Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
US2016209441A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016209441-A1 |
| Application number | US-201414258166-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 22, 2014 |
| Priority date | Oct 28, 2011 |
| Publication date | Jul 21, 2016 |
| Grant date | — |
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Accelerometers and capacitive touch sensors fabricated from inexpensive, lightweight, disposable substrate materials, such as paper, are provided. These can be fabricated using simple technologies, such as laser cutting and screen printing. In one embodiment, a touch sensor includes a parallel plate capacitor having a fixed plate formed of a substrate material having a conductive layer and a deflectable plate formed of a paper substrate material having a conductive layer. In a second embodiment, a touch sensor includes a parallel plate capacitor formed of an exterior conductive layer deposited on a paper substrate material and an interior conductive layer deposited on a substrate material. In a third embodiment, a touch sensor includes an active electrode and a grounded electrode patterned on the surface of a paper substrate material. In another embodiment, an accelerometer includes a parallel plate capacitor containing a fixed plate and a free plate containing a paper substrate. Upon an applied acceleration, the distance between the plate of the parallel plate capacitor in an accelerometer changes, eliciting a change in the capacitance of the sensor. Measurement of capacitance can be correlated to the acceleration or deceleration applied to the accelerometer.
Opening claim text (preview).
We claim: 1 . A device comprising at least one paper or fabric substrate material having a conductive layer and optionally comprising a parallel plate capacitor. 2 . The device of claim 1 comprising a parallel plate capacitor comprising a fixed plate comprising a substrate material having a conductive layer and a free or deflectable plate comprising a paper substrate material having a conductive layer. 3 . The device of claim 1 comprising a parallel plate capacitor comprising an exterior conductive layer deposited on a paper substrate material and an interior conductive layer deposited on a substrate material. 4 . The device of claim 1 comprising an active electrode and a grounded electrode patterned on the surface of a paper substrate material. 5 . The device of claim 2 , wherein the fixed plate substrate material is paper or fabric. 6 . The device of claim 2 , wherein the substrate material of the fixed plate or the free plate is a natural polymer selected from the group consisting of cellulose, wool, silk, cotton, or chemically or structurally modified derivatives thereof. 7 . The device of claim 6 , wherein the substrate is metallized paper. 8 . The device of claim 1 , further comprising electrical contacts suitable to connect to a means for measuring the capacitance. 9 . The device of claim 1 , further comprising an integrated signal-processing circuit for measuring the capacitance. 10 . The device of claim 1 , wherein the parallel plate capacitor is formed by folding of the substrate material. 11 . The device of claim 1 , further comprising a spacer separating the fixed plate and the free or deflectable plate. 12 . The device of claim 1 , further comprising a dielectric medium of air separating the fixed plate and the free or deflectable plate. 13 . The device of claim 4 , wherein the active electrode and the grounded electrode are interdigitated. 14 . The device of claim 4 , wherein the active electrode and the grounded electrode are covered by an insulating film. 15 . The device of claim 14 , wherein the insulating film is a polymer film. 16 . The device of claim 4 , wherein the gap between the active electrode and the grounded electrode is filled with a dielectric material. 17 . The device of claim 1 , wherein the device is an accelerometer. 18 . The device of claim 1 , wherein the device is a touch sensor. 19 . An array of accelerometers comprising two or more accelerometers of claim 17 . 20 . An array of independent touch sensors comprising two or more touch sensors of claim 18 . 21 . The array of claim 19 or claim 20 , wherein the two or more devices are patterned onto a continuous piece of substrate material. 22 . The array of claim 21 , wherein the substrate material is folded into a three dimensional shape. 23 . The array of claim 22 , wherein the shape is a cube and the devices are accelerometers positioned orthogonally on the faces of the cube. 24 . The array of claim 20 , wherein the array of touch sensors forms a keyboard, touchpad, or other data entry device. 25 . A method of making a device comprising one or more parallel plate capacitors, comprising patterning one or more layers selected from the group consisting of a paper substrate layer, a fixed substrate layer, a spacer layer, and a free or deflectable substrate layer and joining them together. 26 . The method of claim 25 , wherein the devices are on a continuous roll. 27 . An apparatus having applied thereto one or more devices claim 1 . 28 . The apparatus of claim 27 wherein one or more electrical device components from one or more of the devices and/or one or more of the arrays make contact with electrical device components in or on the object to complete an electrical circuit. 29 . The apparatus of claim 27 , wherein the apparatus is selected from the group consisting of medical devices, industrial controls, automotive components, fitness products, toys, athletic equipment, protective equipment, smart packaging materials, and assistive technology. 30 . The apparatus of claim 29 , wherein the apparatus comprises a toy. 31 . The apparatus of claim 29 , wherein the apparatus comprises packaging. 32 . The apparatus of claim 31 , wherein the device indicates whether the package has been opened. 33 . The apparatus of claim 29 , wherein the apparatus comprises a device or pharmaceutical used or administered by a healthcare provider. 34 . A method of generating a signal comprising contacting a touch sensor of claim 18 , wherein the touch sensor is a single touch sensor or one of a plurality of touch sensors from an array of touch sensors. 35 . A method of sensing acceleration or deceleration, comprising: detecting a change in capacitance using one or more devices according to claim 1 , wherein the device is secured to an article.
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