comprise, wherein a total number of the layers in the second group and the third group is more than 50.

9 . The mirror according to claim 1 , wherein the second group comprises a number of layers which is less than or equal to 20.

10 . The mirror according to claim 2 , wherein the material of the correction layer is selected from the group consisting of: Si, SiO 2 , SiC, C, Ru, Ni.

11 . The mirror according to claim 2 , wherein the correction layer adjoins the first group of layers or the second group of layers.

12 . A projection optical unit for EUV lithography, comprising at least one mirror as claimed in claim 1 .

13 . An optical system for EUV lithography, comprising at least one mirror as claimed in claim 1 .

14 . A method for correcting a surface form of a mirror for EUV lithography comprising a substrate and a reflective coating, the method comprising:
applying a first group of layers of the reflective coating to the substrate, applying a second group of layers of the reflective coating to the first group of layers, wherein the first group and the second group of layers are respectively configured to reflect radiation at a used wavelength (λ B ) between 5 nm and 30 nm, applying a decoupling coating to optically decouple the first group and the second group of layers after applying the first group of layers and before applying the second group of layers, wherein the decoupling coating prevents the radiation having the used wavelength from reaching the first group of layers, and correcting the surface form of the mirror by producing or altering a layer thickness variation of the reflective coating.

15 . The method according to claim 14 , further comprising measuring the surface form of the mirror after applying the first group of layers and before applying the second group of layers.

16 . The method according to claim 20 , wherein producing or altering a layer thickness variation of the correction layer comprises ion beam figuring of the correction layer.

17 . A method for correcting imaging properties of a projection optical unit for EUV lithography, comprising a method for correcting a surface form of at least one mirror of the projection optical unit according to claim 14 .

18 . A method for correcting imaging properties of a projection optical unit for EUV lithography, comprising:
determining wavefront aberrations of the projection optical unit, calculating a correction surface form of at least one mirror from the wavefront aberrations of the projection optical unit, and correcting a surface form of the at least one mirror according to a method as claimed in claim 14 .

19 . The mirror according to claim 1 , wherein the absorption layer is formed from at least one alloy or chemical compound selected from the group consisting of: MoSi, CoSi, WSi, SiN, SiO, MoO, CoO, NiO.

20 . The method according to claim 14 , further comprising:
applying a correction layer to correct the surface form of the mirror by producing or altering a layer thickness of the correction layer.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Dier Oliver
• Hackl Tobias
• Stickel Franz-Josef
• Loering Ulrich
• Assmus Tilmann
• Mueller Juergen
• Kamenov Vladimir
• Rennon Siegfried

Classifications

• G21K1/062

  Devices having a multilayer structure · CPC title

• G03F7/70316

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title

• G03F7/706

  Aberration measurement · CPC title

• G03F7/70975

  Assembly, maintenance, transport or storage of apparatus · CPC title

• G03F7/70308

  Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift · CPC title