Use of quartz plates during growth of single crystal silicon ingots
US-12146236-B2 · Nov 19, 2024 · US
US2016208407A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016208407-A1 |
| Application number | US-201615001830-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 20, 2016 |
| Priority date | Jan 20, 2015 |
| Publication date | Jul 21, 2016 |
| Grant date | — |
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A single crystal production apparatus wherein the chamber has a top plate part, a bottom plate part and a barrel part, the barrel part is in a hollow cylindrical shape and made of quartz glass and connects the top plate part with the bottom plate part, an openable/closable reflective member is provided on the outer circumference of the barrel part, and the reflective member is divided in the circumferential direction and reflects heat and light radiated from the inside of the chamber.
Opening claim text (preview).
1 . A single crystal production apparatus, comprising a chamber housing a crucible and an induction heating coil, wherein said chamber has a top plate part, a bottom plate part, and a barrel part, said barrel part has a hollow cylindrical shape and is made of quartz glass, and connects said to plate part with said bottom plate part, an openable/closable reflective member is provided on the outer circumference of said barrel part, and said reflective member is divided in the circumferential direction and reflects heat and light radiated from the inside of said chamber. 2 . The apparatus according to claim 1 , wherein said reflective member is a plurality of electromagnetic steel sheets stacked from the outer circumference toward the inner circumference.
Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure · CPC title
Heating of the reaction chamber · CPC title
Carbides · CPC title
Heating of the reaction chamber or the substrate · CPC title
Stirring of the melt · CPC title
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